JPH032241B2 - - Google Patents
Info
- Publication number
- JPH032241B2 JPH032241B2 JP10813883A JP10813883A JPH032241B2 JP H032241 B2 JPH032241 B2 JP H032241B2 JP 10813883 A JP10813883 A JP 10813883A JP 10813883 A JP10813883 A JP 10813883A JP H032241 B2 JPH032241 B2 JP H032241B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- scanning surface
- optical scanning
- angle
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Navigation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10813883A JPS60307A (ja) | 1983-06-16 | 1983-06-16 | 傾斜角計測システム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10813883A JPS60307A (ja) | 1983-06-16 | 1983-06-16 | 傾斜角計測システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60307A JPS60307A (ja) | 1985-01-05 |
JPH032241B2 true JPH032241B2 (enrdf_load_stackoverflow) | 1991-01-14 |
Family
ID=14476895
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10813883A Granted JPS60307A (ja) | 1983-06-16 | 1983-06-16 | 傾斜角計測システム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60307A (enrdf_load_stackoverflow) |
-
1983
- 1983-06-16 JP JP10813883A patent/JPS60307A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60307A (ja) | 1985-01-05 |
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