JPH0324016B2 - - Google Patents

Info

Publication number
JPH0324016B2
JPH0324016B2 JP61289156A JP28915686A JPH0324016B2 JP H0324016 B2 JPH0324016 B2 JP H0324016B2 JP 61289156 A JP61289156 A JP 61289156A JP 28915686 A JP28915686 A JP 28915686A JP H0324016 B2 JPH0324016 B2 JP H0324016B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
detection probe
positioning
electrode
dimensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61289156A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63141380A (ja
Inventor
Hiroshi Tokumoto
Hiroshi Bando
Fumiki Sakai
Shigeru Wakyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Seiko Epson Corp filed Critical Agency of Industrial Science and Technology
Priority to JP61289156A priority Critical patent/JPS63141380A/ja
Publication of JPS63141380A publication Critical patent/JPS63141380A/ja
Publication of JPH0324016B2 publication Critical patent/JPH0324016B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Position Or Direction (AREA)
JP61289156A 1986-12-04 1986-12-04 圧電素子体微動機構 Granted JPS63141380A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61289156A JPS63141380A (ja) 1986-12-04 1986-12-04 圧電素子体微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61289156A JPS63141380A (ja) 1986-12-04 1986-12-04 圧電素子体微動機構

Publications (2)

Publication Number Publication Date
JPS63141380A JPS63141380A (ja) 1988-06-13
JPH0324016B2 true JPH0324016B2 (enrdf_load_stackoverflow) 1991-04-02

Family

ID=17739488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61289156A Granted JPS63141380A (ja) 1986-12-04 1986-12-04 圧電素子体微動機構

Country Status (1)

Country Link
JP (1) JPS63141380A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105388A (ja) * 1982-12-09 1984-06-18 Matsushita Electric Ind Co Ltd 電気―機械変換素子の駆動装置

Also Published As

Publication number Publication date
JPS63141380A (ja) 1988-06-13

Similar Documents

Publication Publication Date Title
US5861549A (en) Integrated Silicon profilometer and AFM head
EP0864181B1 (en) Flat scanning stage for scanned probe microscopy
JPH0212381B2 (enrdf_load_stackoverflow)
JP2534442B2 (ja) 二重たわみ部材キャリッジ及び二重たわみ部材組立体
EP0868648B1 (en) Integrated silicon profilometer and afm head
Bergander et al. Micropositioners for microscopy applications based on the stick-slip effect
JPH0324016B2 (enrdf_load_stackoverflow)
US4859896A (en) Piezoelectric precision positioning device
JP2639548B2 (ja) 圧電アクチュエータ
JP2839526B2 (ja) 静電形アクチュエータ
JPH06258072A (ja) 圧電体薄膜評価装置、原子間力顕微鏡
JPH01287403A (ja) 走査型トンネル顕微鏡
JP3369892B2 (ja) 微小位置決め装置用の位置決め器
JP2651462B2 (ja) 圧電アクチュエータ
JP3060527B2 (ja) 位置決め装置
JP2642636B2 (ja) プローブユニットの駆動機構およびその駆動方法
JP2631297B2 (ja) 圧電アクチュエーター
JPS63153405A (ja) 走査型トンネル顕微鏡
JPH01187402A (ja) 走査トンネル顕微鏡
JPH0743604Y2 (ja) 圧電素子微小位置決め機構
JPH088405Y2 (ja) 圧電素子微小位置決め機構
JP2004284000A (ja) 真直度制御ステージ
JPH0526661A (ja) 位置決め装置
JPH06288760A (ja) 微動ステージ装置
JPH0244787A (ja) 圧電素子微小位置決め機構

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term