WO2014101057A1 - 微阀器件与阀体组件 - Google Patents

微阀器件与阀体组件 Download PDF

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Publication number
WO2014101057A1
WO2014101057A1 PCT/CN2012/087709 CN2012087709W WO2014101057A1 WO 2014101057 A1 WO2014101057 A1 WO 2014101057A1 CN 2012087709 W CN2012087709 W CN 2012087709W WO 2014101057 A1 WO2014101057 A1 WO 2014101057A1
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WO
WIPO (PCT)
Prior art keywords
port
control
microvalve device
movable member
control port
Prior art date
Application number
PCT/CN2012/087709
Other languages
English (en)
French (fr)
Inventor
张胜昌
Original Assignee
浙江盾安人工环境股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 浙江盾安人工环境股份有限公司 filed Critical 浙江盾安人工环境股份有限公司
Priority to US14/748,981 priority Critical patent/US9897233B2/en
Priority to PCT/CN2012/087709 priority patent/WO2014101057A1/zh
Priority to JP2015549921A priority patent/JP6046268B2/ja
Priority to CN201280077963.0A priority patent/CN104884851B/zh
Publication of WO2014101057A1 publication Critical patent/WO2014101057A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0028—Valves having multiple inlets or outlets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid

Definitions

  • the present disclosure relates to microelectromechanical systems (MEMS) and, more particularly, to a micro-valve device and valve body assembly based on MEMS technology.
  • MEMS microelectromechanical systems
  • Microvalve devices are key components in microfluidic control and have important applications in the fields of biology, medical, and refrigeration.
  • Micro-valve devices based on microelectromechanical systems (MEMS) technology have the advantages of precise control, low cost, mass production, stability and reliability.
  • the microvalve device can be used as a pilot valve for controlling the main valve to achieve precise control of the opening of the main valve to achieve the purpose of controlling fluid flow.
  • a microvalve device that can be used as a pilot valve, characterized in that only one fluid port is connected to the main valve, is disclosed in Chinese Patent No. 200580011090.3, No. 200780046457.4, U.S. Patent No. 6,523,560, No. 7011378, No. 6,614,420, and the like. .
  • a standard reference pressure must be provided during the fluid control, and the on/off or flow of the main fluid is controlled according to the relationship between the control port output pressure of the pilot valve and the standard reference pressure.
  • the standard reference pressure is used as an absolute pressure value and is usually provided externally by the microvalve device.
  • a spring or the like is often used in actual products to generate a standard reference pressure.
  • such a mechanism may cause aging, malfunction, etc., causing the standard reference pressure to shift or even fail. Summary of the invention
  • One of the objects of embodiments of the present disclosure is to provide an active microvalve device based on MEMS technology that can simultaneously output at least two fluids having different pressures or flows.
  • the microvalve device can be used to control a pilot valve of a main valve, and at least two fluids outputted by the pilot valve have a relative pressure difference, so that the flow rate of the fluid passing through the main valve flow passage is accurately controlled, and the flow rate is controlled. purpose.
  • a microvalve device comprising: a body defining a chamber having a source port in communication with the chamber and at least two control ports; at least two movable members, The at least two movable members pass the switching between the first position and the second position Independently controlling conduction or blocking between each of the at least two control ports and the source port, wherein each movable member is in the first position, a corresponding control port
  • the source port is fluidly connectable via at least a portion of the chamber; and when each movable member is in the second position, a fluid passage between the corresponding control port and the source port is blocked by the moving member .
  • the at least two control ports can output fluids having different flows and pressures by independently controlling the movement of each of the at least two moveable members.
  • the body comprises a substrate layer, an intermediate layer and a cover layer stacked in sequence, wherein the intermediate layer is a frame structure to define the chamber with the substrate layer and the cover layer .
  • the body further includes at least one return port, and when each of the two movable members is in the second position, a corresponding control port passes through at least a portion of the chamber The at least one return port is in fluid communication.
  • the source port and the control port are both located in the substrate layer. In one embodiment, the return port is located in the substrate layer.
  • the thickness of the movable member in a direction perpendicular to a surface of the substrate layer or the cover layer is substantially the same as a thickness of the intermediate layer.
  • the microvalve device further includes an actuator that independently controls each of the at least two movable members such that each of the at least two movable members is in the first position or Said second position.
  • one end of the actuator is fixed to the intermediate layer, and the other end is connected to the movable member to drive the movable member on a surface parallel to the substrate layer or the cover layer The direction of sliding in the chamber.
  • the actuator is a piezoelectric actuator comprising a plurality of film layer electrodes stacked in a direction parallel to a surface of the substrate layer or cover layer.
  • the movable member includes a first portion disposed between the control port and the return port for conducting or blocking fluid between the control port and the return port Communicating; a second portion proximate the source port for conducting and blocking fluid communication between the control port and the source port; and connecting both ends of the first portion and the second portion A portion is formed in the form of a frame, and wherein the movable member in the form of a frame cooperates with the substrate layer and the cover layer to define a sub-chamber within the chamber.
  • the corresponding control port and the source port are located in a corresponding area of the sub-chamber, such that the control port and the source A port is in fluid communication through the subchamber.
  • the control port and the return port are in fluid communication with a gap between the first portion of the movable member and the communication recess.
  • one of the source ports is configured for each control port to form a source port/control port pair, wherein when each movable member is in the first position, the corresponding source port/control port is centered The source port and the control port are turned on; when each movable member is in the second position, the corresponding source port/control port pair is blocked between the source port and the control port.
  • a buffer recess is provided on an inner surface of the cover layer in a region corresponding to the source port.
  • At least one of the cover layer and the substrate layer is intimately or integrally formed with the intermediate layer.
  • the intermediate layer is formed of a silicon material and the cap layer and the substrate layer are formed of a silicon material or borosilicate glass.
  • the body has two control ports.
  • valve body assembly comprising: a micro valve device according to any of the above embodiments; and a main valve including a main valve body and a valve core, the main valve body having a first direction through a main flow passage of the main valve main body and a slide rail extending in a direction crossing the first direction, wherein the valve core has a through hole penetrating the valve core in a direction parallel to the first direction, and the valve core is placed in the valve core In a slide of the main body, wherein a control port of the microvalve device is in communication with a first end of the slide, and another control port of the microvalve device and a second of the slide relative to the first end The ends are in communication to thereby drive the spool to move in the slide.
  • the main channel is opened when the spool is driven such that the through hole is aligned with the main flow; when the spool is driven such that the through hole is When the main stream is staggered, the main channel is cut.
  • FIG. 1 is a schematic view showing a relationship between a movable member and a source port, a control port in a microvalve device according to an embodiment of the present disclosure
  • FIG. 2 is a schematic view showing a relationship between a movable member and a source port, a control port, and a return port in a microvalve device according to an embodiment of the present disclosure
  • FIG. 3 is a schematic structural view of a micro valve device according to an embodiment of the present disclosure.
  • FIG. 4 is a plan view of a movable member in a microvalve device according to an embodiment of the present disclosure
  • FIG. 5 is a schematic view illustrating a principle of operation of a microvalve device according to an embodiment of the present disclosure
  • FIG. 6 is a view illustrating an embodiment of a microvalve device according to an embodiment of the present disclosure. Schematic diagram of the valve body assembly. detailed description
  • Embodiments of the present disclosure provide a microvalve device that includes a body.
  • a body is defined within the body, and the body includes a source port and at least two control ports.
  • the source port and the control port can be in communication with the chamber.
  • the microvalve device further includes at least two movable members, and the at least two movable members respectively control an on or blocking state between each of the at least two control ports and the source port.
  • Each movable member can be located in two positions, namely, a first position and a second position.
  • FIG. 1 shows a diagram of the relationship between the movable member, the source port and the control port in the microvalve device 1.
  • the conduction and blocking states between each control port and the source port are independently controlled by the corresponding movable members.
  • the body of the microvalve device is formed from a substrate layer, an intermediate layer, and a cap layer that are sequentially stacked.
  • the intermediate layer is of a frame structure such that it can cooperate with the substrate layer and the cover layer to define the chamber within the body of the microvalve device.
  • the intermediate layer may be in close fitting with the substrate layer and/or the cover layer or formed integrally therewith.
  • the control port and the source port can be disposed in the substrate layer to enable fluid communication with the chamber.
  • the microvalve device further includes an actuator, each movable member being independently driven by the actuator. Therefore, in the micro valve device according to an embodiment of the present disclosure, the conduction and blocking states between each of the at least two control ports and the source port may be independently controlled, thereby, at least two Fluids with the same or different flow or pressure can be output between the control ports.
  • the actuator for driving the movable member in the micro valve device according to the embodiment of the present disclosure is not particularly limited, and for example, the actuator may employ a piezoelectric actuator, a heat actuator, an electrostatic actuator, an electromagnetic actuator, or any other suitable type. Actuator.
  • the actuator can drive each movable member to switch between the first position and the second position at a certain frequency.
  • each actuator applies a different frequency, the conduction and blocking states between each control port and the source port are switched at different frequencies, so that the fluid flow and pressure output from the different control ports can be precisely controlled.
  • one source port is configured for each control port. That is, the source port and the control port - corresponding settings - form at least two source port / control port pairs.
  • the movable member can independently control the conduction and blocking states between the source port and the control port of each source port/control port pair, thereby controlling the fluid flow and pressure outputted by each control port.
  • the plurality of control ports can also share one or more source ports.
  • the source port of the microvalve device can be connected to a fluid source, and the control port of the microvalve device can be connected to an object or control object (eg, a main valve) that requires fluid input.
  • an object or control object eg, a main valve
  • the movable member is controlled such that the source port and the control port are in fluid communication, the fluid input by the source port can be output by the control port.
  • FIG. 2 shows a schematic diagram of still another example in accordance with an embodiment of the present disclosure.
  • the microvalve device 2 may further include a return port, which may be associated with a fluid Source connectivity.
  • the movable member not only controls the conduction and blocking states between the source port and the control port, but also controls the conduction and blocking states between the control port and the return port.
  • the source port and the control port are electrically connected, and the control port is blocked between the return port, so that the fluid enters the chamber from the source port and is input from the control port;
  • the source port and the control port are blocked, and the control port and the return port are electrically connected, so that the fluid flows back to the fluid source through the control port and the return port.
  • Figures 1 and 2 are only diagrams showing the relationship between some of the components of the microvalve devices 1 and 2, not the structural diagram of the microvalve device. Different fluid ports, movable components, and actuators are available to independently control the microvalve device. Some exemplary structures in accordance with embodiments of the present disclosure will be described in the following embodiments.
  • the movable member has no particular limitation on the manner of controlling the conduction and blocking between the control port and the source port or the manner of controlling the conduction and blocking between the control port and the return port.
  • the movable member can achieve the above control by switching between two states covering and not covering the fluid port, or can also block the fluid between the ports by providing a way to block the chamber between the ports.
  • the movable member can be moved in a manner perpendicular to the surface of the microvalve device body (the surface of the substrate layer or the cover layer) (longitudinal motion mode).
  • longitudinal motion mode when the control port is blocked, the port is covered by the movable member (or the actuator itself); when the control port is connected to the source port, the movable member is in a direction perpendicular to the surface of the microvalve device body Leave a certain distance from the port to leave a gap for fluid flow.
  • the actuator in the longitudinal motion mode, different film electrodes of the piezoelectric actuator are stacked in a direction perpendicular to the surface of the microvalve device body, and therefore, when performing on the piezoelectric When the electrode layer of the device applies an electrical signal, the piezoelectric actuator can move in the longitudinal direction.
  • the present invention also proposes a structure suitable for a motion mode parallel to the surface of the microvalve device body, the motion mode or structure can achieve better technical effects than the above-described longitudinal motion mode, and the structure and related technical effects thereof A detailed description will be made in the following examples.
  • FIG. 3 illustrates a structure of a microvalve device according to an embodiment of the present disclosure, wherein (a) is a schematic cross-sectional view; and (b) is a schematic plan view.
  • this embodiment is according to the present disclosure.
  • the features described in the above Embodiment 1 can also be applied to the present embodiment or can be appropriately combined with the present embodiment.
  • the same contents as those in the above-described Embodiment 1 will be appropriately simplified or omitted in the present embodiment.
  • the microvalve device includes a cap layer 101, an intermediate layer 102, and a substrate layer 103.
  • the intermediate layer 102 can be of a frame-like configuration whereby a chamber 303 is defined within the body of the microvalve device.
  • the inner surface of the cover layer 101 (the surface facing the chamber 303) includes a plurality of recesses 201, 202 and 203 (the function of each recess will be described later).
  • two movable members 302 are included within the chamber of the body of the microvalve device.
  • the movable member 302 can slide in a plane parallel to the cover layer 101 or the substrate layer 103 within the chamber.
  • the substrate layer 103 includes a first source port 401, a second source port 405, a first control port 402, a second control port 404, and a common return port 403.
  • the first source port 401 and the first control port 402 form a first source port/control port pair
  • the second source port 405 and the second control port 404 form a second source port/control port pair.
  • the source port can be in communication with a fluid source
  • the control port can be in communication with a control object (e.g., a main valve, etc.) to apply the desired fluid pressure to the control object, and the like.
  • a control object e.g., a main valve, etc.
  • the applied fluid can flow back to the fluid source through the control port and through the return port. Therefore, the return port can also be in communication with the fluid source.
  • the movable member 302 in this embodiment can be moved (e.g., between the first position and the second position) to independently control each source port/control port pair.
  • the source port and the control port in the corresponding source port/control port pair can be in fluid communication via at least a portion of the chamber 303, such that fluid applied by the fluid source can be output through the control port
  • the movable member is in the second position, the fluid passage between the source port and the control port in the corresponding source port/control port pair is blocked by the moving member 302, thereby stopping the fluid output from the control port, and the control port is now controlled.
  • the flow to the return port can be turned on so that fluid previously output through the control port can then flow back to the fluid source via the control port and the return port.
  • each movable member 302 For each movable member 302, it can be driven by a separate actuator (not shown) to enable independent control of conduction and blocking between each control port and the source port.
  • both ends of the actuator can be coupled to the intermediate layer 102 and the movable member 302, respectively.
  • the portion of the intermediate layer 102 that is used to connect one end of the actuator may be referred to as a fixed anchor. Point area 301. Since the intermediate layer 102 is tightly bonded or integrally formed with the cap layer 101 and/or the substrate layer 103, it can be used as a fixed anchor region 301 of the actuator.
  • the fixed anchor point area 301 for the actuator may also be constituted by other layers independent of the frame type intermediate layer 102, and the embodiment of the present disclosure is not particularly limited thereto.
  • the method of bonding the intermediate layer 102 to the cap layer 101, the substrate layer 103, or only one of the wafers Tightly joined together.
  • the movable member 302 and the actuator (for example, the cantilever beam structure) are both suspended and movable, and are not in close contact with the cover layer 101 and the substrate layer 103, and the actuator can drive the movable member 302 in the chamber 303, for example,
  • the frequency of the reservation is rapidly moved to allow the source port/control port pair to quickly switch between the on and off states, thereby enabling precise control of the fluid flow or fluid pressure at the control port output.
  • the two movable members 302 respectively control the first and second source port/control port pairs (one movable member corresponds to the first source port/control port pair; and the other movable The components correspond to the second source port/control port pair), therefore, the conduction and blocking states of the two source port/control port pairs can be independently controlled, so the fluid flow and pressure output from each control port can be independent control. In this case, fluids of the same or different flow rates or pressures can be output.
  • the specific form of the source port, the control port, the return port, and the movable member according to an embodiment of the present disclosure is not particularly limited under the condition that independent control of different control ports is realized.
  • a first source port 401, a first control port 402, a return port 403, a second control port 404, and a second source port 405 are formed in the substrate layer 103 and throughout the Substrate layer 103.
  • the above ports 401, 402, 403, 404, and 405 are arranged in order from left to right in Fig. 3.
  • Return port 403 is common to both source port/control port pairs.
  • two communicating recesses 202 are included on the inner surface of the cap layer 101.
  • FIG. 4 shows a plan view of a movable member 302 (movable member of the right half of Figure 3).
  • each movable member 302 includes a first portion 3021 for controlling the conduction or blocking state between the return port 403 and the control port 404, and a conduction between the control control port 404 and the source port 405 or The second portion 3022 of the blocking state.
  • each of the movable members 302 may further include a connecting portion 3023 that connects the first portion 3021 and the second portion 3022 to form a frame.
  • a movable member in the form of a frame cooperates with the substrate layer 103 and the cover layer 101 to A subchamber is defined within the chamber.
  • the movable member 302 is placed within the chamber of the microvalve device body and may have a thickness substantially the same as the thickness of the intermediate layer 102 and capable of sliding within the chamber 303. Only the movable members of the control ports 403, 404, and 405 are shown in FIG. Since the ports 401, 402 and the ports 405, 404 are symmetrically arranged with respect to the centerline of the valve device, the movable member 302 for the control ports 401, 402, and 403 can be related to the movable member shown in FIG. 4 with respect to the microvalve device. The center line is symmetrically set and will not be described here.
  • buffer recesses 201 and 203 may also be provided on the inner surface of the cover layer 101 in regions corresponding to the source ports 401 and 405, which are capable of relieving the source from the fluid source The impact of the fluid entering the port of the microvalve device chamber.
  • Figure 5 shows two modes of operation for a microvalve device.
  • Figure 5 (a) is a pressurized mode
  • Figure 5 (b) is a reflow mode, in which both (a) and (b) are shown in cross-section and plan view, and for simplicity and clarity of illustration, The reference numerals of the respective components are removed, and only the source ports are shown with S1 and S2, the control ports are shown with C1 and C2, and the return ports are shown with B.
  • the control port C1 is in fluid communication with the source port S1 via a portion of the chamber 303, and the control port C2 and the source port S2 are via the chamber 303. A portion is in fluid communication. Therefore, fluid with a certain pressure flows in from the source ports S1 and S2, is output from the control ports C1 and C2, and the microvalve device operates in the pressurized mode.
  • the movable member 302 is moved to the position (second position) shown in FIG. 5(b), the fluid flowing in from the source ports S1 and S2 is isolated, and the fluids controlling the ports C1, C2 are discharged from the common return end B, micro The valve device operates in reflow mode.
  • the second portion 3022 of the movable member 302 is located at the source ports S1 and S2.
  • the outer side, and the first portion 3021 is located between the control port and the communication recess on either side of the return port such that the source port and the control port are in fluid communication.
  • the corresponding control port and source port are simultaneously located in the region of the sub-chamber formed by the frame-type movable member, such that the corresponding control port and source port are in fluid communication through the sub-chamber.
  • the first portion of the movable member 302 covers the source port, thereby blocking the inflow of fluid from the source port, and the second portion is located below the communicating recess on both sides of the return port due to
  • the width of the communication recess is greater than the width of the second portion, and thus, the control port and the return port may be in fluid communication with the gap between the communication recess by the movable member 302.
  • the left and right parts of the microvalve device shown in the figure are driven by two separate actuators, and high frequency signals with different duty ratios are applied to the two actuators.
  • the control port C1 and the control port C2 output are different.
  • the flow and pressure of the fluid, the output pressure difference between the two control ports is adjustable. Applying exactly the same signal to both actuators, the first control port C1 and the second control port C2 output two equal-pressure fluid signals.
  • embodiments of the present disclosure can implement a fully controllable microvalve device that can output a differential pressure or equal pressure fluid signal.
  • the movable member of the microvalve device can take a longitudinal motion, that is, a surface motion perpendicular to the layers of the microvalve device body, thereby realizing the respective fluid ports. Control of fluid communication between. As shown in the embodiment described with reference to Figures 3-5, embodiments of the present disclosure also provide a way of lateral motion, that is, for the conduction and blocking states between the source port, the control port, and the return port. Control, in the above embodiment, is achieved by lateral movement of the movable member (parallel to the direction of the cover layer of the microvalve device and/or the plane of the substrate layer). In such a case, the actuator needs to provide driving in the lateral direction.
  • the movable member In the process of driving the movable member, the movable member is driven by the output displacement generated by the lateral expansion and contraction of the actuator, thereby controlling the area in which each fluid port is opened.
  • This movable member design that relies on the lateral drive of the actuator can have the following advantages: Since the output displacement of the actuator is limited, when the actuator is laterally stretched, the length of the fluid port can be enlarged to increase the flow area. Therefore, when the fluid flows between the ports according to the control logic, the flow area and flow rate are effectively expanded, and the rapid pressure drop is avoided, which fully satisfies the application requirements in industries such as refrigeration. In addition, in the open state of the port, such a design avoids direct fluid pressure impact on the actuator.
  • the stacking direction of the different film electrodes in the stacked piezoelectric actuator may be along a direction parallel to the plane of the substrate layer, that is, stacked piezoelectric
  • the different film electrodes of the actuator can be alternately stacked in a direction parallel to the plane of the substrate layer.
  • the longitudinal movement mode and the lateral movement mode described above can also take any other suitable movement mode in the case of being able to control the fluid communication state between the ports.
  • each of the movable members is The type of the motion mode driven actuator is also not particularly limited, as described above in Embodiment 1.
  • the above example describes two source port/control port pairs that share a single return port, and a communication recess is provided on each side of the return port.
  • the return port can be set to be larger than one. For example, configure a return port for each source port/control port pair. In this case, it is not necessary to provide a communication recess.
  • the return port and the control port can be located within a sub-chamber formed by the movable member such that fluid communication between the return port and the control port.
  • the order of arrangement of the source port, the control port, and the return port is not limited to the order shown in the figure according to the embodiment of the present disclosure, but may be arranged in various suitable sequences, as long as different
  • the control ports can be independently driven to output the same or different fluid flows or pressures.
  • the ports of the substrate layer in the above embodiment are arranged in parallel. These ports and movable members can also be arranged in other forms, and the structural relationship between them is unchanged.
  • a valve body assembly including a microvalve device and a main valve is also provided in accordance with an embodiment of the present disclosure.
  • 3 is a schematic illustration of a valve body assembly in accordance with an embodiment of the present disclosure. The structure of the valve body assembly according to the embodiment of the present disclosure and the principle of controlling the main valve by the micro valve device will be described below with reference to FIG.
  • the microvalve device 10 in the valve body assembly according to the present embodiment can use the microvalve device according to any of the above embodiments, and the structure of the microvalve device will not be described herein.
  • the main valve 20 of the valve body assembly is also not particularly limited according to the embodiment of the present disclosure.
  • the main valve 20 may have a main valve body 201 and a valve body 203 having a main flow path and a first pass through the main valve body in a first direction (the direction of the arrow shown in the direction of the main fluid in FIG. 6) The direction in which the one direction intersects (the direction shown in FIG.
  • valve body 203 may have a through hole 204 therein.
  • the through hole 204 may penetrate the spool 203 in a direction parallel to the first direction.
  • the spool 203 can slide in the slide 202 of the main valve body 201, and when the through hole 204 of the spool 203 is aligned with the main passage in the main valve main body 201, the main passage opens; when the through hole 204 of the spool 203 is the main When the main flow path in the valve main body 201 is shifted, the main flow path is cut.
  • the first control port C1 of the microvalve device is in communication with the P1 end of the main valve runner
  • the second control port C2 of the microvalve device is in communication with the P2 end of the main valve runner.
  • the first control port C1 and the second control port C2 respectively output two fluid signals to be loaded at the P1 and P2 terminals of the main valve 20.
  • the spool 203 moves downward; when the sum of the fluid pressure of the P1 end and the gravity of the spool is lower than the fluid pressure of the P2 end, the spool 203 moves upward; when the sum of the fluid pressure of the P1 end and the gravity of the spool is equal to When the P2 end is under fluid pressure, the spool 203 can achieve a stationary hover.
  • the central portion of the spool 203 has a through hole 204 communicating with the left and right. As shown in Fig.
  • the microvalve device 10 controls the main valve 20 as a pilot valve, and the function of controlling the on and off of the main valve can be realized.
  • the flow rate of the main fluid may be controlled according to the degree of coincidence of the main flow path of the main valve main body 201 and the through hole 204 of the valve body 203.
  • main valve in Fig. 6 is placed vertically, embodiments according to the present disclosure are not limited thereto.
  • the main valve in the valve body assembly according to an embodiment of the present disclosure may be placed horizontally or in any other direction.
  • the control method is the same as the embodiment shown in FIG. 6, and details are not described herein again.
  • the main valve's slide side walls are smooth, making the spool very slidable in the slide. Since the pressure at the Pl and P2 ends is adjustable, the displacement of the spool in the slide is determined by the resolution of the pressure adjustment at the P1 and P2 ends, so that highly sensitive spool displacement control can be achieved.
  • the microvalve device acts as a pilot valve to control the main valve, and the ratio of the main fluid flow can be adjusted according to the area in which the spool is aligned with the main valve flow passage.
  • the microvalve device of the present disclosure Due to the characteristics of the silicon micromechanical structure, the microvalve device of the present disclosure has a high operating frequency and a fast action response. In addition, the device itself consumes very low energy and has low power consumption.
  • the microvalve device can work in both open loop and closed loop modes.
  • the fluid flow or pressure generated by the control port is converted into an electrical signal, which is provided as a feedback signal to the mechanism that generates the driving electrical signal, which can form a closed loop regulation and control, and the microvalve device operates in a closed loop mode.
  • the feedback path is in the off state, the microvalve device operates in an open loop mode.
  • Microvalve devices in accordance with embodiments of the present disclosure may be fabricated based on MEMS fabrication techniques.
  • the intermediate layer may be formed of a silicon material
  • the cap layer and the substrate layer may be formed of a silicon material or borosilicate glass.
  • embodiments of the present disclosure may include more than two control ports, and at least two control ports may be independently controlled.
  • the movable member 302 may include one or more through holes.
  • the second portion 3022 can have a through hole.
  • the through hole may be aligned with the buffer recess 201 or 203 when the movable member 302 is in the second position (blocked between the source port and the control port).
  • those skilled in the art may Set according to actual needs.
  • the size of the second portion 3022 needs to be larger than the size of the source port.
  • the above-described size relationship may not be used.
  • the movable member that controls each port it can be driven by the actuator.
  • the movable member itself is a part of an actuator or an actuator, and the embodiment of the present disclosure is not particularly limited thereto.

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Abstract

一种微阀器件与阀体组件，该微阀器件包括至少两个控制端口（402，404）和至少两个可移动构件（302）。至少两个可移动构件（302）分别控制至少两个控制端口（402，404）中的每个，以实现控制端口（402，404）的打开与关闭被独立地控制。从而至少两个控制端口（402，404）可以输出相同或不同流量或压力的流体。该阀体组件包括该微阀器件。

Description

微阀器件与阃体组件 技术领域
本公开涉及微电子机械系统（ MEMS ) ,更具体地 ,涉及一种基于 MEMS 技术的微阀器件与阀体组件。 背景技术
微阀器件属于微流体控制中的关键器件， 在生物、 医疗、 制冷等领域有 着重要的应用。 基于微电子机械系统（MEMS )技术的微阀器件具有控制精 确、 成本低、 可批量化生产、 稳定性及可靠性好等优点。
在流体控制中， 微阀器件可以作为控制主阀的先导阀， 实现对主阀开度 的精确控制， 达到控制流体流动的目的。
中 国 专利 No.200580011090.3 、 No.200780046457.4、 美国 专利 No.6523560, No.7011378、 No.6761420等公开了一种可用作先导阀的微阀器 件， 其特征为只有一个流体端口与主阀相连接。 在先导阀控制主阀， 实现流 体控制的过程中， 必须提供一个标准参考压力， 并依据先导阀的控制端口输 出压力与标准参考压力的相互关系， 控制主流体的通断或流量。
标准参考压力作为一种绝对压力值， 通常由微阀器件外部来提供， 例如 在实际产品中经常使用弹簧等机构来产生标准参考压力。 但是， 这样的机构 可能产生老化、 故障等现象， 使标准参考压力发生偏移甚至失效。 发明内容
本公开实施例的目的之一在于提供一种基于 MEMS技术的主动式微阀 器件， 能同时输出至少两种具有不同压力或流量的流体。 该微阀器件可用于 控制主阀的先导阀， 该先导阀输出的至少两种流体具有相对的压力差， 使通 过主阀流道的流体的通断或流通比例准确可控， 实现控制流量的目的。
本公开的一个实施例提供一种微阀器件， 包括： 主体， 其界定一腔室， 所述主体具有与所述腔室连通的源端口和至少两个控制端口； 至少两个可移 动构件， 所述至少两个可移动构件通过在第一位置和第二位置之间的切换分 别独立地控制所述至少两个控制端口中的每个与所述源端口之间的导通或阻 断， 其中在每个可移动构件处于所述第一位置时， 对应的控制端口与所述源 端口可经由所述腔室的至少一部分流体连通； 在每个可移动构件处于所述第 二位置时， 对应的控制端口与所述源端口之间的流体通路被所述移动构件阻 断。
在一个实施例中， 通过独立地控制所述至少两个可移动构件中的每个的 移动， 所述至少两个控制端口可输出具有不同流量与压力的流体。
在一个实施例中， 所述主体包括依次堆叠的衬底层、 中间层和盖板层， 其中所述中间层为框架式结构，以与所述衬底层和所述盖板层界定所述腔室。
在一个实施例中， 所述主体还包括至少一个回流端口， 且当所述两个可 移动构件中的每个处于所述第二位置时， 对应的控制端口通过所述腔室的至 少一部分与所述至少一个回流端口流体连通。
在一个实施例中， 所述源端口和所述控制端口均位于所述衬底层中。 在一个实施例中， 所述回流端口位于所述衬底层中。
在一个实施例中， 所述可移动构件沿与所述衬底层或所述盖板层的表面 垂直的方向上的厚度与所述中间层的厚度大致相同。
在一个实施例中， 微阀器件还包括独立地控制所述至少两个可移动构件 的每个的执行器， 以使所述至少两个可移动构件的每个处于所述第一位置或 所述第二位置。
在一个实施例中， 所述执行器的一端固定在所述中间层上， 另一端与所 述可移动构件相连， 以驱动所述可移动构件在平行于所述衬底层或盖板层的 表面的方向上在所述腔室内滑动。
在一个实施例中， 所述执行器为包括多个膜层电极的压电执行器， 所述 膜层电极沿着平行于所述衬底层或盖板层的表面的方向堆叠。
在一个实施例中， 所述可移动构件包括设置在所述控制端口和所述回流 端口之间的第一部分， 以用于导通或阻断所述控制端口和所述回流端口之间 的流体连通； 靠近所述源端口的第二部分， 用于导通和阻断所述控制端口和 所述源端口之间的流体连通； 以及连接所述第一部分和所述第二部分的两个 端部以构成框架形式的连接部分， 并且其中所述框架形式的可移动构件与所 述衬底层和所述盖板层配合以在所述腔室内界定子腔室。 在一个实施例中， 所述可移动构件位于所述第一位置时， 对应的所述控 制端口和所述源端口位于所述子腔室对应的区域内， 从而所述控制端口和所 述源端口通过所述子腔室流体连通。
在一个实施例中， 在所述回流端口两侧， 在所述盖板层的内表面上具有 连通凹部， 当所述可移动构件位于所述第二位置时， 所述可移动构件的第一 部分位于对应于所述连通凹部的位置， 所述控制端口和所述回流端口之间通 过所述可移动构件的第一部分与所述连通凹部之间的空隙流体连通。
在一个实施例中， 为每个控制端口配置一个所述源端口， 以形成源端口 / 控制端口对， 其中在每个可移动构件处于所述第一位置时， 对应源端口 /控制 端口对中源端口和控制端口之间被导通； 在每个可移动构件处于所述第二位 置时， 对应源端口 /控制端口对中源端口和控制端口之间被阻断。
在一个实施例中， 在与所述源端口对应的区域， 在所述盖板层的内表面 上具有緩冲凹部。
在一个实施例中， 盖板层和衬底层中至少之一与中间层紧密结合或一体 形成。
在一个实施例中， 中间层由硅材料形成， 盖板层与衬底层由硅材料或硼 硅玻璃形成。
在一个实施例中， 所述主体具有两个控制端口。
本公开的另一个实施例提供一种阀体组件， 包括： 根据如上任一实施例 的微阀器件； 以及主阀， 包括主阀主体和阀芯， 主阀主体中具有沿第一方向 贯穿所述主阀主体的主流道和沿与第一方向交叉的方向延伸的滑道， 阀芯中 具有沿与第一方向平行的方向贯穿所述阀芯的通孔， 所述阀芯置于所述主体 的滑道中， 其中所述微阀器件的一个控制端口与滑道的第一端相连通， 所述 微阀器件中的另一个控制端口与滑道的相对于所述第一端的第二端相连通， 从而驱动所述阀芯在所述滑道中运动。
在一个实施例中， 当所述阀芯被驱动以使得所述通孔与所述主流道对齐 时， 所述主流道被打开； 当所述阀芯被驱动以使得所述通孔与所述主流道错 开时， 所述主流道被切断。 附图说明 为了更清楚地说明本发明实施例的技术方案， 下面将对实施例的附图作 简单地介绍，显而易见地，下面描述中的附图仅仅涉及本发明的一些实施例， 而非对本发明的限制。
图 1是示出根据本公开实施例的微阀器件中可移动构件与源端口、 控制 端口之间关系的示意图；
图 2是示出根据本公开实施例的微阀器件中可移动构件与源端口、 控制 端口和回流端口之间关系的示意图；
图 3是根据本公开实施例的微阀器件的结构示意图；
图 4是根据本公开实施例的微阀器件中可移动构件的平面示意图； 图 5是说明根据本公开实施例的微阀器件的工作原理的示意图； 图 6是示出根据本公开实施例的阀体组件的结构示意图。 具体实施方式
为使本发明实施例的目的、 技术方案和优点更加清楚， 下面将结合本发 明实施例的附图，对本发明实施例的技术方案进行清楚、 完整地描述。显然， 所描述的实施例是本发明的一部分实施例， 而不是全部的实施例。 基于所描 述的本发明的实施例， 本领域普通技术人员在无需创造性劳动的前提下所获 得的所有其他实施例， 都属于本发明保护的范围。
实施例 1
本公开的实施例提供一种微阀器件， 该微阀器件包括主体。 该主体内界 定一腔室， 且主体包括源端口和至少两个控制端口。 源端口和控制端口可以 与腔室相连通。 另外， 该微阀器件还包括至少两个可移动构件， 且该至少两 个可移动构件分别对应控制上述至少两个控制端口中的每个和源端口之间的 导通或阻断状态。 每个可移动构件可以位于两个位置， 即， 第一位置和第二 位置。 在每个可移动构件处于第一位置时， 对应控制端口与源端口可经由所 述腔室的至少一部分流体连通； 在每个可移动构件处于所述第二位置时， 对 应控制端口和源端口之间的流体通路被所述可移动构件阻断。 图 1示出了微 阀器件 1中可移动构件、源端口和控制端口之间的关系图。从图中可以看到， 每个控制端口与源端口之间的导通和阻断状态由对应的可移动构件独立地控 制。 在一个示例中， 微阀器件的主体由依次堆叠的衬底层、 中间层和盖板层 形成。 中间层为框架式结构， 从而可以与衬底层和盖板层配合以在微阀器件 的主体内部界定出上述腔室。 中间层可以与衬底层和 /或盖板层紧密配合， 或 者与它们一体地形成。 控制端口和源端口可以设置在衬底层中， 从而能够实 现与腔室的流体连通。
在一个示例中， 微阀器件还包括执行器， 每个可移动构件由执行器独立 地进行驱动。 因此， 在根据本公开实施例的微阀器件中， 上述至少两个控制 端口中的每个控制端口与源端口之间的导通与阻断状态可以被独立地控制， 由此， 至少两个控制端口之间可以输出相同或不同流量或压力的流体。
根据本公开实施例的微阀器件中驱动可移动构件的执行器没有特别限 制， 例如， 执行器可以釆用压电执行器、 热执行器、 静电执行器、 电磁执行 器或其他任何合适类型的执行器。
在一个示例中， 执行器可以一定的频率驱动每个可移动构件在第一位置 和第二位置之间切换。 当每个执行器施加不同的频率时， 每个控制端口与源 端口之间的导通和阻断状态以不同的频率切换， 因此， 可以精确控制不同控 制端口输出的流体流量和压力。
另外， 在图 1所示的示例中， 为每个控制端口配置一个源端口。 也就是 说， 源端口和控制端口——对应设置， 以形成至少两个源端口 /控制端口对。 上述可移动构件可以独立地控制每个源端口 /控制端口对中源端口与控制端 口之间的导通与阻断状态， 从而控制每个控制端口输出的流体流量和压力。 需要说明的是， 虽然图 1中示出了为每个控制端口配置一个源端口的形式， 但本公开的实施例不限于此。 只要每个控制端口与源端口之间的导通和阻断 状态可以被可移动构件独立地控制， 多个控制端口也可以共享一个或多个源 端口。
例如， 在使用微阀器件时， 微阀器件的源端口可以连接流体源， 微阀器 件的控制端口可以连接需要输入流体的对象或控制对象（例如， 主阀） 。 当 可移动构件进行控制以使得源端口和控制端口之间流体连通时， 由源端口输 入的流体可以由控制端口输出。
图 2示出根据本公开实施例的又一示例的示意图。 从图 2可以看到， 根 据本公开实施例的微阀器件 2还可以包括回流端口， 该回流端口可以与流体 源连通。可移动构件不仅可以控制源端口和控制端口之间的导通和阻断状态 , 还可以控制控制端口和回流端口之间的导通和阻断状态。 具体而言， 当可移 动构件处于第一位置时， 源端口和控制端口之间导通， 而控制端口与回流端 口之间阻断， 从而流体由源端口进入腔室而从控制端口输入； 当可移动构件 处于第二位置时， 源端口和控制端口之间阻断， 而控制端口和回流端口之间 导通 , 从而流体经过控制端口和回流端口回流到流体源。
需要注意的是， 图 1和图 2仅仅为示出微阀器件 1和 2中某些部件之间 的关系图， 并非该微阀器件的结构图。 在能够实现独立控制微阀器件的不同 流体端口、 可移动构件以及执行器。 根据本公开实施例的一些示例性结构将 在下面的实施例中进行描述。
可移动构件对控制端口与源端口之间的导通和阻断的控制方式或者对控 制端口与回流端口之间的导通和阻断的控制方式没有特别的限制。 例如， 可 移动构件可以通过在覆盖和不覆盖流体端口的两个状态之间切换而实现上述 控制， 或者也可以通过设置阻断端口之间的腔室部分的方式来阻断端口之间 的流体连通，而可移动构件从上述位置移开时，则导通端口之间的流体通路。
在一个示例中， 可移动构件可以釆用垂直于微阀器件主体的表面 （衬底 层或盖板层的表面） 的运动方式（纵向运动方式） 。 在纵向运动方式下， 在 控制端口阻断时， 端口被可移动构件（或执行器本身）覆盖； 在控制端口与 源端口导通时， 可移动构件在垂直于微阀器件主体表面的方向上与端口离开 一定的距离， 从而留出供流体流动的缝隙。 例如， 在执行器为压电执行器的 情况下， 在纵向运动方式运行时， 压电执行器的不同膜层电极在垂直于微阀 器件主体表面的方向上堆叠， 因此， 当对压电执行器的电极层施加电信号时， 压电执行器可以在纵向方向上运动。 另外， 本发明还提出了一种适用于平行 于微阀器件主体表面的运动方式的结构， 该运动方式或结构比上述纵向运动 方式能够取得更好的技术效果， 这种结构及其相关技术效果将在下面的实施 例中进行详细的描述。
实施例 2
图 3示出根据本公开实施例的一种微阀器件的结构， 其中（a )为截面示 意图； 而（b )为平面示意图。 另外， 需要说明的是， 本实施例为根据本公开 的又一个具体示例， 在上述实施例 1中描述的特征也可以适用于本实施例或 者可以与本实施例进行适当组合。 为了描述的简洁， 与上述实施例 1中相同 的内容将在本实施例中适当地简化或省略。
如图 3 ( a )和（b )所示， 微阀器件包括盖板层 101、 中间层 102和衬底 层 103。依次堆叠的盖板层 101、中间层 102和衬底层 103形成微阀器件的主 体。 中间层 102可以为框架状构造， 由此在微阀器件主体内部界定出一腔室 303。
如图 3所示， 盖板层 101的内表面 （面对腔室 303的表面）上包括多个 凹部 201、 202和 203 (各个凹部的功能将在稍后描述）。 另外， 在微阀器件 主体的腔室内还包括两个可移动构件 302, 例如， 可移动构件 302可以在腔 室内沿平行于盖板层 101或衬底层 103的平面滑动。 衬底层 103包括第一源 端口 401、 第二源端口 405、 第一控制端口 402、 第二控制端口 404以及公共 回流端口 403。 第一源端口 401和第一控制端口 402构成第一源端口 /控制端 口对， 第二源端口 405和第二控制端口 404构成第二源端口 /控制端口对。
对于每个源端口 /控制端口对， 其中的源端口可以与流体源相连通， 而控 制端口可以与控制对象（例如主阀等）相连通， 以对控制对象施加所需的流 体压力等。 另外， 在进行压力的卸载或调整时， 所施加的流体可以通过控制 端口然后通过回流端口流回到流体源。 因此， 回流端口也可以与流体源连通。
对于该实施例中的可移动构件 302, 其可以移动 （例如在第一位置和第 二位置之间）， 从而对每个源端口 /控制端口对独立地进行控制。 例如， 当可 移动构件处于第一位置时 ,对应源端口 /控制端口对中的源端口和控制端口可 经由腔室 303的至少一部分流体连通， 因此， 由流体源施加的流体可以通过 控制端口输出； 当可以移动构件处于第二位置时， 对应源端口 /控制端口对中 的源端口和控制端口之间的流体通路被移动构件 302阻断， 从而停止从控制 端口的流体输出， 此时控制端口和回流端口之间可以被导通， 从而之前通过 控制端口输出的流体可以再经控制端口和回流端口流回到流体源。
对于每个可移动构件 302, 可以依靠单独的执行器（图中未示出）进行 驱动， 从而能够独立地控制每个控制端口与源端口之间的导通与阻断。
在一个示例中， 执行器的两端可以分别连接在中间层 102与可移动构件 302上。 例如， 中间层 102上用于连接执行器的一端的部分可以称为固定锚 点区域 301。 由于中间层 102与盖板层 101和 /或衬底层 103紧密结合或一体 形成， 因此， 可以用作执行器的固定锚点区域 301。 当然， 用于执行器的固 定锚点区域 301也可以由独立于框架式中间层 102的其他层构成， 本公开的 实施例对此没有特别限制。
中间层 102与盖板层 101、衬底层 103、或者只是其中之一通过晶片键合 的方法（包括但不局限于熔融键合、 阳极键合、金娃键合、 粘结键合等方法） 紧密地结合在一起。 可移动构件 302与执行器（例如， 悬弹梁结构）均悬空 可动， 与盖板层 101、 衬底层 103均无紧密的接触， 执行器可以驱动可移动 构件 302在腔室 303内例如以预订的频率快速运动，以在使源端口 /控制端口 对在导通和阻断状态之间快速切换， 从而能够精确地控制控制端口输出的流 体流量或流体压力。
在根据本公开的实施例中， 由于两个可移动构件 302分别控制第一和第 二源端口 /控制端口对（一个可移动构件对应于第一源端口 /控制端口对； 而 另一个可移动构件对应于第二源端口 /控制端口对） ， 因此， 两个源端口 /控 制端口对的导通与阻断状态可以独立控制， 因此， 从每个控制端口输出的流 体流量和压力可以分别独立控制。 在此情况下， 可以输出相同或不同流量或 压力的流体。
在实现对不同控制端口独立控制的条件下，根据本公开实施例的源端口、 控制端口、 回流端口和可移动构件的具体形式没有特别的限定。
例如，在一个示例中，如图 3所示，第一源端口 401、第一控制端口 402、 回流端口 403、 第二控制端口 404和第二源端口 405形成于衬底层 103中并 贯穿所述衬底层 103。 上述端口 401、 402、 403、 404和 405在图 3中从左至 右依次排列。 回流端口 403对于两个源端口 /控制端口对是公用的。 在回流端 口 403的两侧对应的区域，在盖板层 101的内表面上包括两个连通凹部 202。
图 4示出了一个可移动构件 302 (图 3中右半部分的可移动构件） 的平 面图。 如图 4所示， 每个可移动构件 302包括用于控制回流端口 403与控制 端口 404之间导通或阻断状态的第一部分 3021 , 以及控制控制端口 404与源 端口 405之间导通或阻断状态的第二部分 3022。 另外， 每个可移动构件 302 还可以包括连接第一部分 3021和第二部分 3022以形成一种框架形式的连接 部分 3023。框架形式的可移动构件与衬底层 103和盖板层 101配合以在所述 腔室内界定子腔室。 可移动构件 302置于微阀器件主体的腔室内， 其厚度可 以与中间层 102的厚度大致相同， 且能够在腔室 303内滑动。 图 4中仅示出 了控制端口 403、 404和 405的可移动构件。 由于端口 401、 402与端口 405、 404关于 阀器件的中心线对称布置， 因此， 用于控制端口 401、 402和 403 的可移动构件 302可以与图 4中所示的可移动构件关于微阀器件的中心线对 称设置， 这里不再赘述。
在一个示例中， 如图 3所示， 还可以在与源端口 401和 405对应的区域 中， 在盖板层 101的内表面上设置緩冲凹部 201和 203 , 其能够緩解从流体 源通过源端口进入微阀器件腔室的流体的冲击。
下面结合图 5 对具有上述示例结构的微阀器件的基本工作原理进行说 明。 图 5示出了微阀器件的两种工作模式。 图 5 ( a )为加压模式； 图 5 ( b ) 为回流模式， 其中图 5中 （a )和（b ) 中均示出了截面图和平面图， 并且为 了图示的简便和清楚， 省去了各个部件的标号， 而仅仅以 S1和 S2示出源端 口， 以 C1和 C2示出控制端口， 以 B示出回流端口。 当可移动构件 302运 动至图 5 ( a )所示位置（第一位置）时， 控制端口 C1与源端口 S1经由腔室 303的一部分流体连通， 控制端口 C2与源端口 S2经由腔室 303的一部分流 体连通。 因此， 具有一定压力的流体由源端口 S1 和 S2 流入， 由控制端口 C1和 C2输出，微阀器件工作在加压模式。 当可移动构件 302移动至图 5 ( b ) 所示位置（第二位置）时， 由源端口 S1和 S2流入的流体被隔绝， 控制端口 Cl、 C2的流体由公共回流端 B泄流， 微阀器件工作在回流模式。 虽然， 图 5 ( a )和（b )中均示出了两个控制端口均同时处于加压模式或回流模式的示 例， 然而， 才艮据本公开实施例中的两个控制端口可以被各自的可移动构件独 立地驱动， 因此， 也可以具有一个控制端口处于加压模式， 而另一个控制端 口处于回流模式的情况。
更具体而言， 对于具有上述示例结构的微阀器件， 当可移动构件 302处 于第一位置时， 如图 5 ( a )所示， 可移动构件 302的第二部分 3022位于源 端口 S1和 S2的外侧， 而第一部分 3021位于控制端口与回流端口两侧的连 通凹部之间， 从而使得源端口和控制端口流体连通。 也可以说， 对应的控制 端口和源端口同时位于框架式可移动构件形成的子腔室的区域内， 从而对应 的控制端口和源端口通过该子腔室流体连通。 当可移动构件 302处于第二位 置时， 如图 5 ( b )所示， 可移动构件 302的第一部分覆盖源端口， 从而阻断 了从源端口的流体流入， 第二部分则位于回流端口两侧的连通凹部之下， 由 于连通凹部的宽度大于第二部分的宽度， 因此， 控制端口和回流端口之间可 以通过可移动构件 302与连通凹部之间的空隙流体连通。
图中所示的微阀器件的左右部分由两个单独的执行器各自驱动， 给两个 执行器施加具有不同占空比的高频信号，则控制端口 C1和控制端口 C2输出 两种具有不同流量与压力的流体， 两个控制端口之间的输出压差可调。 给两 个执行器施加完全相同的信号，则第一控制端口 C1和第二控制端口 C2输出 两路等压流体信号。 基于上述工作原理， 本公开的实施例可以实现一种完全 可控的可输出压差或等压流体信号的微阀器件。
如以上在实施例 1中提到， 根据本公开实施例的微阀器件的可移动构件 可以釆取纵向运动的方式， 即垂直于微阀器件主体各层的表面运动， 从而实 现对各流体端口之间流体连通的控制。 如参照图 3-5描述的实施例所示， 本 公开的实施例还提供一种横向运动的方式， 也就是说， 对于源端口、 控制端 口和回流端口之间的导通和阻断状态的控制， 上述实施例中以可移动构件的 横向运动 （平行于微阀器件的盖板层和 /或衬底层平面的方向的运动） 实现。 在这样的情况下， 所述执行器需要提供横向方向的驱动。 在对可移动构件进 行驱动的过程中， 利用执行器的横向伸缩产生的输出位移驱动可移动构件， 从而控制各流体端口打开的面积。 这种依靠执行器横向驱动的可移动构件设 计可以具有以下优点： 由于执行器的输出位移是有限的， 当执行器横向伸缩 时， 可以扩大流体端口的长度以增加流通面积。 因此， 流体依据控制逻辑在 各端口之间流通时， 有效扩大了流通面积与流量， 避免了快速压降， 充分满 足在制冷等行业的应用需求。 另外， 在端口打开的状态， 这样的设计避免了 流体直接压力冲击执行器。 例如， 在执行器为堆叠式压电执行器的情况下， 该堆叠式压电执行器中不同膜层电极的堆叠方向可以沿着平行于衬底层平面 的方向， 也就是说， 堆叠式压电执行器的不同膜层电极可以在平行于衬底层 平面的方向上交替堆叠。 述的纵向运动方式和横向运动方式， 在能够控制各端口之间流体连通状态的 情况下， 还可以釆取其他任何合适的运动方式。 并且， 对可移动构件进行各 种运动方式驱动的执行器的类型也没有特别限定， 如以上在实施例 1中所描 述的。
以上示例中描述了两个源端口 /控制端口对公用一个回流端口，并且在回 流端口两侧分别设置连通凹部。 然而， 回流端口可以设置为大于一个。例如， 对于每个源端口 /控制端口对配置一个回流端口。 在这种情况下， 可以不必设 置连通凹部。 例如， 当需要回流模式时， 可以使回流端口和控制端口位于可 移动构件所构成的子腔室内， 从而使得回流端口和控制端口之间流体连通。 另外， 对于源端口、 控制端口和回流端口的排列顺序， 才艮据本公开的实施例 也不限定于图中所示的顺序， 而是可以釆取各种合适的顺序进行布置， 只要 不同的控制端口能够被独立地驱动以输出相同或不同的流体流量或压力。 上 述实施例中衬底层的端口为并行排列。 这些端口与可移动构件也可以做其它 形式的排布， 其相互之间的结构形成与逻辑关系不变。
实施例 3
根据本公开的实施例还提供一种包括微阀器件和主阀的阀体组件。 图 3 是根据本公开一个实施例的阀体组件的示意图。 下面结合图 3对根据本公开 实施例的阀体组件的结构以及微阀器件对主阀进行控制的原理进行说明。
根据本实施例的阀体组件中的微阀器件 10 可以使用根据上述任一实施 例的微阀器件， 对于微阀器件的结构这里不再赘述。 另外， 根据本公开的实 施例对阀体组件的主阀 20也没有特别限制。 例如， 主阀 20可以具有主阀主 体 201和阀芯 203 , 主阀主体 201中具有沿第一方向 （图 6中主流体方向所 示的箭头方向）贯穿主阀主体的主流道和沿与第一方向交叉的方向 （图 6所 示的方向为与第一方向大致垂直的方向， 但本发明不限于此）延伸的滑道 202, 阀芯 203中可以具有通孔 204。 通孔 204可以沿着与第一方向平行的方 向贯穿阀芯 203。 阀芯 203可以在主阀主体 201的滑道 202中滑动， 当阀芯 203的通孔 204与主阀主体 201中的主流道对齐时，主流道打开； 当阀芯 203 的通孔 204与主阀主体 201中的主流道错开时， 主流道被切断。
如图 6所示， 微阀器件的第一控制端口 C1与主阀滑道的 P1端相连通， 微阀器件的第二控制端口 C2与主阀滑道的 P2端相连通。 当微阀器件 10作 为先导阀工作时，第一控制端口 C1与第二控制端口 C2分别输出两路流体信 号加载在主阀 20的 Pl、 P2端。 当 P1端流体压力与阀芯 203重力之和高于 P2端流体压力时， 阀芯 203向下运动； 当 P1端流体压力与阀芯重力之和低 于 P2端流体压力时， 阀芯 203向上运动； 当 P1端流体压力与阀芯重力之和 等于 P2端流体压力时， 阀芯 203可实现静止悬停。 阀芯 203的中部有左右 连通的通孔 204。 如图 6示， 当阀芯 203运动至通孔 204与主流道对齐位置 时， 主流道打开， 主流体流通； 当阀芯 203运动至其它位置时， 主流道关闭， 主流体被切断。 因此， 微阀器件 10作为先导阀控制主阀 20, 可以实现控制 主阀通断的功能。 另夕卜， 还可以根据主阀主体 201的主流道与阀芯 203的通 孔 204的重合程度控制主流体的流量大小。
虽然图 6中的主阀为垂直放置， 但根据本公开的实施例不限制于此。 根 据本公开实施例的阀体组件中的主阀可以水平或以其它任何方向放置。 当以 其他方式放置时， 控制方法如图 6所示实施例相同， 这里不再赘述。
主阀的滑道侧壁光滑， 使得阀芯在滑道中滑动非常灵敏。 鉴于 Pl、 P2 端压力可调， 阀芯在滑道中的位移决定于 Pl、 P2端压力调节的分辨率， 因 此可实现高灵敏度的阀芯位移控制。 微阀器件作为先导阀控制主阀， 根据阀 芯与主阀流道连通对齐的面积， 可实现主流体流量的比例调节。
由于硅微机械结构的特点， 本公开涉及的微阀器件具有较高的动作频率 和快速的动作响应。 此外， 器件本身只消耗很低的能量， 具有较低的功耗。
需要说明的是， 本公开涉及的微阀器件可以工作在开环与闭环两种工作 方式。 将控制端口产生的流体流量或压力转换为电信号， 作为反馈信号提供 给产生驱动电学信号的机构， 可以形成闭环的调节与控制， 微阀器件工作在 闭环工作方式。 反之， 若此反馈通路处于断开状态， 微阀器件工作在开环工 作方式。
根据本公开实施例的微阀器件可以基于 MEMS制造技术制造。例如， 中 间层可以由硅材料形成， 盖板层与衬底层可以由硅材料或硼硅玻璃形成。 另 夕卜， 虽然在图 3-5的实施例中仅仅示出两个控制端口， 但是本公开的实施例 可以包括两个以上的控制端口， 且至少有两个控制端口可以被独立地控制。
另外， 根据本公开实施例的微阀器件中， 可移动构件 302可以包括一个 或多个通孔。例如， 第二部分 3022可以具有贯通孔。 当可移动构件 302处于 第二位置 （源端口和控制端口之间被阻断 ) 时， 该贯通孔可以对准緩冲凹部 201或 203。 另外，对于可移动构件 302各部分的尺寸， 本领域的技术人员可 以根据实际需要设定。例如，为了使可移动构件 302的第二部分 3022以覆盖 源端口的方式阻断源端口和控制端口之间的连通，第二部分 3022的尺寸需要 大于源端口的尺寸。 然而， 当以其他方式进行阻断， 例如， 第二部分 3022 移动到图 5 ( b )中源端口 S1右侧或源端口 S2左侧的情况下， 也可以不釆用 上述尺寸关系。
另外， 需要说明的是， 对于控制各个端口的可移动构件， 其可以通过执 行器来进行驱动。 或者， 可移动构件本身就是执行器或者执行器的一部分， 本公开的实施例对此没有特别限定。
以上所述仅是本发明的示范性实施方式， 而非用于限制本发明的保护范 围， 本发明的保护范围由所附的权利要求确定。

Claims

权利要求书
1、 一种微阀器件， 包括：
主体， 其界定一腔室， 所述主体具有与所述腔室连通的源端口和至少两 个控制端口；
至少两个可移动构件， 所述至少两个可移动构件通过在第一位置和第二 位置之间的切换分别独立地控制所述至少两个控制端口中的每个与所述源端 口之间的导通或阻断，
其中在每个可移动构件处于所述第一位置时， 对应的控制端口与所述源 端口可经由所述腔室的至少一部分流体连通； 在每个可移动构件处于所述第 二位置时， 对应的控制端口与所述源端口之间的流体通路被所述移动构件阻 断。
2、根据权利要求 1所述的微阀器件，其中通过独立地控制所述至少两个 可移动构件中的每个的移动， 所述至少两个控制端口可输出具有不同流量与 压力的流体。
3、根据权利要求 1或 2所述的微阀器件，其中所述主体包括依次堆叠的 衬底层、 中间层和盖板层， 其中所述中间层为框架式结构， 以与所述衬底层 和所述盖板层界定所述腔室。
4、根据权利要求 1-3中任一项所述的微阀器件， 其中所述主体还包括至 少一个回流端口， 且当所述两个可移动构件中的每个处于所述第二位置时， 对应的控制端口通过所述腔室的至少一部分与所述至少一个回流端口流体连 通。
5、根据权利要求 1-4中任一项所述的微阀器件， 其中所述源端口和所述 控制端口均位于所述衬底层中。
6、根据权利要求 4所述的微阀器件，其中所述回流端口位于所述衬底层 中。
7、根据权利要求 1-6中任一项所述的微阀器件， 其中所述可移动构件沿 与所述衬底层或所述盖板层的表面垂直的方向上的厚度与所述中间层的厚度 大致相同。
8、根据权利要求 3中任一项所述的微阀器件，还包括独立地控制所述至 少两个可移动构件的每个的执行器， 以使所述至少两个可移动构件的每个处 于所述第一位置或所述第二位置。
9、根据权利要求 8所述的微阀器件，其中所述执行器的一端固定在所述 中间层上， 另一端与所述可移动构件相连， 以驱动所述可移动构件在平行于 所述衬底层或盖板层的表面的方向上在所述腔室内滑动。
10、 根据权利要求 8或 9所述的微阀器件， 其中所述执行器为包括多个 膜层电极的压电执行器， 所述膜层电极沿着平行于所述衬底层或盖板层的表 面的方向堆叠。
11、 根据权利要求 3、 8-10中任一项所述的微阀器件， 其中所述可移动 构件包括设置在所述控制端口和所述回流端口之间的第一部分， 以用于导通 或阻断所述控制端口和所述回流端口之间的流体连通； 靠近所述源端口的第 二部分， 用于导通和阻断所述控制端口和所述源端口之间的流体连通； 以及 连接所述第一部分和所述第二部分的两个端部以构成框架形式的连接部分， 并且
其中所述框架形式的可移动构件与所述衬底层和所述盖板层配合以在所 述腔室内界定子腔室。
12、根据权利要求 11所述的微阀器件，其中所述可移动构件位于所述第 一位置时，对应的所述控制端口和所述源端口位于所述子腔室对应的区域内， 从而所述控制端口和所述源端口通过所述子腔室流体连通。
13、 根据权利要求 3、 8-12中任一项所述的微阀器件， 其中在所述回流 端口两侧， 在所述盖板层的内表面上具有连通凹部， 当所述可移动构件位于 所述第二位置时， 所述可移动构件的第一部分位于对应于所述连通凹部的位 置， 所述控制端口和所述回流端口之间通过所述可移动构件的第一部分与所 述连通凹部之间的空隙流体连通。
14、根据权利要求 1-13中任一项所述的微阀器件， 其中为每个控制端口 配置一个所述源端口， 以形成源端口 /控制端口对， 其中在每个可移动构件处 于所述第一位置时， 对应源端口 /控制端口对中源端口和控制端口之间被导 通； 在每个可移动构件处于所述第二位置时， 对应源端口 /控制端口对中源端 口和控制端口之间被阻断。
15、 根据权利要求 3、 8-13中任一项所述的微阀器件， 其中在与所述源 端口对应的区域， 在所述盖板层的内表面上具有緩冲凹部。
16、 根据权利要求 3、 8-13中任一项所述的微阀器件， 其中盖板层和衬 底层中至少之一与中间层紧密结合或一体形成。
17、 根据权利要求 3、 8-13中任一项所述的微阀器件， 其中中间层由硅 材料形成， 盖板层与衬底层由硅材料或硼硅玻璃形成。
18、根据权利要求 1-17中任一项所述的微阀器件， 所述主体具有两个控 制端口。
19、 一种阀体组件， 包括：
如权利要求 1-18中任一项所述的微阀器件； 以及
主阀， 包括主阀主体和阀芯， 主阀主体中具有沿第一方向贯穿所述主阀 主体的主流道和沿与第一方向交叉的方向延伸的滑道， 阀芯中具有沿与第一 方向平行的方向贯穿所述阀芯的通孔， 所述阀芯置于所述主体的滑道中， 其中所述微阀器件的一个控制端口与滑道的第一端相连通 , 所述微阀器 件中的另一个控制端口与滑道的相对于所述第一端的第二端相连通， 从而驱 动所述阀芯在所述滑道中运动。
20、如权利要求 19所述的阀体组件，其中当所述阀芯被驱动以使得所述 通孔与所述主流道对齐时， 所述主流道被打开； 当所述阀芯被驱动以使得所 述通孔与所述主流道错开时， 所述主流道被切断。
PCT/CN2012/087709 2012-12-27 2012-12-27 微阀器件与阀体组件 WO2014101057A1 (zh)

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