JPH0332178B2 - - Google Patents

Info

Publication number
JPH0332178B2
JPH0332178B2 JP60107662A JP10766285A JPH0332178B2 JP H0332178 B2 JPH0332178 B2 JP H0332178B2 JP 60107662 A JP60107662 A JP 60107662A JP 10766285 A JP10766285 A JP 10766285A JP H0332178 B2 JPH0332178 B2 JP H0332178B2
Authority
JP
Japan
Prior art keywords
bellows
drive
driving
fixed
atmospheric pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60107662A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61267245A (ja
Inventor
Yoshio Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60107662A priority Critical patent/JPS61267245A/ja
Publication of JPS61267245A publication Critical patent/JPS61267245A/ja
Publication of JPH0332178B2 publication Critical patent/JPH0332178B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Fluid-Damping Devices (AREA)
JP60107662A 1985-05-20 1985-05-20 真空中の移動台の駆動装置 Granted JPS61267245A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60107662A JPS61267245A (ja) 1985-05-20 1985-05-20 真空中の移動台の駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60107662A JPS61267245A (ja) 1985-05-20 1985-05-20 真空中の移動台の駆動装置

Publications (2)

Publication Number Publication Date
JPS61267245A JPS61267245A (ja) 1986-11-26
JPH0332178B2 true JPH0332178B2 (enrdf_load_stackoverflow) 1991-05-10

Family

ID=14464833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60107662A Granted JPS61267245A (ja) 1985-05-20 1985-05-20 真空中の移動台の駆動装置

Country Status (1)

Country Link
JP (1) JPS61267245A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4012024B2 (ja) 2002-09-10 2007-11-21 キヤノン株式会社 位置決め装置に於ける衝撃吸収装置
JP5467257B2 (ja) * 2008-05-19 2014-04-09 アキム株式会社 真空内溶接処理装置
US10643831B2 (en) 2015-11-20 2020-05-05 Shimadzu Corporation Vacuum processing apparatus and mass spectrometer
JP6693132B2 (ja) * 2016-01-12 2020-05-13 日本精工株式会社 テーブル装置、位置決め装置、フラットパネルディスプレイ製造装置、及び精密機械
CN112392892B (zh) * 2020-11-06 2021-12-10 中国科学院物理研究所 一种减振装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117573A (en) * 1976-03-30 1977-10-03 Toshiba Corp Electronic beam exposure unit
JPS58102522A (ja) * 1981-12-14 1983-06-18 Nippon Telegr & Teleph Corp <Ntt> 試料移動装置

Also Published As

Publication number Publication date
JPS61267245A (ja) 1986-11-26

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