JPH0333065Y2 - - Google Patents

Info

Publication number
JPH0333065Y2
JPH0333065Y2 JP7094688U JP7094688U JPH0333065Y2 JP H0333065 Y2 JPH0333065 Y2 JP H0333065Y2 JP 7094688 U JP7094688 U JP 7094688U JP 7094688 U JP7094688 U JP 7094688U JP H0333065 Y2 JPH0333065 Y2 JP H0333065Y2
Authority
JP
Japan
Prior art keywords
base
boat
pusher
carrier
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7094688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01173941U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7094688U priority Critical patent/JPH0333065Y2/ja
Publication of JPH01173941U publication Critical patent/JPH01173941U/ja
Application granted granted Critical
Publication of JPH0333065Y2 publication Critical patent/JPH0333065Y2/ja
Expired legal-status Critical Current

Links

JP7094688U 1988-05-27 1988-05-27 Expired JPH0333065Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7094688U JPH0333065Y2 (enEXAMPLES) 1988-05-27 1988-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7094688U JPH0333065Y2 (enEXAMPLES) 1988-05-27 1988-05-27

Publications (2)

Publication Number Publication Date
JPH01173941U JPH01173941U (enEXAMPLES) 1989-12-11
JPH0333065Y2 true JPH0333065Y2 (enEXAMPLES) 1991-07-12

Family

ID=31296159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7094688U Expired JPH0333065Y2 (enEXAMPLES) 1988-05-27 1988-05-27

Country Status (1)

Country Link
JP (1) JPH0333065Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8317450B2 (en) * 2008-10-30 2012-11-27 Lam Research Corporation Tactile wafer lifter and methods for operating the same

Also Published As

Publication number Publication date
JPH01173941U (enEXAMPLES) 1989-12-11

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