JPH0330329Y2 - - Google Patents

Info

Publication number
JPH0330329Y2
JPH0330329Y2 JP1985197140U JP19714085U JPH0330329Y2 JP H0330329 Y2 JPH0330329 Y2 JP H0330329Y2 JP 1985197140 U JP1985197140 U JP 1985197140U JP 19714085 U JP19714085 U JP 19714085U JP H0330329 Y2 JPH0330329 Y2 JP H0330329Y2
Authority
JP
Japan
Prior art keywords
pinion
rack
movable rack
extrusion rod
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985197140U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62103519U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985197140U priority Critical patent/JPH0330329Y2/ja
Publication of JPS62103519U publication Critical patent/JPS62103519U/ja
Application granted granted Critical
Publication of JPH0330329Y2 publication Critical patent/JPH0330329Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1985197140U 1985-12-20 1985-12-20 Expired JPH0330329Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985197140U JPH0330329Y2 (fr) 1985-12-20 1985-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985197140U JPH0330329Y2 (fr) 1985-12-20 1985-12-20

Publications (2)

Publication Number Publication Date
JPS62103519U JPS62103519U (fr) 1987-07-01
JPH0330329Y2 true JPH0330329Y2 (fr) 1991-06-27

Family

ID=31156591

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985197140U Expired JPH0330329Y2 (fr) 1985-12-20 1985-12-20

Country Status (1)

Country Link
JP (1) JPH0330329Y2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0713220Y2 (ja) * 1988-09-07 1995-03-29 大日本スクリーン製造株式会社 基板搬送装置における基板保持装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831307A (ja) * 1981-08-20 1983-02-24 Tokyo Optical Co Ltd 干渉フイルタ−

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5831307A (ja) * 1981-08-20 1983-02-24 Tokyo Optical Co Ltd 干渉フイルタ−

Also Published As

Publication number Publication date
JPS62103519U (fr) 1987-07-01

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