JPH033392A - Paste sucking device for forming through hole - Google Patents

Paste sucking device for forming through hole

Info

Publication number
JPH033392A
JPH033392A JP13784089A JP13784089A JPH033392A JP H033392 A JPH033392 A JP H033392A JP 13784089 A JP13784089 A JP 13784089A JP 13784089 A JP13784089 A JP 13784089A JP H033392 A JPH033392 A JP H033392A
Authority
JP
Japan
Prior art keywords
negative pressure
hole
paste
base
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13784089A
Other languages
Japanese (ja)
Inventor
Eiji Fukui
福井 英司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Juki Corp
Original Assignee
Juki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Juki Corp filed Critical Juki Corp
Priority to JP13784089A priority Critical patent/JPH033392A/en
Publication of JPH033392A publication Critical patent/JPH033392A/en
Pending legal-status Critical Current

Links

Landscapes

  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

PURPOSE:To prevent paste which may possibly short-circuit a circuit pattern on a rear face of a board from being scattered to the rear face by connecting a recess of a base to a negative pressure source through a negative pressure tank and interposing solenoid valves between the tank and the recess of the base, the source. CONSTITUTION:A base 20 is moved in XY-directions, the through hole 11 of a bass 10 to be plotted is disposed directly under the nozzle 4 of a plotting device, and conductive paste is discharged from the nozzle 4 while finely moving the base 20 in the XY-directions with the position as a center, thereby plotting a through hole land part. In this case, a solenoid valve 1 of a suction hole 23 side is closed, a solenoid valve 3 of a negative pressure source 40 side is opened, and a negative pressure tank 2 is held in a negative pressure state. When the land part is completely plotted, the valve 1 is opened, the valve 3 is closed, and negative pressure in the tank 2 is supplied to the recess 22 of the base 20. When the tank 2 becomes the atmospheric pressure, the valve 1 is closed, the valve 3 is opened to introduce the negative pressure from the source 40 into the tank 2, and next through hole part is plotted.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、スルーホール基板の各スルーホール部に直
接描画装置のノズルから吐出したペーストを、裏面から
負圧により吸引して各スルーホ・−ルの内壁にペースト
の厚膜を形成するスルーホール形成用ペースト吸引装置
に関する。
[Detailed Description of the Invention] [Industrial Field of Application] This invention applies negative pressure to the back side of a through-hole substrate by sucking paste discharged from a nozzle of a drawing device directly onto each through-hole portion of a through-hole substrate. The present invention relates to a paste suction device for forming through-holes, which forms a thick film of paste on the inner wall of a hole.

〔従来の技術〕[Conventional technology]

近年、電子部品の密度を向上させるために、例えば2イ
ンチ角のスルーホール基板で直径0.3〜1.0−のス
ルーホールが100個以上も形成されたものが用いられ
るようになってきた。
In recent years, in order to improve the density of electronic components, for example, 2-inch square through-hole boards with more than 100 through-holes of 0.3 to 1.0-diameter have been used. .

このようなスルーホール基板は、耐熱性セラミック材等
からなる基板に多数のスルーホールが穿設されており、
その基板の表裏両面における各スルーホールを含む周辺
のスルーホール部及びスルーホール内壁に直接描画装置
によって導電性ペーストの厚膜を形成している。
This type of through-hole board has a large number of through holes drilled in a board made of heat-resistant ceramic material, etc.
A thick film of conductive paste is formed by a direct drawing device on the peripheral through-hole portions including each through-hole on both the front and back surfaces of the substrate, and on the inner walls of the through-holes.

それに用いられる直接描画装置は、ノズルとスルーホー
ル基板(以下「基板」という)とを相対移動させながら
、ノズルから基板表面の各スルーホール部に順次ペース
トを吐出させてスルーホールを覆うランド部を形成し、
それをスルーホール吸引系により基板裏面から吸引して
スルーホール内へペーストを引き込み、各スルーホール
の内壁にペーストの厚膜を形成するようになっている。
The direct writing device used for this purpose moves the nozzle and the through-hole substrate (hereinafter referred to as the "substrate") relative to each other, and sequentially discharges paste from the nozzle to each through-hole section on the surface of the substrate, thereby forming a land section that covers the through-hole. form,
The through-hole suction system sucks the paste from the back surface of the substrate and draws the paste into the through-holes, forming a thick film of paste on the inner walls of each through-hole.

第5図はこのような直接描画装置を用いたスルーホール
形成用ペースト吸引装置の一例を示すものであり、多数
のスルーホール11を有する基板10を図示しないXY
子テーブル上固設された基台20上の所定の位置に載置
し、その周縁部を基板吸引用孔21を介して負圧源30
の負圧により吸着して固定している。
FIG. 5 shows an example of a paste suction device for forming through holes using such a direct drawing device, in which a substrate 10 having a large number of through holes 11 is drawn in an XY direction (not shown).
It is placed at a predetermined position on a base 20 fixed on a sub-table, and its peripheral portion is connected to a negative pressure source 30 through a substrate suction hole 21.
It is adsorbed and fixed by negative pressure.

また、基台20の基板10に覆われる凹部22を、スル
ーホール吸引用孔23により、電磁弁41を介して負圧
源40に接続している。
Further, a recess 22 of the base 20 covered by the substrate 10 is connected to a negative pressure source 40 via a solenoid valve 41 through a through-hole suction hole 23 .

そして、基板10のスルーホール部に、図示しない周知
の直接描画装置のノズルからペーストを吐出して同図A
部に拡大して示すようにランド部12を形成し、電磁弁
41を開いて負圧1fi40から基板10の裏面へ負圧
を供給し、ランド部12のペーストを矢示S方向に吸引
することにより。
Then, paste is discharged into the through-hole portion of the substrate 10 from a nozzle of a well-known direct writing device (not shown).
As shown in the enlarged view, the land portion 12 is formed, and the electromagnetic valve 41 is opened to supply negative pressure from the negative pressure 1fi40 to the back surface of the substrate 10, and the paste on the land portion 12 is sucked in the direction of arrow S. By.

スルーホール内壁11aにペーストの厚膜を形成する。A thick film of paste is formed on the inner wall 11a of the through hole.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、このような従来のスルーホール形成用ペ
ースト吸引装置にあっては、ペースト吸引用負圧の供給
、停止を電磁弁の開閉のみによって行っていたので、基
台20の凹部22内の負圧は、第6図に示すように、電
磁弁41の開放により大気圧から一気に負圧源40の負
圧にまで上昇し、閉止により一気に大気圧に復帰してそ
の圧力変化が極めて急激であった。
However, in such conventional paste suction devices for forming through-holes, the negative pressure for paste suction was supplied and stopped only by opening and closing a solenoid valve. As shown in FIG. 6, when the solenoid valve 41 was opened, the pressure suddenly rose from atmospheric pressure to the negative pressure of the negative pressure source 40, and when it was closed, the pressure suddenly returned to atmospheric pressure, and the pressure change was extremely rapid. .

そのため、基板10のスルーホール部に形成されたペー
ストの厚膜は、電磁弁の開放により急激にスルーホール
内へ引き込まれてその内壁11aにペーストの厚膜13
を形成するが、f!電磁弁閉止してもペーストの流動は
急には停止できないので、第7図に示すように、余分の
ペーストが基板裏面へ飛散して島14を形成し、裏面に
描画した回路パターンをショートさせるおそれがあった
Therefore, the thick film of paste formed in the through-hole portion of the substrate 10 is rapidly drawn into the through-hole by the opening of the solenoid valve, and the thick film of paste formed on the inner wall 11a of the through-hole is rapidly drawn into the through-hole.
but f! Even if the solenoid valve is closed, the flow of the paste cannot be suddenly stopped, so as shown in Figure 7, the excess paste scatters to the back side of the board, forming islands 14 and shorting out the circuit pattern drawn on the back side. There was a risk.

この発明は、このような従来の問題点を解決し、ペース
トが基板裏面へ飛散することを防止するスルーホール形
成用ペースト吸引装置を提供することを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a through-hole forming paste suction device that solves these conventional problems and prevents paste from scattering to the back surface of a substrate.

〔課題を解決するための手段〕[Means to solve the problem]

上記の目的を達成するため、この発明によるスルーホー
ル形成用ペースト吸引装置は、直接描画装置のノズルと
スルーホール基板を載置した基台とを相対移動させ、ノ
ズルからスルーホール基板のスルーホール部へペースト
を吐出させ、吸引用負圧源によって上記基台の凹部に生
じるエアの流れにより、スルーホール内壁にペーストの
厚膜を形成するスルーホール形成用ペースト吸引装置に
おいて、上記基台の凹部を負圧タンクを介して上記負圧
源に接続すると共に、負圧タンクと基台凹部との間及び
負圧源との間に、それぞれ第1.第2の電磁弁を介装し
たものである。
In order to achieve the above object, the paste suction device for forming through-holes according to the present invention moves the nozzle of the direct writing device and the base on which the through-hole substrate is placed relative to each other, so that In a paste suction device for through-hole formation, which forms a thick film of paste on the inner wall of the through-hole by discharging the paste to the recess of the base by a flow of air generated in the recess of the base by a negative pressure source for suction, the recess of the base is The first. A second solenoid valve is installed.

〔作 用〕[For production]

このような構成により、まず基台側の第1の電磁弁を閉
じ、負圧源側の第2の電磁弁を開いて負圧タンクを真空
状態に保った状態で、直接描画装置により基板のスルー
ホール部へペーストを吐出してランド部を描画する。
With this configuration, first, the first solenoid valve on the base side is closed, and the second solenoid valve on the negative pressure source side is opened to maintain the negative pressure tank in a vacuum state, and then the direct writing device is used to write the substrate. A land portion is drawn by discharging paste onto the through-hole portion.

描画が終了して第1の電磁弁を開き、第2の電磁弁を閉
じると、負圧タンク内の負圧によってスルーホールを通
って基台凹部へ向うエアの流れが生じ、スルーホールラ
ンド部のペーストがスルーホール内へ急激に引き込まれ
てその内壁にペーストの厚膜を形成する。
When drawing is completed and the first solenoid valve is opened and the second solenoid valve is closed, the negative pressure in the negative pressure tank causes air to flow through the through hole toward the base recess, and the through hole land area The paste is rapidly drawn into the through-hole, forming a thick film of paste on its inner wall.

これにより、負圧タンク内にスルーホールを通過した大
気が進入するので、負圧タンク内は徐々に大気圧に近付
き、スルーホールに流入するペーストの流速、流量が停
下し、負圧タンク内が大気圧になるとペーストの動きも
停止する。
As a result, the atmosphere that has passed through the through-hole enters the negative-pressure tank, so the inside of the negative-pressure tank gradually approaches atmospheric pressure, and the flow rate and flow rate of the paste flowing into the through-hole stops, causing the inside of the negative-pressure tank to gradually approach atmospheric pressure. When the pressure reaches atmospheric pressure, the movement of the paste also stops.

したがって、この時点で第1の電磁弁を閉じ。Therefore, at this point, close the first solenoid valve.

第2の電磁弁を開いて負圧タンクに再び負圧を供給して
次の吸引に備える。
Open the second electromagnetic valve to supply negative pressure to the negative pressure tank again in preparation for the next suction.

このような一連の動作を繰返してすべてのスルーホール
にペーストを導入してスルーホール形成を行う。
By repeating this series of operations, paste is introduced into all the through holes to form through holes.

〔実施例〕〔Example〕

以下、添付図面の第1図乃至第4図を参照してこの発明
の詳細な説明する。
Hereinafter, the present invention will be described in detail with reference to FIGS. 1 to 4 of the accompanying drawings.

第1図はこの発明の一実施例の構成を示すものであり、
基板10及び基台20は第5図と同様であるのでその説
明は省略する。
FIG. 1 shows the configuration of an embodiment of the present invention.
Since the substrate 10 and the base 20 are the same as those shown in FIG. 5, their explanation will be omitted.

この実施例では、基台20の凹部22に連通するスルー
ホール吸引用孔23とスルーホール吸引用負圧源40と
の間に、スルーホール吸引用孔23側から第1の電磁弁
1.負圧タンク2及び第2の電磁弁3を順次介装してス
ルーホール吸引系を構成している。
In this embodiment, a first electromagnetic valve 1. A negative pressure tank 2 and a second electromagnetic valve 3 are successively installed to form a through-hole suction system.

なお、負圧タンク2の容量は、基板10のスルーホール
11の径及び数に応じて設定される。
Note that the capacity of the negative pressure tank 2 is set according to the diameter and number of through holes 11 in the substrate 10.

上記のような構成からなる実施例において、描画に先立
ち基板10を図示しない複数の位置決めピンで規制して
所定の位置に載置し、基板吸引用負圧源30から基板吸
着用孔21を通って基板裏面に負圧を作用させ、その吸
引力により基台20の上面に基板10を吸着させて固定
する。
In the embodiment configured as described above, prior to drawing, the substrate 10 is regulated by a plurality of positioning pins (not shown) and placed in a predetermined position, and the negative pressure source 30 for sucking the substrate passes through the substrate suction hole 21. Negative pressure is applied to the back surface of the substrate, and the suction force causes the substrate 10 to be attracted and fixed to the upper surface of the base 20.

次に、その後の処理を、第1図と共に第2図に示すフロ
ー図及び第3図に示すタイムチャートをも参照しながら
説明する。
Next, the subsequent processing will be explained with reference to the flowchart shown in FIG. 2 as well as the time chart shown in FIG. 3 as well as FIG.

まず、基台20をXY力方向移動させて描画しようとす
る基台10のスルーホール11を直接描画装置(図示し
ない)のノズル4の下方に位置させ、その位置を中心と
して基台20をXY力方向微動させながら、ノズル4か
ら導電性ペーストを吐出させてスルーホールランド部の
描画を行う。
First, by moving the base 20 in the XY force direction, the through hole 11 of the base 10 to be drawn is positioned directly below the nozzle 4 of the drawing device (not shown), and the base 20 is moved in the XY direction around that position. While making slight movements in the force direction, conductive paste is discharged from the nozzle 4 to draw through-hole land portions.

この時、第3図に示すように第1の電磁弁1を閉じ、第
2の電磁弁3を開いて負圧タンク2を負圧状態に保つ・ スルーホールランド部の描画が終了すると、第1の電磁
弁1を開き第2の電磁弁3を閉じて負圧タンク2内の負
圧を基台20の凹部22へ供給する。これにより、スル
ーホールランド部のペーストがスルーホール11内へ強
力に引き込まれ、スルーホール11を通った大気圧が負
圧タンク2内へ導入されてスルーホール吸引系内の負圧
が徐々に大気圧に近付く。第4図はその状態を示してい
る。
At this time, as shown in Fig. 3, the first solenoid valve 1 is closed and the second solenoid valve 3 is opened to maintain the negative pressure tank 2 in a negative pressure state. The first solenoid valve 1 is opened and the second solenoid valve 3 is closed to supply negative pressure in the negative pressure tank 2 to the recess 22 of the base 20. As a result, the paste on the through-hole land is strongly drawn into the through-hole 11, and the atmospheric pressure that has passed through the through-hole 11 is introduced into the negative pressure tank 2, causing the negative pressure in the through-hole suction system to gradually increase. approaches atmospheric pressure. FIG. 4 shows this state.

それに伴って、ペーストの流速及び流量も小さくなり、
最後に負圧タンク2内の圧力が大気圧に等しくなるとペ
ーストの動きも停止する。
Along with this, the flow rate and flow rate of the paste also decrease,
Finally, when the pressure in the negative pressure tank 2 becomes equal to atmospheric pressure, the movement of the paste also stops.

負圧タンク2内が大気圧になる頃、第1の電磁弁1を閉
じ、第2の電磁弁3を開いて負圧タンク2内に負圧源4
0からの負圧を導入すると共に次のスルーホール部の描
画を行った後、再び上述のペースト吸引処理を行い、す
べてのスルーホールについてこれを繰返してスルーホー
ル形成を終了する。
When the inside of the negative pressure tank 2 reaches atmospheric pressure, the first solenoid valve 1 is closed and the second solenoid valve 3 is opened to supply a negative pressure source 4 inside the negative pressure tank 2.
After introducing negative pressure from 0 and drawing the next through-hole section, the above-described paste suction process is performed again, and this is repeated for all through-holes to complete through-hole formation.

なお、描画のためのノズル4からのペーストの吐出及び
停止、第1.第2の電磁弁1,3の開閉等の一連の動作
のタイミングはすべて図示しないマイクロコンピュータ
により制御される。また。
In addition, the discharge and stop of the paste from the nozzle 4 for drawing, the first. The timing of a series of operations such as opening and closing of the second solenoid valves 1 and 3 is all controlled by a microcomputer (not shown). Also.

ペーストの吸引開始から負圧タンク2内が大気圧になる
時間は、予め実測により求めてメモリ内にパラメータと
してそのデータを入れておくのが望ましい。
It is desirable to determine the time from when the inside of the negative pressure tank 2 reaches atmospheric pressure from the start of sucking the paste through actual measurement and to store the data as a parameter in the memory.

このように、スルーホールランド部のペーストは、最初
は極めて強力にスルーホール11内に引き込まれてその
内壁11aにペーストの厚膜を形成した後、徐々に速力
を減じて停止するので、基板10.の裏面へペーストが
飛散するおそれはなく、裏面パターンのショートを未然
に防止することができる。
In this way, the paste in the through-hole land portion is initially very strongly drawn into the through-hole 11 and forms a thick film of paste on the inner wall 11a of the through-hole, and then the speed gradually decreases and stops, so that the substrate 10 .. There is no risk of the paste scattering to the back side of the back side, and short circuits of the back side pattern can be prevented.

〔発明の効果〕〔Effect of the invention〕

以上述べたように、この発明によれば、基板を固定した
基台凹部を負圧タンクを介して負圧源に接続し、この負
圧タンクの基台側と負圧源側にそれぞれ第1.第2の電
磁弁を介装したので、これらの第1.第2の電磁弁開閉
のタイミングをスルーホール部の描画に合わせて制御す
ることにより、描画されたペーストを負圧タンク内の負
圧を用いて基板裏面から吸引することができる。
As described above, according to the present invention, the base concave portion to which the substrate is fixed is connected to the negative pressure source via the negative pressure tank, and the first recess is connected to the base side and the negative pressure source side of the negative pressure tank, respectively. .. Since the second solenoid valve is installed, these first solenoid valves are interposed. By controlling the timing of opening and closing of the second electromagnetic valve in accordance with the drawing of the through-hole portion, the drawn paste can be sucked from the back surface of the substrate using the negative pressure in the negative pressure tank.

そして、その負圧力は吸引の初期には負圧源の負圧力と
同等であるので、描画されたペーストを強力にスルーホ
ール内へ引き込んでその内壁に確実にペーストの厚膜を
形成させることができ、その後は負圧力が弱まってペー
ストの流速、流量が徐々に低下する。
Since the negative pressure is equal to the negative pressure of the negative pressure source at the beginning of suction, it is possible to forcefully draw the drawn paste into the through hole and form a thick film of paste on the inner wall of the through hole. After that, the negative pressure weakens and the paste flow rate and flow rate gradually decrease.

その結果、基板裏面へのペーストの飛散が防止され、裏
面に形成された回路パターンが飛散したペーストによっ
てショートするおそれをなくすることができる。
As a result, it is possible to prevent the paste from scattering to the back surface of the substrate, and to eliminate the possibility that the circuit pattern formed on the back surface will be short-circuited by the scattered paste.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例を示す構成図、第2図はそ
のスルーホール形成方法を示すフロー図、 第3図はその各部の作動タイミングを示すタイムチャー
ト。 第4図はペースト吸引時の負圧の変化を示す線図、第5
図は従来のペースト吸引装置を例示する構成図。 第6図は同じくそのスルーホール吸引系の負圧の変化を
示す線図、 第7図は同じくその好ましくないスルーホール形成状態
を示す説明図である。 1・・・第1の電磁弁     2・・・負圧タンク3
・・・第2の電磁弁     4・・・ノズル10・・
・スルーホール基板  11・・・スルーホール20・
・・基台       、22・・・基台凹部30・・
・基板吸引用負圧源 40・・・スルーホール吸引用負圧源
FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a flow chart showing a through hole forming method, and FIG. 3 is a time chart showing the operation timing of each part. Figure 4 is a diagram showing changes in negative pressure during paste suction;
The figure is a configuration diagram illustrating a conventional paste suction device. FIG. 6 is a diagram showing changes in the negative pressure of the through-hole suction system, and FIG. 7 is an explanatory diagram showing the undesirable state of through-hole formation. 1... First solenoid valve 2... Negative pressure tank 3
...Second solenoid valve 4...Nozzle 10...
・Through hole board 11...Through hole 20・
...Base, 22...Base recess 30...
・Negative pressure source for substrate suction 40...Negative pressure source for through hole suction

Claims (1)

【特許請求の範囲】 1 直接描画装置のノズルとスルーホール基板を載置し
た基台とを相対移動させ、前記ノズルから前記スルーホ
ール基板のスルーホール部へペーストを吐出させ、吸引
用負圧源によつて前記基台凹部に生じるエアの流れによ
り、スルーホール内壁にペーストの厚膜を形成するスル
ーホール形成用ペースト吸引装置において、 前記基台凹部を負圧タンクを介して前記負圧源に接続す
ると共に、前記負圧タンクと前記基台凹部との間及び前
記負圧源との間に、それぞれ第1,第2の電磁弁を介装
したことを特徴とするスルーホール形成用ペースト吸引
装置。
[Scope of Claims] 1. A nozzle of a direct writing device and a base on which a through-hole substrate is placed are moved relative to each other, paste is discharged from the nozzle to a through-hole portion of the through-hole substrate, and a negative pressure source for suction is applied. In a paste suction device for through-hole formation, which forms a thick film of paste on the inner wall of the through-hole by the flow of air generated in the base recess by the air flow, the base recess is connected to the negative pressure source via a negative pressure tank. Paste suction for forming through-holes, characterized in that first and second solenoid valves are interposed between the negative pressure tank and the base recess and between the negative pressure source, respectively. Device.
JP13784089A 1989-05-31 1989-05-31 Paste sucking device for forming through hole Pending JPH033392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13784089A JPH033392A (en) 1989-05-31 1989-05-31 Paste sucking device for forming through hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13784089A JPH033392A (en) 1989-05-31 1989-05-31 Paste sucking device for forming through hole

Publications (1)

Publication Number Publication Date
JPH033392A true JPH033392A (en) 1991-01-09

Family

ID=15208050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13784089A Pending JPH033392A (en) 1989-05-31 1989-05-31 Paste sucking device for forming through hole

Country Status (1)

Country Link
JP (1) JPH033392A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0711106A1 (en) * 1994-11-02 1996-05-08 Lpkf Cad/Cam Systeme Gmbh Process for making through-hole connections in multilayer printed circuit boards

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0711106A1 (en) * 1994-11-02 1996-05-08 Lpkf Cad/Cam Systeme Gmbh Process for making through-hole connections in multilayer printed circuit boards

Similar Documents

Publication Publication Date Title
US4808435A (en) Screen printing method for producing lines of uniform width and height
KR920004038B1 (en) Thick-film forming method
JPH033392A (en) Paste sucking device for forming through hole
JP3228140B2 (en) Mounting method of conductive ball
US5312574A (en) Method for sintering ceramic formed bodies
JP2001267367A (en) Semiconductor device, semiconductor packaging device, and manufacturing method thereof
JPH0239597A (en) Forming method for thick film circuit
US5114878A (en) Method of bonding bumps to leads of tab tape and an apparatus for arranging bumps used for the same
JPH0950248A (en) Suction table of display panel
JPH0513990A (en) Electronic part suction device
JPS59119791A (en) Method of forming conductor layer of through hole
JPH01321685A (en) Suction jig for substrate
JPS61285794A (en) Manufacture of printed wiring board
JPS62211992A (en) Method of forming through-hole contact of circuit board
JPS63117492A (en) Work stage structure of thick film hybrid printer
JPH043761A (en) Sheet-shaped member holding device
JPH01310596A (en) Stage for formation of through-hole of conductor drawing machine
JPH0775272B2 (en) Thick film circuit manufacturing method
JPS63129690A (en) Method of forming circuit wiring
EP0447170A2 (en) Method of bonding bumps to leads of tab tape and an apparatus for arranging bumps used for the same
JPS58122798A (en) Method of forming via hole
JPH01196897A (en) Ceramic multilayer interconnection substrate
KR100303398B1 (en) Tweezers in Wafer Carrier
JPS63188994A (en) Method of forming thick film through-hole
JPH047894A (en) Through hole formation method