JPH0333220B2 - - Google Patents

Info

Publication number
JPH0333220B2
JPH0333220B2 JP58031406A JP3140683A JPH0333220B2 JP H0333220 B2 JPH0333220 B2 JP H0333220B2 JP 58031406 A JP58031406 A JP 58031406A JP 3140683 A JP3140683 A JP 3140683A JP H0333220 B2 JPH0333220 B2 JP H0333220B2
Authority
JP
Japan
Prior art keywords
light
inspected
axis
rotating mirror
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58031406A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59157545A (ja
Inventor
Toshinori Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP58031406A priority Critical patent/JPS59157545A/ja
Publication of JPS59157545A publication Critical patent/JPS59157545A/ja
Publication of JPH0333220B2 publication Critical patent/JPH0333220B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
JP58031406A 1983-02-25 1983-02-25 表面検査装置 Granted JPS59157545A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58031406A JPS59157545A (ja) 1983-02-25 1983-02-25 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58031406A JPS59157545A (ja) 1983-02-25 1983-02-25 表面検査装置

Publications (2)

Publication Number Publication Date
JPS59157545A JPS59157545A (ja) 1984-09-06
JPH0333220B2 true JPH0333220B2 (enrdf_load_stackoverflow) 1991-05-16

Family

ID=12330370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58031406A Granted JPS59157545A (ja) 1983-02-25 1983-02-25 表面検査装置

Country Status (1)

Country Link
JP (1) JPS59157545A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2721199B2 (ja) * 1988-10-06 1998-03-04 株式会社東芝 傷検知装置
JPH06129995A (ja) * 1992-10-16 1994-05-13 Nippon Steel Corp 光学式表面欠陥検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57182715A (en) * 1981-05-07 1982-11-10 Canon Inc Optical face scanning method

Also Published As

Publication number Publication date
JPS59157545A (ja) 1984-09-06

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