JPH043761A - Sheet-shaped member holding device - Google Patents

Abstract

PURPOSE:To automate the conveyance of a sheet-shaped member by discharging the control air with the flow decreased toward the moving direction in sequence from holes when moving the sheet-shaped member from the first region to the second region on an XY table. CONSTITUTION:When a suction/discharge selector valve 8 is switched to the discharge side and a flow control valve 7 is controlled, the air with the flow decreased toward the moving direction of a sheet-shaped member 2 in sequence is discharged from suction holes 62, and the member 2 is floated from an XY table 6 while it is inclined to the moving direction. The air discharged from the suction holes 62 and sprayed to the member 2 flows in the opposite direction to the movement of the member 2 with expanded opening sections, and the member 2 is automatically moved toward the moving direction by its reaction. The shee-shaped member is automatically conveyed from the position where a tray is lowered to immediately below an expansion projecting means. When the selector valve 8 is switched to the suction side, the sheet-shaped member is sucked and held by the table 6 at immediately below the expansion projecting means. A checked sheet member can be automatically conveyed to the descent position of the tray likewise.

Description

[Detailed Description of the Invention] [Summary] Regarding a component holding device constituting a printed circuit board appearance inspection device, etc., the present invention aims to provide a sheet-like member holding device that can automate the transfer of sheet-like members, and has a sheet-shaped member on the upper surface. It has an XY child table with an open intake hole for vacuum suctioning the member, and when moving the sheet member from the first area to the second area on the XY table, the flow rate is increased in the moving direction of the sheet member. The structure is such that air is discharged from the intake hole in a manner that the amount of air is gradually decreased.

[Industrial application field]

The present invention relates to a member holding device constituting a printed circuit board appearance inspection device, etc., and more particularly to a sheet-like member holding device that can automate the transfer of sheet-like members.

With the high-density packaging of various electronic devices, the patterns on printed circuit boards have become finer, and if dirt, dirt, or scratches get on printed circuit boards during the manufacturing or inspection process, even if the size or amount is extremely small, This can lead to failures such as conductor breaks. Therefore, it is desired to establish an automated manufacturing process that does not involve direct contact with the substrate, from the formation of conductor patterns to transportation and inspection.

[Conventional technology]

FIG. 3 is a configuration diagram of a device for inspecting the appearance of sheet-like members;
FIG. 4 is a side sectional view showing the structure of a conventional sheet-like member holding device.

As shown in FIG. 3, an apparatus for inspecting the appearance of a sheet-like member such as a printed circuit board usually includes an enlarged projection means l such as a television camera or a projection microscope, and a sheet-like member holder that holds the sheet-like member 2 of the sample to be inspected by suction. The conventional sheet-like member holding device 3 for this purpose includes a plurality of air intake holes 4 for sucking the sheet-like member 2, as shown in FIG.
1 is open on the top surface and consists of an XY child table that moves in the X direction or the X direction electrically or manually, and a vacuum pump 5 connected to all the intake holes 41.

If the sheet-like member 2 is small, the sheet-like member 2 is automatically fed onto an XY child table located away from the enlargement projection means 1 using a transport device (not shown), and the sheet-like member 2 is placed directly under the enlargement projection means I. It is easy to move. However, this method requires an XY child table several times larger than the size of the sheet-like member, and is not practical for large sheet-like members such as printed circuit boards.

Therefore, prior to the inspection, the operator grasps the sheet-like member 2 by hand or with tweezers, places it on a predetermined position on the XY child table, and then operates the vacuum pump 5. When the vacuum pump 5 operates, the pressure inside the intake hole 41 whose opening is closed by the sheet-like member 2 is reduced, and the placed sheet-like member 2 is held by suction on the upper surface of the XY child table.

[Problem to be solved by the invention]

As mentioned above, in the conventional sheet-like member holding device, when transferring the sheet-like member from the XY child table, or when transferring the test flow sheet-like member from the XY child table to the tray, etc. When the user is gripping the member, dirt and grime from his or her hands or tweezers will adhere to the sheet-like member. Further, there is a problem in that the sheet-like member moves when the operator grasps it by hand or with tweezers, and it rubs against the top surface of the XY child table, causing scratches.

An object of the present invention is to provide a sheet-like member holding device that can automate the transportation of sheet-like members.

[Means to solve the problem]

FIG. 1 is a side sectional view showing the principle of the sheet-like member holding device according to the present invention. The same objects are represented by the same symbols throughout the figures.

The above-mentioned problem has an XY child table with an air intake hole 62 opening on the top surface for vacuum suctioning the sheet-like member 2, and moves the sheet-like member 2 from a first area to a second area on the XY child table. This is achieved by the sheet-like member holding device of the present invention, which is configured to discharge air from the intake hole 62 whose flow rate is gradually decreased in the direction of movement of the sheet-like member 2.

[For production]

In FIG. 1, an XY child table is provided with an intake hole opening on the top surface for vacuum suction of a sheet-like member, and when the sheet-like member is moved from a first area to a second area on the XY child table, the sheet-like member is The sheet-like member holding device of the present invention is configured to discharge air from an intake hole whose flow rate is controlled to become gradually smaller in the direction of movement of the member. In other words, it is possible to realize a sheet-like member holding device that can automatically move the sheet-like member.

〔Example〕

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 2 is a perspective view showing an embodiment of the member holding device according to the present invention.

In FIG. 2, the sheet-like member holding device of the present invention has an XY child table having a plurality of small chambers 61, and a plurality of air intake holes 62 are opened from each small chamber 61 to the upper surface of the XY child table. Further, each small chamber 61 is connected to a plurality of flow control valves 7, and the flow control valves 7 are connected to the vacuum pump 5 via an intake/exhaust switching valve 8. Note that the flow rate control valve 7 can be controlled by inputting an electric signal from the outside, and when the intake/exhaust switching valve 8 is switched to the discharge side, the flow rate control valve 7 is
By controlling , the flow rate of air discharged from the intake hole 62 can be arbitrarily controlled.

On the other hand, the tray 9 for transporting the sheet-like member 2 is composed of a plurality of support arms 91, and when the tray 9 is lowered, the support arm 91 sinks into the groove 63 provided in the XY child table, and the sheet-like member on the support arm 91 is The member 2 is placed on an XY child table. Here, by switching the intake/exhaust switching valve 8 to the discharge side and controlling the flow rate control valve 7, air whose flow rate gradually decreases in the direction of movement of the sheet-like member 2 is discharged from the intake hole 62, and The sheet-like member 2 floats up from the XY child table in a tilted state.

The air discharged from the intake hole 62 and blown onto the sheet-like member 2 flows in the opposite direction to the moving direction of the sheet-like member 2, which expands the opening, and the sheet-like member 2 automatically moves in the moving direction due to the reaction. Move.

That is, the sheet-like member is automatically transferred from the position where the tray is lowered to directly below the enlarged projection means. Therefore, by switching the intake/exhaust switching valve 8 to the intake side, the sheet-like member is suctioned and held on the XY child table directly below the enlarged projection means. Similarly, the inspected sheet-like member can also be automatically transferred to the lowered position of the tray.

Note that the embodiment of the present invention has a small chamber 61 that is long in the direction perpendicular to the moving direction of the sheet-like member 2, and the flow rate gradually decreases in the moving direction (the air is discharged from the intake hole 62). The movement of the sheet-like member 2 is controlled by dividing the small chamber 61 into sides perpendicular to the movement direction and connecting each to the flow control valve 7, and changing the amount of air blown to the center and both sides of the sheet-like member 2. It is also possible to stabilize the direction.

In this way, the XY child table has an air intake hole opened on the upper surface for vacuum suctioning the sheet-like member, and when moving the sheet-like member from the first area to the second area on the XY child table, the sheet-like member The sheet-like member holding device of the present invention is configured to discharge the air from the intake hole such that the flow rate becomes gradually smaller in the direction of movement of the
The Y child table and other sheet-like members float up and move automatically.

That is, it is possible to realize a sheet-like member holding device that can automate the transportation of sheet-like members.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to provide a sheet-like member holding device that can automate the transportation of sheet-like members.

8 is an intake/exhaust switching valve; 61 is Komuro, 63 is a groove; respectively.

9 is a tray 62 is an intake hole; 9I is the support arm,

[Brief explanation of drawings]

Fig. 1 is a side sectional view showing the principle of the sheet-like member holding device according to the present invention, Fig. 2 is a perspective view showing an embodiment of the member holding device according to the present invention, and Fig. 3 is an external appearance of the sheet-like member. Fig. 4 is a side sectional view showing the structure of a conventional sheet-like member holding device. In the figure, 2 is a sheet-like member, 5 is a vacuum pump, 6 is an xy child table, and 7 is a flow rate control valve.

Claims (1)

[Claims] An intake hole (6
2) has an XY table (6) with an opening;
When moving the sheet-like member (2) from the first area to the second area on the table (6), the sheet-like member (
2) A sheet-like member holding device characterized in that the air is discharged from the air intake hole (62), the flow rate of which is controlled to decrease sequentially in the direction of movement.