JPH0324775B2 - - Google Patents

Info

Publication number
JPH0324775B2
JPH0324775B2 JP59005432A JP543284A JPH0324775B2 JP H0324775 B2 JPH0324775 B2 JP H0324775B2 JP 59005432 A JP59005432 A JP 59005432A JP 543284 A JP543284 A JP 543284A JP H0324775 B2 JPH0324775 B2 JP H0324775B2
Authority
JP
Japan
Prior art keywords
silane
gas
cylinder
clusters
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59005432A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59210639A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP59005432A priority Critical patent/JPS59210639A/ja
Publication of JPS59210639A publication Critical patent/JPS59210639A/ja
Publication of JPH0324775B2 publication Critical patent/JPH0324775B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/24—
    • H10P14/3411—

Landscapes

  • Silicon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
JP59005432A 1984-01-16 1984-01-16 反応性気体が充填された高圧容器 Granted JPS59210639A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59005432A JPS59210639A (ja) 1984-01-16 1984-01-16 反応性気体が充填された高圧容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59005432A JPS59210639A (ja) 1984-01-16 1984-01-16 反応性気体が充填された高圧容器

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55129641A Division JPS6024180B2 (ja) 1980-09-18 1980-09-18 被膜作製方法

Publications (2)

Publication Number Publication Date
JPS59210639A JPS59210639A (ja) 1984-11-29
JPH0324775B2 true JPH0324775B2 (en:Method) 1991-04-04

Family

ID=11611026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59005432A Granted JPS59210639A (ja) 1984-01-16 1984-01-16 反応性気体が充填された高圧容器

Country Status (1)

Country Link
JP (1) JPS59210639A (en:Method)

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PHILOS MAG *

Also Published As

Publication number Publication date
JPS59210639A (ja) 1984-11-29

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