CN104884851A - 微阀器件与阀体组件 - Google Patents

微阀器件与阀体组件 Download PDF

Info

Publication number
CN104884851A
CN104884851A CN201280077963.0A CN201280077963A CN104884851A CN 104884851 A CN104884851 A CN 104884851A CN 201280077963 A CN201280077963 A CN 201280077963A CN 104884851 A CN104884851 A CN 104884851A
Authority
CN
China
Prior art keywords
port
micro
valve device
movable member
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201280077963.0A
Other languages
English (en)
Other versions
CN104884851B (zh
Inventor
张胜昌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Dunan Artificial Environment Co Ltd
Original Assignee
Zhejiang Dunan Artificial Environment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang Dunan Artificial Environment Co Ltd filed Critical Zhejiang Dunan Artificial Environment Co Ltd
Publication of CN104884851A publication Critical patent/CN104884851A/zh
Application granted granted Critical
Publication of CN104884851B publication Critical patent/CN104884851B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0028—Valves having multiple inlets or outlets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Micromachines (AREA)
  • Multiple-Way Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

一种微阀器件与阀体组件，该微阀器件包括至少两个控制端口(402，404)和至少两个可移动构件(302)。至少两个可移动构件(302)分别控制至少两个控制端口(402，404)中的每个，以实现控制端口(402，404)的打开与关闭被独立地控制。从而至少两个控制端口(402，404)可以输出相同或不同流量或压力的流体。该阀体组件包括该微阀器件。

Description

PCT国内申请，说明书已公开。

Claims (1)

  1. PCT国内申请，权利要求书已公开。
CN201280077963.0A 2012-12-27 2012-12-27 微阀器件与阀体组件 Active CN104884851B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2012/087709 WO2014101057A1 (zh) 2012-12-27 2012-12-27 微阀器件与阀体组件

Publications (2)

Publication Number Publication Date
CN104884851A true CN104884851A (zh) 2015-09-02
CN104884851B CN104884851B (zh) 2017-04-12

Family

ID=51019705

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280077963.0A Active CN104884851B (zh) 2012-12-27 2012-12-27 微阀器件与阀体组件

Country Status (4)

Country Link
US (1) US9897233B2 (zh)
JP (1) JP6046268B2 (zh)
CN (1) CN104884851B (zh)
WO (1) WO2014101057A1 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2014801B1 (en) * 2015-05-13 2017-01-27 Berkin Bv Fluid flow device, comprising a valve unit, as well as method of manufacturing the same.
US10612691B2 (en) * 2018-01-12 2020-04-07 International Business Machines Corporation Micro electrical mechanical system (MEMS) valve
US10415721B2 (en) * 2018-01-12 2019-09-17 International Business Machines Corporation Micro electrical mechanical system (MEMS) valve
USD919833S1 (en) 2019-03-06 2021-05-18 Princeton Biochemicals, Inc Micro valve for controlling path of fluids in miniaturized capillary connections

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4895500A (en) * 1988-04-08 1990-01-23 Hoek Bertil Micromechanical non-reverse valve
US6494804B1 (en) * 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
US6540203B1 (en) * 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
CN1479030A (zh) * 2003-06-20 2004-03-03 深圳迈瑞生物医疗电子股份有限公司 微型双隔膜电磁阀
CN1902419A (zh) * 2003-11-24 2007-01-24 铝微有限公司 适于控制变容量压缩机的微阀装置
CN1942222A (zh) * 2004-03-05 2007-04-04 铝微有限公司 用于形成微阀的选择性接合
CN101617155A (zh) * 2006-12-15 2009-12-30 麦克罗斯塔克公司 微阀装置
CN102171134A (zh) * 2008-08-12 2011-08-31 麦克罗斯塔克公司 具有改进的流体选定路线的微型阀装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5325880A (en) * 1993-04-19 1994-07-05 Tini Alloy Company Shape memory alloy film actuated microvalve
US5709245A (en) * 1994-09-23 1998-01-20 The Boeing Company Optically controlled actuator
DE29710006U1 (de) * 1997-06-09 1998-11-05 Bürkert Werke GmbH & Co., 74653 Ingelfingen Miniaturisierte Ventileinrichtung
US6523560B1 (en) 1998-09-03 2003-02-25 General Electric Corporation Microvalve with pressure equalization
WO2000014415A2 (en) * 1998-09-03 2000-03-16 Lucas Novasensor Proportional micromechanical device
US7011378B2 (en) 1998-09-03 2006-03-14 Ge Novasensor, Inc. Proportional micromechanical valve
WO2000032972A1 (en) * 1998-11-30 2000-06-08 The Regents Of The University Of California Micro-electromechanical block regulating fluid flow
US6845962B1 (en) * 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
FR2818331B1 (fr) * 2000-12-19 2003-03-14 Snecma Moteurs Servo-valve a memoire de position
US6739576B2 (en) 2001-12-20 2004-05-25 Nanostream, Inc. Microfluidic flow control device with floating element
JP4036834B2 (ja) * 2004-01-21 2008-01-23 松下電器産業株式会社 マイクロポンプ用逆止弁の製造方法
DE112008000862T5 (de) * 2007-03-30 2010-03-11 Microstaq, Inc., Austin Vorgesteuertes Mikroschieberventil
US8082952B2 (en) * 2008-08-22 2011-12-27 Hamilton Sundstrand Corporation Piezoelectric bending element actuator for servo valve
US8851117B2 (en) * 2012-01-30 2014-10-07 Gm Global Technology Operations, Llc MEMS valve operating profile

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4895500A (en) * 1988-04-08 1990-01-23 Hoek Bertil Micromechanical non-reverse valve
US6540203B1 (en) * 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US6494804B1 (en) * 2000-06-20 2002-12-17 Kelsey-Hayes Company Microvalve for electronically controlled transmission
CN1479030A (zh) * 2003-06-20 2004-03-03 深圳迈瑞生物医疗电子股份有限公司 微型双隔膜电磁阀
CN1902419A (zh) * 2003-11-24 2007-01-24 铝微有限公司 适于控制变容量压缩机的微阀装置
CN1942222A (zh) * 2004-03-05 2007-04-04 铝微有限公司 用于形成微阀的选择性接合
CN101617155A (zh) * 2006-12-15 2009-12-30 麦克罗斯塔克公司 微阀装置
CN102171134A (zh) * 2008-08-12 2011-08-31 麦克罗斯塔克公司 具有改进的流体选定路线的微型阀装置

Also Published As

Publication number Publication date
WO2014101057A1 (zh) 2014-07-03
US20160033055A1 (en) 2016-02-04
US9897233B2 (en) 2018-02-20
JP6046268B2 (ja) 2016-12-14
JP2016507708A (ja) 2016-03-10
CN104884851B (zh) 2017-04-12

Similar Documents

Publication Publication Date Title
US6481984B1 (en) Pump and method of driving the same
US20130032235A1 (en) Integrated microfluidic check valve and device including such a check valve
JP7112285B2 (ja) 流体システム
KR101776358B1 (ko) 유체 네트워크 내의 유체 흐름의 발생
CN104884851A (zh) 微阀器件与阀体组件
US20040036047A1 (en) Micro valve normally a closed position
JP7156864B2 (ja) 流体システム
US10563642B2 (en) Modular stacked variable-compression micropump and method of making same
TWM555407U (zh) 流體系統
US20150345663A1 (en) Microvalve Device and Manufacturing Method Therefor
TWM555406U (zh) 流體系統
TWM556292U (zh) 流體系統
KR100884893B1 (ko) 마이크로 펌프
JP7177632B2 (ja) 流体システム
GB2388251A (en) Piezoelectric activated relay
CN104487748A (zh) 微阀装置及控制流体流动的方法
CN104445043B (zh) 一种mems微阀及其制作工艺
CN105805411A (zh) 一种新型刀闸微型阀装置
US11639718B2 (en) Micromechanical devices with mechanical actuators
KR102083569B1 (ko) 순차적 주기적인 미세유체 구동장치 및 방법
CN109578686B (zh) 流体系统
KR101132657B1 (ko) 단일 제어 신호에 의해 구동되는 연동형 마이크로 펌프 및 그 제조 방법
JPH0225020Y2 (zh)
CN104609357A (zh) 一种微阀
JP2012057692A (ja) マイクロバルブ

Legal Events

Date Code Title Description
PB01 Publication
C53 Correction of patent of invention or patent application
CB02 Change of applicant information

Address after: 311835 Zhuji port industrial area, Zhejiang

Applicant after: Zhejiang Dunan Artificial Environment Co., Ltd.

Address before: 310051, No. 8, Garden Road, Hangzhou, Zhejiang, Binjiang District

Applicant before: Zhejiang Dunan Artificial Environment Co., Ltd.

COR Change of bibliographic data

Free format text: CORRECT: ADDRESS; FROM: 310051 HANGZHOU, ZHEJIANG PROVINCE TO: 311835 SHAOXING, ZHEJIANG PROVINCE

C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant