JPH0321892Y2 - - Google Patents

Info

Publication number
JPH0321892Y2
JPH0321892Y2 JP1986041546U JP4154686U JPH0321892Y2 JP H0321892 Y2 JPH0321892 Y2 JP H0321892Y2 JP 1986041546 U JP1986041546 U JP 1986041546U JP 4154686 U JP4154686 U JP 4154686U JP H0321892 Y2 JPH0321892 Y2 JP H0321892Y2
Authority
JP
Japan
Prior art keywords
polishing
adhesive
polishing pad
polished
carrier member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986041546U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62153045U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986041546U priority Critical patent/JPH0321892Y2/ja
Publication of JPS62153045U publication Critical patent/JPS62153045U/ja
Application granted granted Critical
Publication of JPH0321892Y2 publication Critical patent/JPH0321892Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
JP1986041546U 1986-03-19 1986-03-19 Expired JPH0321892Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986041546U JPH0321892Y2 (enEXAMPLES) 1986-03-19 1986-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986041546U JPH0321892Y2 (enEXAMPLES) 1986-03-19 1986-03-19

Publications (2)

Publication Number Publication Date
JPS62153045U JPS62153045U (enEXAMPLES) 1987-09-28
JPH0321892Y2 true JPH0321892Y2 (enEXAMPLES) 1991-05-13

Family

ID=30856648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986041546U Expired JPH0321892Y2 (enEXAMPLES) 1986-03-19 1986-03-19

Country Status (1)

Country Link
JP (1) JPH0321892Y2 (enEXAMPLES)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117692A (en) * 1976-03-30 1977-10-03 Agency Of Ind Science & Technol Preparation of sample with polished surface
JPS6121174A (ja) * 1984-07-09 1986-01-29 Sekisui Chem Co Ltd 表面保護用粘着テ−プもしくはシ−ト

Also Published As

Publication number Publication date
JPS62153045U (enEXAMPLES) 1987-09-28

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