JPH0324445Y2 - - Google Patents
Info
- Publication number
- JPH0324445Y2 JPH0324445Y2 JP10024284U JP10024284U JPH0324445Y2 JP H0324445 Y2 JPH0324445 Y2 JP H0324445Y2 JP 10024284 U JP10024284 U JP 10024284U JP 10024284 U JP10024284 U JP 10024284U JP H0324445 Y2 JPH0324445 Y2 JP H0324445Y2
- Authority
- JP
- Japan
- Prior art keywords
- groove
- cart
- guided
- floor
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000003213 activating effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
- Current-Collector Devices For Electrically Propelled Vehicles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10024284U JPS6115670U (ja) | 1984-07-02 | 1984-07-02 | クリ−ンル−ム内の搬送設備 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10024284U JPS6115670U (ja) | 1984-07-02 | 1984-07-02 | クリ−ンル−ム内の搬送設備 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6115670U JPS6115670U (ja) | 1986-01-29 |
| JPH0324445Y2 true JPH0324445Y2 (h) | 1991-05-28 |
Family
ID=30659708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10024284U Granted JPS6115670U (ja) | 1984-07-02 | 1984-07-02 | クリ−ンル−ム内の搬送設備 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6115670U (h) |
-
1984
- 1984-07-02 JP JP10024284U patent/JPS6115670U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6115670U (ja) | 1986-01-29 |
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