JPH0326301B2 - - Google Patents

Info

Publication number
JPH0326301B2
JPH0326301B2 JP61128351A JP12835186A JPH0326301B2 JP H0326301 B2 JPH0326301 B2 JP H0326301B2 JP 61128351 A JP61128351 A JP 61128351A JP 12835186 A JP12835186 A JP 12835186A JP H0326301 B2 JPH0326301 B2 JP H0326301B2
Authority
JP
Japan
Prior art keywords
valve
arm
valve body
electrostrictive element
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61128351A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62283274A (ja
Inventor
Takahide Kawamura
Tomohiko Katagiri
Keiichi Iizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
Original Assignee
Koganei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Priority to JP61128351A priority Critical patent/JPS62283274A/ja
Publication of JPS62283274A publication Critical patent/JPS62283274A/ja
Publication of JPH0326301B2 publication Critical patent/JPH0326301B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP61128351A 1986-06-02 1986-06-02 電歪素子を用いた弁 Granted JPS62283274A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61128351A JPS62283274A (ja) 1986-06-02 1986-06-02 電歪素子を用いた弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61128351A JPS62283274A (ja) 1986-06-02 1986-06-02 電歪素子を用いた弁

Publications (2)

Publication Number Publication Date
JPS62283274A JPS62283274A (ja) 1987-12-09
JPH0326301B2 true JPH0326301B2 (enrdf_load_stackoverflow) 1991-04-10

Family

ID=14982666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61128351A Granted JPS62283274A (ja) 1986-06-02 1986-06-02 電歪素子を用いた弁

Country Status (1)

Country Link
JP (1) JPS62283274A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639578U (enrdf_load_stackoverflow) * 1986-07-08 1988-01-22
JP2587982B2 (ja) * 1988-03-01 1997-03-05 日立金属株式会社 圧電駆動弁
JPH02173483A (ja) * 1988-12-23 1990-07-04 Komatsu Ltd 高速流量制御弁
JP2664556B2 (ja) * 1991-06-14 1997-10-15 シーケーディ株式会社 切換弁
DE19855221A1 (de) * 1998-11-30 2000-05-31 Marco Systemanalyse Entw Piezoaktuatorisches Kippelement
DE19857922A1 (de) * 1998-12-15 2000-07-06 Siemens Ag Aktor zum Auslenken eines Stellglieds und Kraftstoffeinspritzventil mit einem solchen Aktor
JP5764049B2 (ja) * 2011-12-13 2015-08-12 株式会社サタケ 圧電式バルブ及び該圧電式バルブを利用した噴風手段を備える光学式粒状物選別機

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629075A (ja) * 1985-07-03 1987-01-17 Ckd Corp 圧電式制御弁

Also Published As

Publication number Publication date
JPS62283274A (ja) 1987-12-09

Similar Documents

Publication Publication Date Title
US5178190A (en) Microvalve
US6142444A (en) Piezoelectrically actuated microvalve
CN100466317C (zh) 响应于电气激活移动具有一对相对表面的向后折叠臂的装置
US6581638B2 (en) Piezo valve
US5271431A (en) Microvalve
US4995587A (en) Motion amplifier employing a dual piston arrangement
US7011288B1 (en) Microelectromechanical device with perpendicular motion
JPH0610629A (ja) 電気制御液圧作動バルブアクチュエータ
JP4758098B2 (ja) 単体圧電モータ
JPH04506105A (ja) マイクロ弁
JPH0326301B2 (enrdf_load_stackoverflow)
US5460202A (en) Three-way piezoelectric valve
JPH02163580A (ja) 圧電素子を用いた流体制御バルブ
JPH03234981A (ja) 積層形圧電素子を用いた弁
GB2388251A (en) Piezoelectric activated relay
WO2014101057A1 (zh) 微阀器件与阀体组件
US6717332B2 (en) Apparatus having a support structure and actuator
JP2757997B2 (ja) 四方切換弁装置
JPH0313457B2 (enrdf_load_stackoverflow)
JPH0336768Y2 (enrdf_load_stackoverflow)
Zhou et al. Linear piezo-actuator and its applications
JPH0220874B2 (enrdf_load_stackoverflow)
JP2740596B2 (ja) 開閉弁
JPS62228664A (ja) 燃料噴射弁
JPH0744858B2 (ja) 圧電素子を用いたアクチュエ−タ