JPH0332737B2 - - Google Patents
Info
- Publication number
- JPH0332737B2 JPH0332737B2 JP56112578A JP11257881A JPH0332737B2 JP H0332737 B2 JPH0332737 B2 JP H0332737B2 JP 56112578 A JP56112578 A JP 56112578A JP 11257881 A JP11257881 A JP 11257881A JP H0332737 B2 JPH0332737 B2 JP H0332737B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- rays
- ray detector
- ray
- spectroscopic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 26
- 239000013078 crystal Substances 0.000 claims description 12
- 229920002799 BoPET Polymers 0.000 claims description 3
- 239000005041 Mylar™ Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000004846 x-ray emission Methods 0.000 claims 1
- 238000004458 analytical method Methods 0.000 description 7
- 230000003595 spectral effect Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56112578A JPS5814039A (ja) | 1981-07-17 | 1981-07-17 | 電子ビ−ムマクロアナライザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56112578A JPS5814039A (ja) | 1981-07-17 | 1981-07-17 | 電子ビ−ムマクロアナライザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5814039A JPS5814039A (ja) | 1983-01-26 |
| JPH0332737B2 true JPH0332737B2 (de) | 1991-05-14 |
Family
ID=14590222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56112578A Granted JPS5814039A (ja) | 1981-07-17 | 1981-07-17 | 電子ビ−ムマクロアナライザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5814039A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60135850A (ja) * | 1983-12-26 | 1985-07-19 | Shimadzu Corp | 状態マツプ方法及びその装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5610237A (en) * | 1979-07-04 | 1981-02-02 | Seiko Instr & Electronics Ltd | Track element analyzer |
-
1981
- 1981-07-17 JP JP56112578A patent/JPS5814039A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5610237A (en) * | 1979-07-04 | 1981-02-02 | Seiko Instr & Electronics Ltd | Track element analyzer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5814039A (ja) | 1983-01-26 |
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