JPH0329321Y2 - - Google Patents

Info

Publication number
JPH0329321Y2
JPH0329321Y2 JP1985146078U JP14607885U JPH0329321Y2 JP H0329321 Y2 JPH0329321 Y2 JP H0329321Y2 JP 1985146078 U JP1985146078 U JP 1985146078U JP 14607885 U JP14607885 U JP 14607885U JP H0329321 Y2 JPH0329321 Y2 JP H0329321Y2
Authority
JP
Japan
Prior art keywords
locking
locking piece
planetary body
groove
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985146078U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255558U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985146078U priority Critical patent/JPH0329321Y2/ja
Publication of JPS6255558U publication Critical patent/JPS6255558U/ja
Application granted granted Critical
Publication of JPH0329321Y2 publication Critical patent/JPH0329321Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985146078U 1985-09-24 1985-09-24 Expired JPH0329321Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985146078U JPH0329321Y2 (cs) 1985-09-24 1985-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985146078U JPH0329321Y2 (cs) 1985-09-24 1985-09-24

Publications (2)

Publication Number Publication Date
JPS6255558U JPS6255558U (cs) 1987-04-06
JPH0329321Y2 true JPH0329321Y2 (cs) 1991-06-21

Family

ID=31058210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985146078U Expired JPH0329321Y2 (cs) 1985-09-24 1985-09-24

Country Status (1)

Country Link
JP (1) JPH0329321Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0519329Y2 (cs) * 1987-11-26 1993-05-21

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118945U (cs) * 1978-02-10 1979-08-20
JPS6059991B2 (ja) * 1981-02-27 1985-12-27 株式会社日立製作所 真空蒸着装置用自公転治具

Also Published As

Publication number Publication date
JPS6255558U (cs) 1987-04-06

Similar Documents

Publication Publication Date Title
JP3547470B2 (ja) 基板キャリア
JPS6064436A (ja) スピンドライヤ
JPH0329321Y2 (cs)
JPH02178947A (ja) 半導体ウェーハのノッチ合わせ機構
US4344383A (en) Retainer ring for securing substrates in a vacuum deposition system
JPH0248424Y2 (cs)
JPH10150095A (ja) ウエーハ処理装置
JPH0248425Y2 (cs)
JPS6254089A (ja) ウエハ自公転機構
JPS60259372A (ja) 両面ポリツシング方法
JPS6356310B2 (cs)
JPH03785B2 (cs)
JPH0526755Y2 (cs)
JPH02908Y2 (cs)
JPS6059991B2 (ja) 真空蒸着装置用自公転治具
JPH069867U (ja) バランス取り用溝を備えたハブブレード
JPS6245378A (ja) 塗布装置
JPH03148154A (ja) ウエハ位置決め装置
JPS6024464Y2 (ja) 拡散不純物源塗布装置
JPS61177369A (ja) コ−テイング形成用ジンバル機構
JPS60145617A (ja) 塗布装置
JPH0638111Y2 (ja) 成膜装置の試料台保持機構
JPS592743B2 (ja) 蒸着装置
JPH03201429A (ja) 縦型ｃｖｄ装置用ウエハホルダー
JPH01312835A (ja) プラズマｃｖｄ装置