JPH0332736B2 - - Google Patents

Info

Publication number
JPH0332736B2
JPH0332736B2 JP56110400A JP11040081A JPH0332736B2 JP H0332736 B2 JPH0332736 B2 JP H0332736B2 JP 56110400 A JP56110400 A JP 56110400A JP 11040081 A JP11040081 A JP 11040081A JP H0332736 B2 JPH0332736 B2 JP H0332736B2
Authority
JP
Japan
Prior art keywords
output
reference value
sample
detector
backscattered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56110400A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5811842A (ja
Inventor
Sanenori Oka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Nippon Steel Corp
Original Assignee
Seiko Epson Corp
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Nippon Steel Corp filed Critical Seiko Epson Corp
Priority to JP56110400A priority Critical patent/JPS5811842A/ja
Publication of JPS5811842A publication Critical patent/JPS5811842A/ja
Publication of JPH0332736B2 publication Critical patent/JPH0332736B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP56110400A 1981-07-14 1981-07-14 高速ｘ線マツピング装置 Granted JPS5811842A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56110400A JPS5811842A (ja) 1981-07-14 1981-07-14 高速ｘ線マツピング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56110400A JPS5811842A (ja) 1981-07-14 1981-07-14 高速ｘ線マツピング装置

Publications (2)

Publication Number Publication Date
JPS5811842A JPS5811842A (ja) 1983-01-22
JPH0332736B2 true JPH0332736B2 (ko) 1991-05-14

Family

ID=14534838

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56110400A Granted JPS5811842A (ja) 1981-07-14 1981-07-14 高速ｘ線マツピング装置

Country Status (1)

Country Link
JP (1) JPS5811842A (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2605005A1 (en) * 2011-12-14 2013-06-19 FEI Company Clustering of multi-modal data

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5192182A (ko) * 1975-02-10 1976-08-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5192182A (ko) * 1975-02-10 1976-08-12

Also Published As

Publication number Publication date
JPS5811842A (ja) 1983-01-22

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