JPH0329473B2 - - Google Patents

Info

Publication number
JPH0329473B2
JPH0329473B2 JP60080497A JP8049785A JPH0329473B2 JP H0329473 B2 JPH0329473 B2 JP H0329473B2 JP 60080497 A JP60080497 A JP 60080497A JP 8049785 A JP8049785 A JP 8049785A JP H0329473 B2 JPH0329473 B2 JP H0329473B2
Authority
JP
Japan
Prior art keywords
workpiece
temperature
automatic production
liquid
robot mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60080497A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61238383A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8049785A priority Critical patent/JPS61238383A/ja
Publication of JPS61238383A publication Critical patent/JPS61238383A/ja
Publication of JPH0329473B2 publication Critical patent/JPH0329473B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP8049785A 1985-04-16 1985-04-16 恒温洗浄装置 Granted JPS61238383A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8049785A JPS61238383A (ja) 1985-04-16 1985-04-16 恒温洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8049785A JPS61238383A (ja) 1985-04-16 1985-04-16 恒温洗浄装置

Publications (2)

Publication Number Publication Date
JPS61238383A JPS61238383A (ja) 1986-10-23
JPH0329473B2 true JPH0329473B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-04-24

Family

ID=13719941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8049785A Granted JPS61238383A (ja) 1985-04-16 1985-04-16 恒温洗浄装置

Country Status (1)

Country Link
JP (1) JPS61238383A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000012232A1 (fr) * 1998-08-28 2000-03-09 Mitutoyo Corporation Laveuse automatique de pieces pour intervention prealable dans un systeme de mesure et de production automatique equipe de ladite laveuse

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0461975A (ja) * 1990-06-26 1992-02-27 Makino Milling Mach Co Ltd ワーク洗浄装置
JP5843233B2 (ja) * 2011-11-10 2016-01-13 東芝機械株式会社 静圧空気軸受スピンドル装置およびこれを用いた工作機械

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5544780A (en) * 1978-09-27 1980-03-29 Toshiba Corp Cleaning device for semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000012232A1 (fr) * 1998-08-28 2000-03-09 Mitutoyo Corporation Laveuse automatique de pieces pour intervention prealable dans un systeme de mesure et de production automatique equipe de ladite laveuse

Also Published As

Publication number Publication date
JPS61238383A (ja) 1986-10-23

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