JPH03250650A - Heat sink for semiconductor device - Google Patents

Heat sink for semiconductor device

Info

Publication number
JPH03250650A
JPH03250650A JP4545290A JP4545290A JPH03250650A JP H03250650 A JPH03250650 A JP H03250650A JP 4545290 A JP4545290 A JP 4545290A JP 4545290 A JP4545290 A JP 4545290A JP H03250650 A JPH03250650 A JP H03250650A
Authority
JP
Japan
Prior art keywords
resin
header
heat sink
tip
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4545290A
Other languages
Japanese (ja)
Inventor
Yukihiro Sato
幸弘 佐藤
Kazuo Shimizu
一男 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Eastern Japan Semiconductor Inc
Original Assignee
Hitachi Ltd
Hitachi Tohbu Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Tohbu Semiconductor Ltd filed Critical Hitachi Ltd
Priority to JP4545290A priority Critical patent/JPH03250650A/en
Publication of JPH03250650A publication Critical patent/JPH03250650A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the adherence property between resin and a heat sink and moisture protection and to prevent the generation of resin burr on the back side of a header which obstructs lowering temperature resistance by installing a collar provided at the tip within a resin mold region on the top of the heat sink. CONSTITUTION:A semiconductor chip 7 is installed to a thick board header (in radiation shape). After each electrode of the chip is bonded with inner leads 2a, the header is partially molded with resin in such a manner that the semiconductor chip and the inner leads are enclosed. The tip of the header in a resin mold region (in chain line 8) is squeezed so as to provide 'collar', thereby producing a projection part 9. The projection part serves to enhance the bonding property between the resin and the header to a satisfactory extent.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は樹脂封止半導体装置における 造パッケージの放熱板に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to resin-sealed semiconductor devices. This invention relates to a heat sink for a manufactured package.

2枚板構 〔従来の技術] 半導体素子を取り付けるための放熱板(金属厚板ヘッダ
)とリード等の被固定部材(リードフレーム)とを組合
わせる2枚板構造の樹脂封止半導体パッケージについて
は、特開昭57−155755公報に記載のように放熱
板(ヘッダ)とリードフレームとをヘッダの突部により
かしめ固定するためにエンボス加工技術が用いられてい
る。
Two-Plate Structure [Prior Art] Regarding a resin-sealed semiconductor package with a two-plate structure that combines a heat dissipation plate (thick metal plate header) for attaching a semiconductor element and a member to be fixed such as a lead (lead frame), As described in Japanese Unexamined Patent Publication No. 57-155755, an embossing technique is used to caulk and fix a heat dissipation plate (header) and a lead frame using the protrusions of the header.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

樹脂封止半導体パッケージでは、素子の取りつけられた
放熱板とそれを覆う樹脂(レジン)との間の密着性が必
ずしも充分でなく、両者の間で剥離現象が生じ、その隙
間から水等が侵入して内部の半導体素子を腐食や劣化な
どの影響を与える問題があった。前記した従来の技術で
は、樹脂とヘッダとの密着性や、レジンモールド硬化時
の収縮によるヘッダとレジンとの剥離を防止する手段と
して放熱板の樹脂モールド領域内に穴(X3孔)をあけ
てそこに樹脂の一部が埋め込まれるようにしていた。
In resin-sealed semiconductor packages, the adhesion between the heat sink on which the elements are attached and the resin that covers it is not always sufficient, and peeling occurs between the two, allowing water etc. to enter through the gap. There was a problem in that the internal semiconductor elements were affected by corrosion and deterioration. In the conventional technology described above, holes (X3 holes) are made in the resin mold area of the heat sink as a means to improve the adhesion between the resin and the header and to prevent the header from peeling off from the resin due to shrinkage when the resin mold hardens. A portion of the resin was embedded there.

しかし、放熱板に孔をあけた場合凹凸の生したヘッダ裏
面にレジンハリ等が発生しやすく、そのために動作時の
熱抵抗に悪影響を与えることになる。
However, when holes are made in the heat sink, resin bulges are likely to occur on the uneven back surface of the header, which adversely affects thermal resistance during operation.

又、このレジンバリを取り除くための余分な作業が必要
となった。
Additionally, extra work was required to remove this resin burr.

本発明は上記した問題を解消するためになされたもので
あり、その目的は、2枚板構造の樹脂封止パッケージに
おいて、樹脂と放熱板との密着性を向上させて耐湿性を
向上するとともに低熱抵抗化の妨げなるヘッダ裏面のレ
ジンバリを生しない構造を提供することになる、 〔課題を解決するための手段〕 上記目的を達成するノこめに、本発明は半導体素子が取
り付けられる放熱板と、リード等の被固定部材とから成
る2枚板構造の樹脂封止パッケージにおいて、上記放熱
板上面の樹脂モールド領域内に先端につば部を有するも
のである。
The present invention has been made to solve the above-mentioned problems, and its purpose is to improve moisture resistance by improving the adhesion between the resin and the heat sink in a resin-sealed package with a two-plate structure. [Means for Solving the Problems] In order to achieve the above object, the present invention provides a structure that does not produce resin burrs on the back side of the header, which hinders reduction in thermal resistance. , and a member to be fixed, such as a lead, in a resin-sealed package having a two-plate structure, which has a flange at the tip within a resin molded area on the upper surface of the heat sink.

本発明はまた、上記パッケージの放熱板Gこおいて、突
出部をエンボス加工並びにつぶし加工により形成するも
のである。
The present invention also provides that the protrusion is formed on the heat sink G of the package by embossing and crushing.

〔作用〕[Effect]

放熱板表面の樹脂モールド領域にエンボス加工を施して
突出部を設け、かつ先端をつふして傘状の形状とするこ
とにより、モールド後の樹脂と放熱板表面との密着性を
より大きくし、そのことにより樹脂の硬化収縮による樹
脂と放熱板の剥離を防止できる。特に、放熱板をビス止
めで配線基板へ実装する際の応力による剥離を有効に防
止することができる。
The resin mold area on the surface of the heat sink is embossed to provide a protrusion, and the tip is closed to create an umbrella-like shape, thereby increasing the adhesion between the resin and the surface of the heat sink after molding. This can prevent the resin from peeling off from the heat sink due to curing shrinkage of the resin. In particular, it is possible to effectively prevent peeling due to stress when the heat sink is mounted on a wiring board with screws.

〔実施例〕〔Example〕

以下、本発明の一実施例を図面を参照しながら説明する
An embodiment of the present invention will be described below with reference to the drawings.

第1図は2枚板構造の半導体パッケージの1ユニット分
のヘッダとリードフレームとを組合せた構造の平面図で
ある。
FIG. 1 is a plan view of a structure in which a header and a lead frame for one unit of a two-plate semiconductor package are combined.

1は厚板ヘッダ(放熱板)であって、その中央に半導体
チップ(7)搭載部が設けられている。
1 is a thick plate header (heat sink), and a semiconductor chip (7) mounting portion is provided in the center thereof.

2ばリード群であって、各々のリードはインナリ−1−
2aとアラクーリート2bとからなり、複数個のリード
をこれらと交差するダム3および周辺を取り囲むフレー
ム4と一体に連結してソー1′フレーム5を構成する。
2B lead group, each lead is inner-1-
A saw 1' frame 5 is constructed by integrally connecting a plurality of leads with a dam 3 intersecting these leads and a frame 4 surrounding the periphery.

このリードフレームは厚板ヘッダ1の両側(樹脂モール
ド領域外)の突部6でエンボス形成とがしめるこより固
定されて2枚板構造の半導体パッケージ基板となる。
This lead frame is fixed by embossing and tightening with protrusions 6 on both sides (outside the resin mold area) of the thick plate header 1, thereby forming a semiconductor package substrate having a two-plate structure.

上記ヘッダに半導体チップ′7が搭載され、チップの各
電極とインナーリード2aとの間のボンディングがなさ
れた後、半導体チップとインナーリードを包囲するよう
にヘッダの一部を樹脂体でモールドされる。
After the semiconductor chip '7 is mounted on the header and bonding is performed between each electrode of the chip and the inner lead 2a, a part of the header is molded with a resin body so as to surround the semiconductor chip and the inner lead. .

この発明ではヘッダの樹脂モールド領域(鎖線8)内に
は先端につぶし加工を施し「っば」をもたせた突出部9
が設けてあり、この突出部により樹脂とへ、・7ダとの
結合性が高められる。
In this invention, within the resin molded area (dashed line 8) of the header, there is a protrusion 9 whose tip is crushed and has a "bubble" shape.
is provided, and this protrusion improves the bondability between the resin and the resin.

第2図は上記エンボスつぶし突出部9を拡大したもので
あり、(a)は平面図、(b)は断面図である。
FIG. 2 shows an enlarged view of the emboss crushing protrusion 9, with (a) being a plan view and (b) being a sectional view.

(b)で示すように、ヘッダ下面側からエンボス加工し
傘状部10を形成しである。
As shown in (b), the umbrella-shaped portion 10 is formed by embossing from the lower surface side of the header.

厚板ヘッダ1と樹脂モールド体8の密着シロが−・ソダ
の周辺のみの従来構造では、ヘッダのビス穴(11)部
側がオープンの状態であり、組立時のモールド工程でレ
ジン(樹脂)の硬化収縮によるヘッダ面と樹脂との間に
隙間等が発生しやすくさらに完成後の配線基板への実装
のためのビス止めを行う際にヘッダビス穴部に大きな応
力がかかり、ヘッダと樹脂との間の剥離発生の可能性が
ある。しかし、本発明ではヘッダの樹脂モールド領域で
ビス大側に近い部分にエンボス加工を施し、その突起部
9をつぶして傘状部10を設けることにより、樹脂の硬
化収縮時の応力を抑え、なおかつ、樹脂との密着性をよ
り向上させるに有効である。
In the conventional structure in which the thick plate header 1 and the resin molded body 8 are in close contact with each other only around the soda, the screw hole (11) side of the header is open, and the resin is removed during the molding process during assembly. A gap is likely to occur between the header surface and the resin due to curing shrinkage, and when screwing is done for mounting on a completed wiring board, a large stress is applied to the header screw hole, causing a gap between the header and the resin. Peeling may occur. However, in the present invention, the resin molded area of the header is embossed on the part near the large screw side, and the protrusion 9 is crushed to provide an umbrella-shaped part 10, thereby suppressing stress when the resin hardens and shrinks. , is effective in further improving adhesion with resin.

第3図は他の実施例を示すものであって、エンボス加工
によらず、ヘッダにあけた穴に他の部品たとえば傘状部
付きの「びょう(リベット)J12等の突起物を打込ん
だことにより、エンボスつぶし加工の場合と同等の効果
をもたせた例である。
Fig. 3 shows another embodiment in which other parts such as rivets J12 with umbrella-shaped parts are driven into the holes drilled in the header instead of embossing. This is an example in which the same effect as embossing was achieved.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、従来のヘッダとリードフレームの結合
のためのエンボス加工工程をそのまま利用し、ヘッダの
樹脂モールド領域内の一部に突出部を設け、その先端を
つぶすだけの簡単な構造であることにより、ヘッダ製作
用プレス金型による−1ラインで製作することができる
According to the present invention, the conventional embossing process for joining the header and lead frame can be used as is, and the structure is as simple as providing a protrusion in a part of the resin molded area of the header and crushing the tip of the protrusion. As a result, the header can be manufactured in one line using a press mold for manufacturing the header.

この突出部は傘部を設けにことで樹脂との密着性が保た
れ、直接組立工程に影響の出る部分がないために、加工
上の精密さ等を要求する厳しい規格が不要で製作上容易
である。
This protruding part maintains adhesion with the resin by providing an umbrella part, and since there is no part that directly affects the assembly process, there is no need for strict standards that require processing precision, etc., making it easy to manufacture. It is.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示すもので、2枚板構造の
樹脂封止パッケージの平面図である。 第2図は第1図におけるエンボスつふし突出部は縦断面
図である。 第3図は本発明の他の実施例を示し、リヘ・ノド打込み
による突出部の拡大縦断面図である。 1・・・厚板ヘッダ(放熱板)、 2・・・リード、3
・・・ダム、  4・・・フレーム、5・・・リードフ
レーム6・・・ヘッダとフレームをつなく突出部、7・
・・半導体チップ、 訃・・樹脂モールド領域、9・・
・エンボスつぶし突起部、 10・・・傘状部、11・
・・ビス穴、  12・・・リベット。
FIG. 1 shows one embodiment of the present invention, and is a plan view of a resin-sealed package having a two-plate structure. FIG. 2 is a longitudinal sectional view of the embossed brim protrusion in FIG. 1. FIG. 3 shows another embodiment of the present invention, and is an enlarged longitudinal cross-sectional view of a protrusion formed by re-grooving. 1... Thick plate header (heat sink), 2... Lead, 3
...Dam, 4.Frame, 5.Lead frame 6..Protrusion connecting header and frame, 7.
・・Semiconductor chip, ・・Resin mold area, 9・・
・Emboss crushing protrusion, 10... Umbrella-shaped portion, 11・
...Screw hole, 12...Rivet.

Claims (1)

【特許請求の範囲】 1、半導体素子が取り付けられる放熱板とリード等の被
固定部材とから成る2枚板構造の樹脂封止パッケージに
おいて、上記放熱板上面の樹脂モールド領域内に先端に
つば部を有することを特徴とする半導体装置の放熱板。 2、請求項1に記載の半導体装置の放熱板において、上
記突出部はヘッダのビス穴部位に近い側に設ける。 3、請求項1または2に記載の半導体装置の放熱板にお
いて、突出部はエンボス加工部の先端につぶし加工を施
したものである。
[Scope of Claims] 1. In a resin-sealed package with a two-plate structure consisting of a heat sink to which a semiconductor element is attached and a member to be fixed such as a lead, a flange is provided at the tip within the resin molded area on the upper surface of the heat sink. A heat dissipation plate for a semiconductor device, comprising: 2. In the heat dissipation plate for a semiconductor device according to claim 1, the protruding portion is provided on a side closer to a screw hole portion of the header. 3. In the heat dissipation plate for a semiconductor device according to claim 1 or 2, the protruding portion is formed by crushing the tip of the embossed portion.
JP4545290A 1990-02-28 1990-02-28 Heat sink for semiconductor device Pending JPH03250650A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4545290A JPH03250650A (en) 1990-02-28 1990-02-28 Heat sink for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4545290A JPH03250650A (en) 1990-02-28 1990-02-28 Heat sink for semiconductor device

Publications (1)

Publication Number Publication Date
JPH03250650A true JPH03250650A (en) 1991-11-08

Family

ID=12719739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4545290A Pending JPH03250650A (en) 1990-02-28 1990-02-28 Heat sink for semiconductor device

Country Status (1)

Country Link
JP (1) JPH03250650A (en)

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