JPH0331363B2 - - Google Patents

Info

Publication number
JPH0331363B2
JPH0331363B2 JP4441684A JP4441684A JPH0331363B2 JP H0331363 B2 JPH0331363 B2 JP H0331363B2 JP 4441684 A JP4441684 A JP 4441684A JP 4441684 A JP4441684 A JP 4441684A JP H0331363 B2 JPH0331363 B2 JP H0331363B2
Authority
JP
Japan
Prior art keywords
pattern
image
gap width
enlargement
enlarged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4441684A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60187805A (ja
Inventor
Koji Uchiumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4441684A priority Critical patent/JPS60187805A/ja
Publication of JPS60187805A publication Critical patent/JPS60187805A/ja
Publication of JPH0331363B2 publication Critical patent/JPH0331363B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4441684A 1984-03-08 1984-03-08 パタ−ン間隙幅の測定方式 Granted JPS60187805A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4441684A JPS60187805A (ja) 1984-03-08 1984-03-08 パタ−ン間隙幅の測定方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4441684A JPS60187805A (ja) 1984-03-08 1984-03-08 パタ−ン間隙幅の測定方式

Publications (2)

Publication Number Publication Date
JPS60187805A JPS60187805A (ja) 1985-09-25
JPH0331363B2 true JPH0331363B2 (cs) 1991-05-02

Family

ID=12690889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4441684A Granted JPS60187805A (ja) 1984-03-08 1984-03-08 パタ−ン間隙幅の測定方式

Country Status (1)

Country Link
JP (1) JPS60187805A (cs)

Also Published As

Publication number Publication date
JPS60187805A (ja) 1985-09-25

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