JPH0324781B2 - - Google Patents

Info

Publication number
JPH0324781B2
JPH0324781B2 JP56167880A JP16788081A JPH0324781B2 JP H0324781 B2 JPH0324781 B2 JP H0324781B2 JP 56167880 A JP56167880 A JP 56167880A JP 16788081 A JP16788081 A JP 16788081A JP H0324781 B2 JPH0324781 B2 JP H0324781B2
Authority
JP
Japan
Prior art keywords
thyristor
layer
semiconductor
layers
annealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56167880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5870571A (ja
Inventor
Minoru Azuma
Masayuki Asaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56167880A priority Critical patent/JPS5870571A/ja
Publication of JPS5870571A publication Critical patent/JPS5870571A/ja
Publication of JPH0324781B2 publication Critical patent/JPH0324781B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00—Thyristors
    • H10D18/60—Gate-turn-off devices 

Landscapes

  • Thyristors (AREA)
JP56167880A 1981-10-22 1981-10-22 サイリスタの製造方法 Granted JPS5870571A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56167880A JPS5870571A (ja) 1981-10-22 1981-10-22 サイリスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56167880A JPS5870571A (ja) 1981-10-22 1981-10-22 サイリスタの製造方法

Publications (2)

Publication Number Publication Date
JPS5870571A JPS5870571A (ja) 1983-04-27
JPH0324781B2 true JPH0324781B2 (enExample) 1991-04-04

Family

ID=15857789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56167880A Granted JPS5870571A (ja) 1981-10-22 1981-10-22 サイリスタの製造方法

Country Status (1)

Country Link
JP (1) JPS5870571A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2558643B2 (ja) * 1986-08-12 1996-11-27 松下電子工業株式会社 半導体装置の製造方法
DE10150640B4 (de) * 2001-10-12 2005-02-10 eupec Europäische Gesellschaft für Leistungshalbleiter mbH & Co. KG Thyristor mit integriertem Überkopfzündschutz und Verfahren zu seiner Herstellung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517493B2 (enExample) * 1974-03-09 1980-05-12
JPS6019150B2 (ja) * 1979-10-05 1985-05-14 株式会社日立製作所 半導体装置の製造方法
JPS56107562A (en) * 1980-01-31 1981-08-26 Toshiba Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5870571A (ja) 1983-04-27

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