JPH0333203B2 - - Google Patents

Info

Publication number
JPH0333203B2
JPH0333203B2 JP58201506A JP20150683A JPH0333203B2 JP H0333203 B2 JPH0333203 B2 JP H0333203B2 JP 58201506 A JP58201506 A JP 58201506A JP 20150683 A JP20150683 A JP 20150683A JP H0333203 B2 JPH0333203 B2 JP H0333203B2
Authority
JP
Japan
Prior art keywords
film thickness
temperature
crystal
change
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58201506A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6093303A (ja
Inventor
Shinji Oosako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP20150683A priority Critical patent/JPS6093303A/ja
Publication of JPS6093303A publication Critical patent/JPS6093303A/ja
Publication of JPH0333203B2 publication Critical patent/JPH0333203B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
JP20150683A 1983-10-27 1983-10-27 水晶式膜厚モニタ Granted JPS6093303A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20150683A JPS6093303A (ja) 1983-10-27 1983-10-27 水晶式膜厚モニタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20150683A JPS6093303A (ja) 1983-10-27 1983-10-27 水晶式膜厚モニタ

Publications (2)

Publication Number Publication Date
JPS6093303A JPS6093303A (ja) 1985-05-25
JPH0333203B2 true JPH0333203B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-05-16

Family

ID=16442176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20150683A Granted JPS6093303A (ja) 1983-10-27 1983-10-27 水晶式膜厚モニタ

Country Status (1)

Country Link
JP (1) JPS6093303A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03218411A (ja) * 1990-01-24 1991-09-26 Nippon Dempa Kogyo Co Ltd モニタ用水晶振動子及びこれを用いた膜厚制御装置
JP2014070243A (ja) * 2012-09-28 2014-04-21 Hitachi High-Technologies Corp 水晶発振式膜厚モニタ用センサヘッド
JP5916883B2 (ja) 2012-11-13 2016-05-11 三菱重工業株式会社 真空蒸着装置
CN103615964B (zh) * 2013-11-25 2016-08-24 广东海洋大学 一种环境可控的薄液膜厚度自动测量装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS545878A (en) * 1977-06-16 1979-01-17 Toshiba Corp Film thickness monitoring device

Also Published As

Publication number Publication date
JPS6093303A (ja) 1985-05-25

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