JPS63141380A - 圧電素子体微動機構 - Google Patents

圧電素子体微動機構

Info

Publication number
JPS63141380A
JPS63141380A JP61289156A JP28915686A JPS63141380A JP S63141380 A JPS63141380 A JP S63141380A JP 61289156 A JP61289156 A JP 61289156A JP 28915686 A JP28915686 A JP 28915686A JP S63141380 A JPS63141380 A JP S63141380A
Authority
JP
Japan
Prior art keywords
detection probe
piezoelectric element
probe holder
axis
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61289156A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0324016B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Tokumoto
洋志 徳本
Hiroshi Bando
寛 阪東
Fumiki Sakai
坂井　文樹
Shigeru Wakiyama
茂 脇山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Seiko Instruments Inc filed Critical Agency of Industrial Science and Technology
Priority to JP61289156A priority Critical patent/JPS63141380A/ja
Publication of JPS63141380A publication Critical patent/JPS63141380A/ja
Publication of JPH0324016B2 publication Critical patent/JPH0324016B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Control Of Position Or Direction (AREA)
JP61289156A 1986-12-04 1986-12-04 圧電素子体微動機構 Granted JPS63141380A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61289156A JPS63141380A (ja) 1986-12-04 1986-12-04 圧電素子体微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61289156A JPS63141380A (ja) 1986-12-04 1986-12-04 圧電素子体微動機構

Publications (2)

Publication Number Publication Date
JPS63141380A true JPS63141380A (ja) 1988-06-13
JPH0324016B2 JPH0324016B2 (enrdf_load_stackoverflow) 1991-04-02

Family

ID=17739488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61289156A Granted JPS63141380A (ja) 1986-12-04 1986-12-04 圧電素子体微動機構

Country Status (1)

Country Link
JP (1) JPS63141380A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105388A (ja) * 1982-12-09 1984-06-18 Matsushita Electric Ind Co Ltd 電気―機械変換素子の駆動装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105388A (ja) * 1982-12-09 1984-06-18 Matsushita Electric Ind Co Ltd 電気―機械変換素子の駆動装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor

Also Published As

Publication number Publication date
JPH0324016B2 (enrdf_load_stackoverflow) 1991-04-02

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