JPS60187805A - パタ−ン間隙幅の測定方式 - Google Patents

パタ−ン間隙幅の測定方式

Info

Publication number
JPS60187805A
JPS60187805A JP4441684A JP4441684A JPS60187805A JP S60187805 A JPS60187805 A JP S60187805A JP 4441684 A JP4441684 A JP 4441684A JP 4441684 A JP4441684 A JP 4441684A JP S60187805 A JPS60187805 A JP S60187805A
Authority
JP
Japan
Prior art keywords
image
pattern
enlarged
bits
gap width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4441684A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331363B2 (cs
Inventor
Koji Uchiumi
内海　康志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4441684A priority Critical patent/JPS60187805A/ja
Publication of JPS60187805A publication Critical patent/JPS60187805A/ja
Publication of JPH0331363B2 publication Critical patent/JPH0331363B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4441684A 1984-03-08 1984-03-08 パタ−ン間隙幅の測定方式 Granted JPS60187805A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4441684A JPS60187805A (ja) 1984-03-08 1984-03-08 パタ−ン間隙幅の測定方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4441684A JPS60187805A (ja) 1984-03-08 1984-03-08 パタ−ン間隙幅の測定方式

Publications (2)

Publication Number Publication Date
JPS60187805A true JPS60187805A (ja) 1985-09-25
JPH0331363B2 JPH0331363B2 (cs) 1991-05-02

Family

ID=12690889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4441684A Granted JPS60187805A (ja) 1984-03-08 1984-03-08 パタ−ン間隙幅の測定方式

Country Status (1)

Country Link
JP (1) JPS60187805A (cs)

Also Published As

Publication number Publication date
JPH0331363B2 (cs) 1991-05-02

Similar Documents

Publication Publication Date Title
US6865288B1 (en) Pattern inspection method and apparatus
JPH0691003B2 (ja) レチクル／マスクの検査方法とその検査装置
US4392120A (en) Pattern inspection system
JPS61292542A (ja) プリント回路板検査のための粗大傷検出器
JPS5951135B2 (ja) 物体検査装置
US11959862B2 (en) Damage figure creation supporting apparatus, damage figure creation supporting method, damage figure creation supporting program, and damage figure creation supporting system
EP0926554B1 (en) Pattern defect detection apparatus and method
US4496971A (en) Detection apparatus
JPS60187805A (ja) パタ−ン間隙幅の測定方式
GB2102122A (en) Detecting defects in a pattern
Axelrod Intensity spatial filtering applied to defect detection in integrated circuit photomasks
JPS59154307A (ja) パタ−ン幅の測定方式
JPS6239811B2 (cs)
JPH0374855A (ja) チップサイズ検出方法およびチップピッチ検出方法およびチップ配列データ自動作成方法ならびにそれを用いた半導体基板の検査方法および装置
JPH07200830A (ja) 欠陥検査装置
JPS6055474A (ja) 画像間差異検出装置
JPH03229373A (ja) ２次元パターンの学習装置
JPS63124939A (ja) パターン検査方法およびその装置
JPH0332723B2 (cs)
JPH06331327A (ja) クリーム半田印刷状態の検査方法
JPS63115035A (ja) パタ−ンデ−タ検査装置
JPH01296142A (ja) ２次元画像比較検査装置
JPH05133907A (ja) プリント基板検査装置
JPH1194761A (ja) パターン検査装置
JPH095030A (ja) エッジ位置検出装置及びエッジ位置検出方法と線位置測定方法