JPH0332731B2 - - Google Patents

Info

Publication number
JPH0332731B2
JPH0332731B2 JP22837682A JP22837682A JPH0332731B2 JP H0332731 B2 JPH0332731 B2 JP H0332731B2 JP 22837682 A JP22837682 A JP 22837682A JP 22837682 A JP22837682 A JP 22837682A JP H0332731 B2 JPH0332731 B2 JP H0332731B2
Authority
JP
Japan
Prior art keywords
hole
printed board
light
rotating body
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22837682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59126235A (ja
Inventor
Moritoshi Ando
Kikuo Mita
Giichi Kakigi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP22837682A priority Critical patent/JPS59126235A/ja
Priority to US06/554,543 priority patent/US4560273A/en
Priority to DE8383307291T priority patent/DE3377527D1/de
Priority to EP83307291A priority patent/EP0111404B1/en
Publication of JPS59126235A publication Critical patent/JPS59126235A/ja
Publication of JPH0332731B2 publication Critical patent/JPH0332731B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95692—Patterns showing hole parts, e.g. honeycomb filtering structures

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP22837682A 1982-11-30 1982-12-27 プリント板のスル−ホ−ル検査装置 Granted JPS59126235A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP22837682A JPS59126235A (ja) 1982-12-27 1982-12-27 プリント板のスル−ホ−ル検査装置
US06/554,543 US4560273A (en) 1982-11-30 1983-11-23 Method and apparatus for inspecting plated through holes in printed circuit boards
DE8383307291T DE3377527D1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards
EP83307291A EP0111404B1 (en) 1982-11-30 1983-11-30 Method and apparatus for inspecting plated through holes in printed circuit boards

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22837682A JPS59126235A (ja) 1982-12-27 1982-12-27 プリント板のスル−ホ−ル検査装置

Publications (2)

Publication Number Publication Date
JPS59126235A JPS59126235A (ja) 1984-07-20
JPH0332731B2 true JPH0332731B2 (enrdf_load_stackoverflow) 1991-05-14

Family

ID=16875489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22837682A Granted JPS59126235A (ja) 1982-11-30 1982-12-27 プリント板のスル−ホ−ル検査装置

Country Status (1)

Country Link
JP (1) JPS59126235A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS59126235A (ja) 1984-07-20

Similar Documents

Publication Publication Date Title
JPH0310041B2 (enrdf_load_stackoverflow)
JPH0332731B2 (enrdf_load_stackoverflow)
JPH0447782B2 (enrdf_load_stackoverflow)
JP3322521B2 (ja) プリント基板のパターン検査方法及び装置及びプリント基板の製造方法
JPH01257249A (ja) プリント板のスルーホール検査装置
JPS6010156A (ja) スル−ホ−ル検査装置
JPS60256004A (ja) チツプ部品のはんだ付検査方法
JPH0340333B2 (enrdf_load_stackoverflow)
JPS6085596A (ja) スル−ホ−ル検査方法
JPS6221045A (ja) スル−ホ−ル検査装置
JPS6085308A (ja) スル−ホ−ル欠陥検査法
JPS6145955A (ja) スル−ホ−ル検査法
JPS6262253A (ja) スル−ホ−ル検査装置
JPH02122246A (ja) プリント配線基板のスルーホール検査装置
JPS6375544A (ja) スル−ホ−ル検査装置
JPS6085597A (ja) スル−ホ−ル検査装置
Ando et al. Automatic opitcal through hole inspection method for printed wiring boards using leakage light detection
JPH03186738A (ja) 回路基板の検査装置及びその検査方法
JPS6175241A (ja) スルホ−ル検査装置
JPH049251B2 (enrdf_load_stackoverflow)
JP2503201B2 (ja) スル−ホ−ル検査装置
JPH0531563Y2 (enrdf_load_stackoverflow)
JPS6010157A (ja) スル−ホ−ル検査装置
JPS59126234A (ja) プリント板のスル−ホ−ル検査装置
JPH04136747A (ja) 板体の外観検査装置