JPH0116362B2 - - Google Patents

Info

Publication number
JPH0116362B2
JPH0116362B2 JP2882183A JP2882183A JPH0116362B2 JP H0116362 B2 JPH0116362 B2 JP H0116362B2 JP 2882183 A JP2882183 A JP 2882183A JP 2882183 A JP2882183 A JP 2882183A JP H0116362 B2 JPH0116362 B2 JP H0116362B2
Authority
JP
Japan
Prior art keywords
pattern
image
bit
reduced
image memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2882183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59154307A (ja
Inventor
Koji Uchiumi
Hideo Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP58028821A priority Critical patent/JPS59154307A/ja
Publication of JPS59154307A publication Critical patent/JPS59154307A/ja
Publication of JPH0116362B2 publication Critical patent/JPH0116362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP58028821A 1983-02-23 1983-02-23 パタ−ン幅の測定方式 Granted JPS59154307A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58028821A JPS59154307A (ja) 1983-02-23 1983-02-23 パタ−ン幅の測定方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58028821A JPS59154307A (ja) 1983-02-23 1983-02-23 パタ−ン幅の測定方式

Publications (2)

Publication Number Publication Date
JPS59154307A JPS59154307A (ja) 1984-09-03
JPH0116362B2 true JPH0116362B2 (cs) 1989-03-24

Family

ID=12259060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58028821A Granted JPS59154307A (ja) 1983-02-23 1983-02-23 パタ−ン幅の測定方式

Country Status (1)

Country Link
JP (1) JPS59154307A (cs)

Also Published As

Publication number Publication date
JPS59154307A (ja) 1984-09-03

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