JPH0334202B2 - - Google Patents
Info
- Publication number
- JPH0334202B2 JPH0334202B2 JP26994984A JP26994984A JPH0334202B2 JP H0334202 B2 JPH0334202 B2 JP H0334202B2 JP 26994984 A JP26994984 A JP 26994984A JP 26994984 A JP26994984 A JP 26994984A JP H0334202 B2 JPH0334202 B2 JP H0334202B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- temperature
- insulating substrate
- thin film
- sensitive resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 22
- 239000010409 thin film Substances 0.000 claims description 18
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59269949A JPS61147501A (ja) | 1984-12-21 | 1984-12-21 | 薄膜サ−ミスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59269949A JPS61147501A (ja) | 1984-12-21 | 1984-12-21 | 薄膜サ−ミスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61147501A JPS61147501A (ja) | 1986-07-05 |
| JPH0334202B2 true JPH0334202B2 (cs) | 1991-05-21 |
Family
ID=17479450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59269949A Granted JPS61147501A (ja) | 1984-12-21 | 1984-12-21 | 薄膜サ−ミスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61147501A (cs) |
-
1984
- 1984-12-21 JP JP59269949A patent/JPS61147501A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61147501A (ja) | 1986-07-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4276535A (en) | Thermistor | |
| US4160969A (en) | Transducer and method of making | |
| JPS5728223A (en) | Pyroelectric type radiation wave detector and manufacture thereof | |
| JPS62291001A (ja) | 薄膜サ−ミスタとその製造方法 | |
| JPH0334202B2 (cs) | ||
| JPH0340484B2 (cs) | ||
| JPS61242002A (ja) | 薄膜サ−ミスタ | |
| JP2530840B2 (ja) | 薄膜温度センサ | |
| JPS61235725A (ja) | 流量センサ | |
| JPS5871603A (ja) | 薄膜サ−ミスタの製造方法 | |
| RU2069324C1 (ru) | Термометр сопротивления | |
| JPH0618465A (ja) | 複合センサ | |
| JP3201881B2 (ja) | ガスセンサ | |
| JPS6041441B2 (ja) | 薄膜サ−ミスタ | |
| JPS55114579A (en) | Thin-film type thermal recording head | |
| JPS61160020A (ja) | 流量センサ | |
| JP2727541B2 (ja) | 薄膜サーミスタの製造法 | |
| JPH0221675A (ja) | 薄膜サーモパイル用基板 | |
| JPH0251201A (ja) | 薄膜ｐｔｃ抵抗体 | |
| JPS55117934A (en) | Thermosensitive element | |
| JPS54125044A (en) | Thin film type thermal head | |
| Singh | Sputtered Molybdenum Film Resistors | |
| JPS63285902A (ja) | ＳｉＣ薄膜サ−ミスタの製造方法 | |
| JPH1090073A (ja) | 輻射センサ及びその製造方法 | |
| JPS5923082B2 (ja) | サ−ミスタおよびその製造方法 |