JPH0319686B2 - - Google Patents

Info

Publication number
JPH0319686B2
JPH0319686B2 JP56142334A JP14233481A JPH0319686B2 JP H0319686 B2 JPH0319686 B2 JP H0319686B2 JP 56142334 A JP56142334 A JP 56142334A JP 14233481 A JP14233481 A JP 14233481A JP H0319686 B2 JPH0319686 B2 JP H0319686B2
Authority
JP
Japan
Prior art keywords
hold time
wafers
mirror
heat treatment
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56142334A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5844724A (ja
Inventor
Nobuyuki Akyama
Mitsuo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumco Techxiv Corp
Original Assignee
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Electronic Metals Co Ltd filed Critical Komatsu Electronic Metals Co Ltd
Priority to JP56142334A priority Critical patent/JPS5844724A/ja
Publication of JPS5844724A publication Critical patent/JPS5844724A/ja
Publication of JPH0319686B2 publication Critical patent/JPH0319686B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P36/03—

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP56142334A 1981-09-11 1981-09-11 シリコン基板の製造方法 Granted JPS5844724A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56142334A JPS5844724A (ja) 1981-09-11 1981-09-11 シリコン基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56142334A JPS5844724A (ja) 1981-09-11 1981-09-11 シリコン基板の製造方法

Publications (2)

Publication Number Publication Date
JPS5844724A JPS5844724A (ja) 1983-03-15
JPH0319686B2 true JPH0319686B2 (enExample) 1991-03-15

Family

ID=15312932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56142334A Granted JPS5844724A (ja) 1981-09-11 1981-09-11 シリコン基板の製造方法

Country Status (1)

Country Link
JP (1) JPS5844724A (enExample)

Also Published As

Publication number Publication date
JPS5844724A (ja) 1983-03-15

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