JPH0325124Y2 - - Google Patents

Info

Publication number
JPH0325124Y2
JPH0325124Y2 JP16872685U JP16872685U JPH0325124Y2 JP H0325124 Y2 JPH0325124 Y2 JP H0325124Y2 JP 16872685 U JP16872685 U JP 16872685U JP 16872685 U JP16872685 U JP 16872685U JP H0325124 Y2 JPH0325124 Y2 JP H0325124Y2
Authority
JP
Japan
Prior art keywords
image sensor
inspected
shadow
cross
sectional shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16872685U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6276609U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16872685U priority Critical patent/JPH0325124Y2/ja
Publication of JPS6276609U publication Critical patent/JPS6276609U/ja
Application granted granted Critical
Publication of JPH0325124Y2 publication Critical patent/JPH0325124Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP16872685U 1985-10-31 1985-10-31 Expired JPH0325124Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16872685U JPH0325124Y2 (enExample) 1985-10-31 1985-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16872685U JPH0325124Y2 (enExample) 1985-10-31 1985-10-31

Publications (2)

Publication Number Publication Date
JPS6276609U JPS6276609U (enExample) 1987-05-16
JPH0325124Y2 true JPH0325124Y2 (enExample) 1991-05-31

Family

ID=31101868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16872685U Expired JPH0325124Y2 (enExample) 1985-10-31 1985-10-31

Country Status (1)

Country Link
JP (1) JPH0325124Y2 (enExample)

Also Published As

Publication number Publication date
JPS6276609U (enExample) 1987-05-16

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