JPH0322186Y2 - - Google Patents
Info
- Publication number
- JPH0322186Y2 JPH0322186Y2 JP1985030764U JP3076485U JPH0322186Y2 JP H0322186 Y2 JPH0322186 Y2 JP H0322186Y2 JP 1985030764 U JP1985030764 U JP 1985030764U JP 3076485 U JP3076485 U JP 3076485U JP H0322186 Y2 JPH0322186 Y2 JP H0322186Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- sample
- wafer cassette
- pedestal
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985030764U JPH0322186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-03-06 | 1985-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985030764U JPH0322186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-03-06 | 1985-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61148838U JPS61148838U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-13 |
| JPH0322186Y2 true JPH0322186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-15 |
Family
ID=30530751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985030764U Expired JPH0322186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-03-06 | 1985-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58180634U (ja) * | 1982-05-24 | 1983-12-02 | 大日本スクリ−ン製造株式会社 | ウエハカセツトの位置決め検知装置 |
| JPS5982242A (ja) * | 1982-11-01 | 1984-05-12 | Shinkawa Ltd | マガジン交換装置 |
-
1985
- 1985-03-06 JP JP1985030764U patent/JPH0322186Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61148838U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7748760B2 (en) | Work holding mechanism | |
| US5970621A (en) | Semiconductor wafer cassette positioning and detection mechanism | |
| US4535887A (en) | IC Package carrier | |
| KR100279955B1 (ko) | 반도체웨이퍼를 직접 적재 및 하역할 수 있는 반도체 웨이퍼 카세트 장치와 웨이퍼지지 및 이송시스템 | |
| US6060721A (en) | Apparatus for detecting correct positioning of a wafer cassette | |
| JP2005531465A (ja) | 電子部品用のキャリアテープ | |
| US4678255A (en) | Chip connector | |
| JPH0322186Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| WO2003003418A2 (en) | Locator pin integrated with sensor for detecting semiconductor substrate carrier | |
| US6371785B1 (en) | ZIF socket with improved lever mechanism | |
| US5431579A (en) | Socket for IC package | |
| EP1059649B1 (en) | Multi-directional switch having a plurality of manual switches | |
| US5929766A (en) | Device for controlling semiconductor wafer transport cassettes | |
| US4996436A (en) | Automatic apparatus for controlling the size of wafer-supporting boats | |
| JP2010098198A (ja) | 基板収容容器およびその位置決め構造 | |
| GB2263825A (en) | A chip carrier socket | |
| JP4024333B2 (ja) | 薄板支持器 | |
| US6244422B1 (en) | Apparatus for sensing and controlling tipping movement of a semiconductor boat | |
| JPS59163512A (ja) | Ｘ−ｙ方向入力装置の組立方法 | |
| JPH0869848A (ja) | Ｉｃソケット | |
| JPH11116049A (ja) | 基板搬送方法及び基板搬送装置 | |
| KR200491813Y1 (ko) | 포스비 위치 보정 장치 | |
| JPH0713222Y2 (ja) | ウエハカセットの位置決め検知装置 | |
| JPH02148752A (ja) | シリコンウエハーの自動搬送装置用吸着ハンド | |
| JPH04107841A (ja) | 半導体ウェハー搬送装置および搬送方法 |