JPH0335514B2 - - Google Patents

Info

Publication number
JPH0335514B2
JPH0335514B2 JP58208082A JP20808283A JPH0335514B2 JP H0335514 B2 JPH0335514 B2 JP H0335514B2 JP 58208082 A JP58208082 A JP 58208082A JP 20808283 A JP20808283 A JP 20808283A JP H0335514 B2 JPH0335514 B2 JP H0335514B2
Authority
JP
Japan
Prior art keywords
diaphragm
ceramic
piezoelectric effect
drive
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58208082A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6098181A (ja
Inventor
Hisashi Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Sunac Corp
Original Assignee
Asahi Okuma Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Okuma Industrial Co Ltd filed Critical Asahi Okuma Industrial Co Ltd
Priority to JP58208082A priority Critical patent/JPS6098181A/ja
Publication of JPS6098181A publication Critical patent/JPS6098181A/ja
Publication of JPH0335514B2 publication Critical patent/JPH0335514B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP58208082A 1983-11-04 1983-11-04 ダイヤフラムポンプ Granted JPS6098181A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58208082A JPS6098181A (ja) 1983-11-04 1983-11-04 ダイヤフラムポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58208082A JPS6098181A (ja) 1983-11-04 1983-11-04 ダイヤフラムポンプ

Publications (2)

Publication Number Publication Date
JPS6098181A JPS6098181A (ja) 1985-06-01
JPH0335514B2 true JPH0335514B2 (enrdf_load_stackoverflow) 1991-05-28

Family

ID=16550340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58208082A Granted JPS6098181A (ja) 1983-11-04 1983-11-04 ダイヤフラムポンプ

Country Status (1)

Country Link
JP (1) JPS6098181A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61290202A (ja) * 1985-06-18 1986-12-20 Ngk Spark Plug Co Ltd パルス作動型回転駆動装置
JPS61290203A (ja) * 1985-06-18 1986-12-20 Ngk Spark Plug Co Ltd パルス作動型直線状往復駆動装置
JPH0629507Y2 (ja) * 1987-04-10 1994-08-10 株式会社三鈴エリ− 圧電振動子ポンプ
JPH0629508Y2 (ja) * 1987-04-10 1994-08-10 株式会社三鈴エリ− 圧電振動子ポンプ
US5268807A (en) * 1990-05-29 1993-12-07 Tdk Corporation Tape cassette having improved head house region
DE10201027C1 (de) * 2002-01-11 2003-08-07 Eads Deutschland Gmbh Flüssigkeitspumpe
CN102714474A (zh) * 2009-11-10 2012-10-03 麻省理工学院 相控阵屈曲致动器

Also Published As

Publication number Publication date
JPS6098181A (ja) 1985-06-01

Similar Documents

Publication Publication Date Title
US4553059A (en) Piezoelectric actuator and a piezoelectric pump injector incorporating the same
US7258533B2 (en) Method and apparatus for scavenging energy during pump operation
US20030117044A1 (en) Electroactive polymer actuator and diaphragm pump using the same
US4814659A (en) Variable cross-section piezoelectric actuator
AU2002220442B2 (en) Diaphragm pump
JP2002257003A (ja) 燃料噴射装置
JPH0335514B2 (enrdf_load_stackoverflow)
JPH0335515B2 (enrdf_load_stackoverflow)
US3276389A (en) Balanced pressure pump
JPH053230B2 (enrdf_load_stackoverflow)
US3520641A (en) Piezoelectric pump
US11218089B2 (en) Rotary motor with ultrasonic actuator
JPS61171891A (ja) 圧電型ポンプ
JPS58218183A (ja) 電歪式アクチユエ−タとその製造方法
JP3828971B2 (ja) 容積型ポンプ
JPS6084978A (ja) アクチュエ−タ−
JPH0568194B2 (enrdf_load_stackoverflow)
JPS59200083A (ja) ポンプ
JPH0710185B2 (ja) 積層形圧電セラミツクを駆動源としたアクチユエータ
Jalink Jr et al. Ferroelectric Pump
JPH03186674A (ja) 圧電弁装置
JPH0419201Y2 (enrdf_load_stackoverflow)
JPH04103273U (ja) 圧電ポンプ
JP2502849Y2 (ja) 斜板式ピストンポンプ・モ―タ
JP3528188B2 (ja) ポンプ