JPH0333203B2 - - Google Patents
Info
- Publication number
- JPH0333203B2 JPH0333203B2 JP58201506A JP20150683A JPH0333203B2 JP H0333203 B2 JPH0333203 B2 JP H0333203B2 JP 58201506 A JP58201506 A JP 58201506A JP 20150683 A JP20150683 A JP 20150683A JP H0333203 B2 JPH0333203 B2 JP H0333203B2
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- temperature
- crystal
- change
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20150683A JPS6093303A (ja) | 1983-10-27 | 1983-10-27 | 水晶式膜厚モニタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20150683A JPS6093303A (ja) | 1983-10-27 | 1983-10-27 | 水晶式膜厚モニタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6093303A JPS6093303A (ja) | 1985-05-25 |
| JPH0333203B2 true JPH0333203B2 (enrdf_load_stackoverflow) | 1991-05-16 |
Family
ID=16442176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20150683A Granted JPS6093303A (ja) | 1983-10-27 | 1983-10-27 | 水晶式膜厚モニタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6093303A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03218411A (ja) * | 1990-01-24 | 1991-09-26 | Nippon Dempa Kogyo Co Ltd | モニタ用水晶振動子及びこれを用いた膜厚制御装置 |
| JP2014070243A (ja) * | 2012-09-28 | 2014-04-21 | Hitachi High-Technologies Corp | 水晶発振式膜厚モニタ用センサヘッド |
| JP5916883B2 (ja) | 2012-11-13 | 2016-05-11 | 三菱重工業株式会社 | 真空蒸着装置 |
| CN103615964B (zh) * | 2013-11-25 | 2016-08-24 | 广东海洋大学 | 一种环境可控的薄液膜厚度自动测量装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS545878A (en) * | 1977-06-16 | 1979-01-17 | Toshiba Corp | Film thickness monitoring device |
-
1983
- 1983-10-27 JP JP20150683A patent/JPS6093303A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6093303A (ja) | 1985-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5869763A (en) | Method for measuring mass change using a quartz crystal microbalance | |
| US4949055A (en) | Crystal oscillator compensation circuit | |
| JPH0468903A (ja) | 温度検知機能を有する発振器および水晶発振素子並びに温度検出方法 | |
| JPH0333203B2 (enrdf_load_stackoverflow) | ||
| US20030029382A1 (en) | Thin film forming method and apparatus | |
| KR100189223B1 (ko) | 음차형 수정진동자를 사용한 압력의 측정방법 | |
| JPS6129652B2 (enrdf_load_stackoverflow) | ||
| US4505599A (en) | Electronic clinical thermometer | |
| CN110198155A (zh) | 一种数字式温度补偿晶体振荡器 | |
| JP2657565B2 (ja) | 薄膜形成装置用の膜厚制御装置 | |
| JPS6326853B2 (enrdf_load_stackoverflow) | ||
| CN116735023B (zh) | 一种基于晶体双模谐振频率的自校准温度计 | |
| JPS63281033A (ja) | 圧力検出装置 | |
| JP3393934B2 (ja) | 膜厚監視制御方法 | |
| JPS5895230A (ja) | 電子式温度測定方法及び装置 | |
| JPH0320465A (ja) | 温度補正機能付き膜厚モニタ | |
| Mirea et al. | Real time thin-film thickness monitoring sensors: a comparative study of dual mode Solidly Mounted Resonators with commercial Quartz Crystal Microbalances | |
| JPH04296635A (ja) | 振動式ガス密度計の密度センサの温度補正方法 | |
| JPH04236336A (ja) | 水晶温度センサ | |
| JP7102588B1 (ja) | センサ装置 | |
| RU2702702C1 (ru) | Способ определения чувствительности кварцевых микровесов | |
| JPS59141038A (ja) | 露点検出装置 | |
| GB2025721A (en) | Temperature stable frequency | |
| JPS63200028A (ja) | 圧電振動子を用いた重量測定法及び装置 | |
| JPH1123245A (ja) | 水晶振動子法蒸着膜厚測定装置 |