JPH031790Y2 - - Google Patents

Info

Publication number
JPH031790Y2
JPH031790Y2 JP7610785U JP7610785U JPH031790Y2 JP H031790 Y2 JPH031790 Y2 JP H031790Y2 JP 7610785 U JP7610785 U JP 7610785U JP 7610785 U JP7610785 U JP 7610785U JP H031790 Y2 JPH031790 Y2 JP H031790Y2
Authority
JP
Japan
Prior art keywords
thermocouple
temperature
rod member
temperature measuring
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7610785U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61190837U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7610785U priority Critical patent/JPH031790Y2/ja
Publication of JPS61190837U publication Critical patent/JPS61190837U/ja
Application granted granted Critical
Publication of JPH031790Y2 publication Critical patent/JPH031790Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B11/00Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses
    • B30B11/001Presses specially adapted for forming shaped articles from material in particulate or plastic state, e.g. briquetting presses, tabletting presses using a flexible element, e.g. diaphragm, urged by fluid pressure; Isostatic presses
    • B30B11/002Isostatic press chambers; Press stands therefor

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Powder Metallurgy (AREA)
JP7610785U 1985-05-21 1985-05-21 Expired JPH031790Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7610785U JPH031790Y2 (https=) 1985-05-21 1985-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7610785U JPH031790Y2 (https=) 1985-05-21 1985-05-21

Publications (2)

Publication Number Publication Date
JPS61190837U JPS61190837U (https=) 1986-11-27
JPH031790Y2 true JPH031790Y2 (https=) 1991-01-18

Family

ID=30617944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7610785U Expired JPH031790Y2 (https=) 1985-05-21 1985-05-21

Country Status (1)

Country Link
JP (1) JPH031790Y2 (https=)

Also Published As

Publication number Publication date
JPS61190837U (https=) 1986-11-27

Similar Documents

Publication Publication Date Title
JP3671951B2 (ja) 測温装置及びそれを用いたセラミックスヒータ
WO2004028208A1 (ja) ウエハー保持体及び半導体製造装置
KR100461879B1 (ko) 세라믹 서셉터의 지지 구조
JPH0711446A (ja) 気相成長用サセプタ装置
JP2007251126A (ja) 半導体バッチ加熱組立体
JP4905290B2 (ja) 半導体製造装置用測温装置及びそれを搭載した半導体製造装置
JPH031790Y2 (https=)
US10215646B2 (en) Thermometer
US5092938A (en) Temperature detector for use in high temperature and high pressure furnaces
US6193803B1 (en) Substrate holding apparatus for processing semiconductors
JPH031788Y2 (https=)
US20240237155A1 (en) Electric heating device
JPH0317075B2 (https=)
JP3325384B2 (ja) 熱処理炉用温度測定装置
JPH01272932A (ja) 高純度高温雰囲気用熱電対の保護装置
JP2003308951A (ja) 給電用電極棒と給電用端子との連結構造、ヒータエレメント、加熱装置及び基板加熱装置
CN220187866U (zh) 测温装置以及烧结炉
US11815403B2 (en) Specialty control thermocouple for vacuum heat treat furnaces
US4214117A (en) Furnace heated by radiation
CA2501260A1 (en) Extended temperature range emf device
Moiseeva The prospects for developing standard thermocouples of pure metals
Hiraka et al. Compact fixed-point blackbody furnace with improved temperature uniformity and multi-fixed points use
JPS64805B2 (https=)
JPS62274071A (ja) 高温用保護管及び熱電対
JP2000208236A (ja) 炉壁へのセラミックヒ―タ取付構造