JPH0335515B2 - - Google Patents

Info

Publication number
JPH0335515B2
JPH0335515B2 JP58208083A JP20808383A JPH0335515B2 JP H0335515 B2 JPH0335515 B2 JP H0335515B2 JP 58208083 A JP58208083 A JP 58208083A JP 20808383 A JP20808383 A JP 20808383A JP H0335515 B2 JPH0335515 B2 JP H0335515B2
Authority
JP
Japan
Prior art keywords
diaphragm
drive shaft
ceramic
piezoelectric effect
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58208083A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6098182A (ja
Inventor
Hisashi Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Sunac Corp
Original Assignee
Asahi Okuma Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Okuma Industrial Co Ltd filed Critical Asahi Okuma Industrial Co Ltd
Priority to JP58208083A priority Critical patent/JPS6098182A/ja
Publication of JPS6098182A publication Critical patent/JPS6098182A/ja
Publication of JPH0335515B2 publication Critical patent/JPH0335515B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP58208083A 1983-11-04 1983-11-04 ダイヤフラムポンプ Granted JPS6098182A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58208083A JPS6098182A (ja) 1983-11-04 1983-11-04 ダイヤフラムポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58208083A JPS6098182A (ja) 1983-11-04 1983-11-04 ダイヤフラムポンプ

Publications (2)

Publication Number Publication Date
JPS6098182A JPS6098182A (ja) 1985-06-01
JPH0335515B2 true JPH0335515B2 (enrdf_load_stackoverflow) 1991-05-28

Family

ID=16550357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58208083A Granted JPS6098182A (ja) 1983-11-04 1983-11-04 ダイヤフラムポンプ

Country Status (1)

Country Link
JP (1) JPS6098182A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2887677B2 (ja) * 1988-08-11 1999-04-26 株式会社日本計器製作所 圧電ポンプ
JP2887678B2 (ja) * 1988-08-12 1999-04-26 株式会社日本計器製作所 圧電ポンプ
JPH03168373A (ja) * 1989-11-24 1991-07-22 Nippon Keiki Seisakusho:Kk 圧電ポンプ制御装置
JP2935042B2 (ja) * 1989-11-24 1999-08-16 株式会社日本計器製作所 圧電ポンプ
CN1124411C (zh) * 1998-11-11 2003-10-15 张建辉 一种压电陶瓷泵
DE10201027C1 (de) * 2002-01-11 2003-08-07 Eads Deutschland Gmbh Flüssigkeitspumpe
JPWO2005012730A1 (ja) * 2003-08-05 2006-09-21 イーメックス株式会社 ポンプ

Also Published As

Publication number Publication date
JPS6098182A (ja) 1985-06-01

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