JPS5870571A - サイリスタの製造方法 - Google Patents

サイリスタの製造方法

Info

Publication number
JPS5870571A
JPS5870571A JP56167880A JP16788081A JPS5870571A JP S5870571 A JPS5870571 A JP S5870571A JP 56167880 A JP56167880 A JP 56167880A JP 16788081 A JP16788081 A JP 16788081A JP S5870571 A JPS5870571 A JP S5870571A
Authority
JP
Japan
Prior art keywords
layer
thyristor
gate electrode
cathode
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56167880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0324781B2 (enExample
Inventor
Minoru Azuma
東　実
Masayuki Asaka
浅香　正行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56167880A priority Critical patent/JPS5870571A/ja
Publication of JPS5870571A publication Critical patent/JPS5870571A/ja
Publication of JPH0324781B2 publication Critical patent/JPH0324781B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00—Thyristors
    • H10D18/60—Gate-turn-off devices 

Landscapes

  • Thyristors (AREA)
JP56167880A 1981-10-22 1981-10-22 サイリスタの製造方法 Granted JPS5870571A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56167880A JPS5870571A (ja) 1981-10-22 1981-10-22 サイリスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56167880A JPS5870571A (ja) 1981-10-22 1981-10-22 サイリスタの製造方法

Publications (2)

Publication Number Publication Date
JPS5870571A true JPS5870571A (ja) 1983-04-27
JPH0324781B2 JPH0324781B2 (enExample) 1991-04-04

Family

ID=15857789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56167880A Granted JPS5870571A (ja) 1981-10-22 1981-10-22 サイリスタの製造方法

Country Status (1)

Country Link
JP (1) JPS5870571A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6344731A (ja) * 1986-08-12 1988-02-25 Matsushita Electronics Corp 半導体装置の製造方法
DE10150640A1 (de) * 2001-10-12 2003-04-30 Eupec Gmbh & Co Kg Thyristor mit integriertem Überkopfzündschutz

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120982A (enExample) * 1974-03-09 1975-09-22
JPS5651867A (en) * 1979-10-05 1981-05-09 Hitachi Ltd Manufacturing of semiconductor
JPS56107562A (en) * 1980-01-31 1981-08-26 Toshiba Corp Manufacture of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120982A (enExample) * 1974-03-09 1975-09-22
JPS5651867A (en) * 1979-10-05 1981-05-09 Hitachi Ltd Manufacturing of semiconductor
JPS56107562A (en) * 1980-01-31 1981-08-26 Toshiba Corp Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6344731A (ja) * 1986-08-12 1988-02-25 Matsushita Electronics Corp 半導体装置の製造方法
DE10150640A1 (de) * 2001-10-12 2003-04-30 Eupec Gmbh & Co Kg Thyristor mit integriertem Überkopfzündschutz
DE10150640B4 (de) * 2001-10-12 2005-02-10 eupec Europäische Gesellschaft für Leistungshalbleiter mbH & Co. KG Thyristor mit integriertem Überkopfzündschutz und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
JPH0324781B2 (enExample) 1991-04-04

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