JPH0325724B2 - - Google Patents

Info

Publication number
JPH0325724B2
JPH0325724B2 JP59279116A JP27911684A JPH0325724B2 JP H0325724 B2 JPH0325724 B2 JP H0325724B2 JP 59279116 A JP59279116 A JP 59279116A JP 27911684 A JP27911684 A JP 27911684A JP H0325724 B2 JPH0325724 B2 JP H0325724B2
Authority
JP
Japan
Prior art keywords
flow rate
mass flow
tube
gas
protruding piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59279116A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61159110A (ja
Inventor
Takashi Sudo
Isao Suzuki
Takeshi Hamaguri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TYLAN KK
Original Assignee
NIPPON TYLAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TYLAN KK filed Critical NIPPON TYLAN KK
Priority to JP59279116A priority Critical patent/JPS61159110A/ja
Publication of JPS61159110A publication Critical patent/JPS61159110A/ja
Publication of JPH0325724B2 publication Critical patent/JPH0325724B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
JP59279116A 1984-12-29 1984-12-29 質量流量制御装置 Granted JPS61159110A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59279116A JPS61159110A (ja) 1984-12-29 1984-12-29 質量流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59279116A JPS61159110A (ja) 1984-12-29 1984-12-29 質量流量制御装置

Publications (2)

Publication Number Publication Date
JPS61159110A JPS61159110A (ja) 1986-07-18
JPH0325724B2 true JPH0325724B2 (cs) 1991-04-08

Family

ID=17606642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59279116A Granted JPS61159110A (ja) 1984-12-29 1984-12-29 質量流量制御装置

Country Status (1)

Country Link
JP (1) JPS61159110A (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6286513U (cs) * 1985-11-20 1987-06-02
JPH0214029U (cs) * 1988-07-11 1990-01-29
DE102013201071B3 (de) 2013-01-23 2014-05-28 Hainbuch Gmbh Spannende Technik Spanneinrichtung

Also Published As

Publication number Publication date
JPS61159110A (ja) 1986-07-18

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