JPH0325402Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to an apparatus for holding a substrate crystal in a molecular beam epitaxial growth apparatus.

(Summary of the invention) The present invention provides a substrate holding device for a molecular beam epitaxial growth apparatus, which includes a ring-shaped block body and a substrate-holding ring having elasticity that can be freely closed. The outer periphery of the upper part of the body protrudes from the periphery of the block body,
The inner periphery is provided with a flange part that is the same as the inner periphery of the block body, and the upper surface of the flange part is formed with a plurality of inverted L-shaped ring engaging parts with the tips facing inward, and the inner wall of the block body is A substrate holding section for supporting the substrate is provided, and the substrate holding ring has openings at both ends, and a U projecting toward the inner periphery at a location corresponding to the ring holding section of the block main body.
The object is to improve operability by forming a letter-shaped engaging claw.

(Prior art and problems to be solved by the invention) Molecular beam epitaxial growth is a crystal growth technique that evaporates a single element in an ultra-high vacuum and grows it as a single crystal thin film on a substrate crystal. It is. In this molecular beam epitaxial device,
Conventionally, a molybdenum (Mo) block was used to hold the substrate, and a material such as indium (In) was used to attach the wafer to the molybdenum block.
However, with the attachment method using In, it is difficult to attach large wafers, and after the growth is finished, it requires a process to dissolve the In on the back of the substrate with hydrochloric acid, etc., and a process to dissolve the In attached to the holder. However, it had the disadvantage of extremely poor work efficiency. On the other hand, some methods that do not use In have also been reported. As shown in FIG. 2, a method has been proposed in which a wafer 22 is placed on a support 21 and a presser plate 23 is screwed. This method has drawbacks such as straining the substrate crystal by directly holding the substrate, and the need to use large blocks because it requires space for screw fixing. In addition, due to the large number of parts, cleaning the block and fixing the board was time-consuming.

Further, as shown in FIG. 3, the method of fixing the fixing ring 25 for holding down the wafer 22 placed on the support 21 to the support 21 with a wire 24 also has the same drawbacks as described above. Furthermore, as shown in Figure 4,
The wafer 22 placed on the support 21 is fixed to the fixing ring 2.
A method of suppressing it with the claw 26 of 5 has also been proposed,
In this method, the claws are bent or extended to hold the wafer each time the wafer is attached or removed, so the claws undergo plastic deformation, making it difficult to reuse many times and having poor operability. .

(Means for solving the problem) The present invention uses adhesive metals such as the above-mentioned In,
The purpose of the present invention is to provide a substrate holding device with good operability by solving the inefficiency of work associated with methods such as using screws, wires, and rings with claws.

FIG. 1 shows a substrate holding device in a molecular beam epitaxial growth apparatus according to the present invention.
1 is a perspective view, and b is a sectional view taken along the line A-A of the main body 1 in FIG. In the figure, reference numeral 1 denotes a ring-shaped block body, and a flange portion 2 is formed on its upper part, the outer periphery of which protrudes from the periphery of the block body 1, and the inner periphery of which is the same as the inner periphery of the block body 1. Furthermore, on the top surface of this flange part, there is an inverted L with the tip facing inward.
Three letter-shaped ring engaging portions 3 are arranged at equal intervals. As a result, an engaging recess 3b is formed between the upper surface of the flange portion 2 and the lower surface of the inner protrusion 3a of the ring engaging portion 3. Reference numeral 4 denotes a substrate holding portion 4 formed on the inner wall of the block body 1, and a space for storing a substrate (not shown) is formed between the upper surface of this substrate holding portion 4 and the inner wall of the flange portion 2. be done.

Reference numeral 11 denotes a ring for supporting the substrate, which is made of a material having spring properties, and has openings 12 at both ends, and hook portions 11a and 11 that protrude outward from each end.
b is provided. In addition, there is a U projecting inwardly at a location corresponding to the ring engaging portion 3 of the block body 1.
A letter-shaped engagement claw 13 is formed. A recess 14 is formed on the outer periphery of the engaging pawl 13, and this recess engages with the recess 3b of the ring engaging portion 3 of the block body 1, as will be described later.

Next, the effect will be explained.

A substrate is placed between the flange portion 2 of the block body 1 and the substrate holding portion 4. Next, the tip of a ring attachment/detachment tool is inserted into the hole 15 of the substrate support ring, and the ring 11 is contracted inward. Next, insert the recess 13a of the engagement claw 13 of this ring into the block body 1.
so as to engage with the recess 3b of the ring engaging portion 3,
When the board support ring is inserted into the block body 1 and the ring attachment/detachment tool is removed from the ring, the ring expands outward due to its own elastic force, and the engagement claw 13 completely engages with the ring engagement part of the block body 1. do. In this case, the board is held by the engaging claws 13 of the ring.

Further, the depth of the substrate holding portion 4 is adjusted so as to maintain a slight gap between the engaging claw 13 and the substrate (not shown). Therefore, no stress is applied to the substrate.

Further, 4a is a protrusion that protrudes inward from the stepped substrate holding portion formed on the inner wall of the block, and this portion faces the linear portion of the peripheral edge of the substrate formed in advance, so that the substrate is relatively It does not rotate relative to the block.

When removing the board from the block body, insert the tip of a ring attachment/detachment tool into the hole 15 of the ring, contract the ring 11 inward, remove the ring 11 from the block body 1, and remove the board from the block body. With this structure, the substrate can be attached and detached much more quickly than with conventional holding methods. In addition, since it does not involve plastic deformation, the device of this invention can be used semi-permanently.
In addition, since the number of parts is small, cleaning etc. can be performed quickly. In this embodiment, Mo was used for the block body and the substrate holding ring, but the same effect can be obtained by using other high melting point metals such as tungsten.

(Effect of idea) Since the present invention is structured as described above, (a) Boards can be quickly attached and detached.

(b) It has a small number of parts and can be used semi-permanently.

(c) Since unnecessary stress is not applied to the attached board, the board will not deteriorate.

It has the following effects.

According to the present invention, the ring engagement portion provided on the block body is placed outside the path of the incident electron beam and the diffracted electron beam during electron beam diffraction, thereby facilitating observation of the substrate surface using the electron beam. I can do that.

[Brief explanation of drawings]

FIG. 1 shows a substrate holding device of the present invention, and FIGS. 2 to 4 show conventional substrate holding devices. 1...Block body, 2...Flange part, 3...
...Ring engaging portion, 3b...Concave portion, 4...Substrate holding portion, 11...Substrate support ring, 12...Opening,
13... Engaging claw, 14... Recess, 15... Hole.

Claims (1)

[Scope of utility model registration request] The block body is equipped with a ring-shaped block body and a ring for holding a substrate with elasticity that can be freely closed, and a flange portion for placing a wafer is provided on the upper part of the ring-shaped body of the block body, and To,
A plurality of inverted L-shaped ring engaging portions are formed with tips facing inward, and a substrate holding portion for supporting the substrate is provided on the inner wall of the block body, and the substrate holding ring has an opening. A substrate holding device for a molecular beam epitaxial growth apparatus, characterized in that a U-shaped engagement claw protruding toward the inner circumference is formed at a location corresponding to the ring holding portion of the block main body.