JPS59154307A - パタ−ン幅の測定方式 - Google Patents
パタ−ン幅の測定方式Info
- Publication number
- JPS59154307A JPS59154307A JP58028821A JP2882183A JPS59154307A JP S59154307 A JPS59154307 A JP S59154307A JP 58028821 A JP58028821 A JP 58028821A JP 2882183 A JP2882183 A JP 2882183A JP S59154307 A JPS59154307 A JP S59154307A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- image
- image memory
- bit
- pattern width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000015654 memory Effects 0.000 claims abstract description 28
- 238000012545 processing Methods 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims description 6
- 238000000691 measurement method Methods 0.000 claims description 4
- 239000000284 extract Substances 0.000 claims 1
- 238000003672 processing method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 3
- 238000011946 reduction process Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000012937 correction Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58028821A JPS59154307A (ja) | 1983-02-23 | 1983-02-23 | パタ−ン幅の測定方式 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58028821A JPS59154307A (ja) | 1983-02-23 | 1983-02-23 | パタ−ン幅の測定方式 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59154307A true JPS59154307A (ja) | 1984-09-03 |
| JPH0116362B2 JPH0116362B2 (cs) | 1989-03-24 |
Family
ID=12259060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58028821A Granted JPS59154307A (ja) | 1983-02-23 | 1983-02-23 | パタ−ン幅の測定方式 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59154307A (cs) |
-
1983
- 1983-02-23 JP JP58028821A patent/JPS59154307A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0116362B2 (cs) | 1989-03-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4776022A (en) | System for printed circuit board defect detection | |
| US4392120A (en) | Pattern inspection system | |
| CN101600957A (zh) | 缺陷检测装置及缺陷检测方法 | |
| US7113629B2 (en) | Pattern inspecting apparatus and method | |
| US4496971A (en) | Detection apparatus | |
| JPS59154307A (ja) | パタ−ン幅の測定方式 | |
| GB2102122A (en) | Detecting defects in a pattern | |
| JPS60187805A (ja) | パタ−ン間隙幅の測定方式 | |
| JPH0894537A (ja) | 回路パターン検査装置 | |
| JPH0374855A (ja) | チップサイズ検出方法およびチップピッチ検出方法およびチップ配列データ自動作成方法ならびにそれを用いた半導体基板の検査方法および装置 | |
| JP3122178B2 (ja) | パターン検査装置 | |
| JP3198105B2 (ja) | 自動外観検査装置 | |
| JPH0332723B2 (cs) | ||
| JPS6055474A (ja) | 画像間差異検出装置 | |
| JPH0245706A (ja) | 形状検査装置 | |
| JPH0679862A (ja) | 印刷紙面品質検査方法及び装置 | |
| JPH06137832A (ja) | 外観検査装置 | |
| JPS60147883A (ja) | 図形の境界検出方法 | |
| JP2000294139A (ja) | 周期性パターンの欠陥検査方法及び装置 | |
| JPH05133907A (ja) | プリント基板検査装置 | |
| JPS60123709A (ja) | パタ−ン検査装置 | |
| JPS61119034A (ja) | レチクル欠陥検査方法 | |
| JPH0815173A (ja) | 文字記号検査装置 | |
| JPH032648A (ja) | 印刷配線板のランド検査装置 | |
| JPH03229373A (ja) | ２次元パターンの学習装置 |