JPH0336277A - 霧化薄膜形成装置 - Google Patents
霧化薄膜形成装置Info
- Publication number
- JPH0336277A JPH0336277A JP17049089A JP17049089A JPH0336277A JP H0336277 A JPH0336277 A JP H0336277A JP 17049089 A JP17049089 A JP 17049089A JP 17049089 A JP17049089 A JP 17049089A JP H0336277 A JPH0336277 A JP H0336277A
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- film
- substrate
- forming chamber
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 17
- 238000000889 atomisation Methods 0.000 title abstract description 6
- 239000010408 film Substances 0.000 claims abstract description 99
- 239000000758 substrate Substances 0.000 claims abstract description 46
- 238000010438 heat treatment Methods 0.000 claims abstract description 3
- 239000003595 mist Substances 0.000 claims description 18
- 239000002994 raw material Substances 0.000 claims description 13
- 239000000243 solution Substances 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 101100173585 Schizosaccharomyces pombe (strain 972 / ATCC 24843) fft1 gene Proteins 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
- Chemically Coating (AREA)
- Electrodes Of Semiconductors (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17049089A JPH0336277A (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17049089A JPH0336277A (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0336277A true JPH0336277A (ja) | 1991-02-15 |
| JPH0461075B2 JPH0461075B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-09-29 |
Family
ID=15905929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17049089A Granted JPH0336277A (ja) | 1989-06-30 | 1989-06-30 | 霧化薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336277A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002062815A (ja) * | 2000-08-22 | 2002-02-28 | Xanavi Informatics Corp | 車両用モニタ取付装置 |
-
1989
- 1989-06-30 JP JP17049089A patent/JPH0336277A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002062815A (ja) * | 2000-08-22 | 2002-02-28 | Xanavi Informatics Corp | 車両用モニタ取付装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0461075B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-09-29 |
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