JPH03218648A - 位置検出装置 - Google Patents

位置検出装置

Info

Publication number
JPH03218648A
JPH03218648A JP21427490A JP21427490A JPH03218648A JP H03218648 A JPH03218648 A JP H03218648A JP 21427490 A JP21427490 A JP 21427490A JP 21427490 A JP21427490 A JP 21427490A JP H03218648 A JPH03218648 A JP H03218648A
Authority
JP
Japan
Prior art keywords
circuit
pattern
signal
area
partial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21427490A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582057B2 (cs
Inventor
Yutaka Sako
裕 酒匂
Seiji Kashioka
誠治 柏岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21427490A priority Critical patent/JPH03218648A/ja
Publication of JPH03218648A publication Critical patent/JPH03218648A/ja
Publication of JPH0582057B2 publication Critical patent/JPH0582057B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP21427490A 1990-08-15 1990-08-15 位置検出装置 Granted JPH03218648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21427490A JPH03218648A (ja) 1990-08-15 1990-08-15 位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21427490A JPH03218648A (ja) 1990-08-15 1990-08-15 位置検出装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3607080A Division JPS56132505A (en) 1980-03-24 1980-03-24 Position detecting method

Publications (2)

Publication Number Publication Date
JPH03218648A true JPH03218648A (ja) 1991-09-26
JPH0582057B2 JPH0582057B2 (cs) 1993-11-17

Family

ID=16653020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21427490A Granted JPH03218648A (ja) 1990-08-15 1990-08-15 位置検出装置

Country Status (1)

Country Link
JP (1) JPH03218648A (cs)

Also Published As

Publication number Publication date
JPH0582057B2 (cs) 1993-11-17

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