JPH0321894Y2 - - Google Patents

Info

Publication number
JPH0321894Y2
JPH0321894Y2 JP1986041548U JP4154886U JPH0321894Y2 JP H0321894 Y2 JPH0321894 Y2 JP H0321894Y2 JP 1986041548 U JP1986041548 U JP 1986041548U JP 4154886 U JP4154886 U JP 4154886U JP H0321894 Y2 JPH0321894 Y2 JP H0321894Y2
Authority
JP
Japan
Prior art keywords
polishing
adhesive
adhesive layer
polishing pad
ether
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986041548U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62153047U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986041548U priority Critical patent/JPH0321894Y2/ja
Publication of JPS62153047U publication Critical patent/JPS62153047U/ja
Application granted granted Critical
Publication of JPH0321894Y2 publication Critical patent/JPH0321894Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Adhesive Tapes (AREA)
JP1986041548U 1986-03-19 1986-03-19 Expired JPH0321894Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986041548U JPH0321894Y2 (enEXAMPLES) 1986-03-19 1986-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986041548U JPH0321894Y2 (enEXAMPLES) 1986-03-19 1986-03-19

Publications (2)

Publication Number Publication Date
JPS62153047U JPS62153047U (enEXAMPLES) 1987-09-28
JPH0321894Y2 true JPH0321894Y2 (enEXAMPLES) 1991-05-13

Family

ID=30856651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986041548U Expired JPH0321894Y2 (enEXAMPLES) 1986-03-19 1986-03-19

Country Status (1)

Country Link
JP (1) JPH0321894Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0731956Y2 (ja) * 1988-06-21 1995-07-26 千代田株式会社 研摩パツド

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117692A (en) * 1976-03-30 1977-10-03 Agency Of Ind Science & Technol Preparation of sample with polished surface
JPS6121174A (ja) * 1984-07-09 1986-01-29 Sekisui Chem Co Ltd 表面保護用粘着テ−プもしくはシ−ト

Also Published As

Publication number Publication date
JPS62153047U (enEXAMPLES) 1987-09-28

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