JPH031739Y2 - - Google Patents

Info

Publication number
JPH031739Y2
JPH031739Y2 JP1988164463U JP16446388U JPH031739Y2 JP H031739 Y2 JPH031739 Y2 JP H031739Y2 JP 1988164463 U JP1988164463 U JP 1988164463U JP 16446388 U JP16446388 U JP 16446388U JP H031739 Y2 JPH031739 Y2 JP H031739Y2
Authority
JP
Japan
Prior art keywords
air
air supply
filter
clean room
filter box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1988164463U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01120037U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988164463U priority Critical patent/JPH031739Y2/ja
Publication of JPH01120037U publication Critical patent/JPH01120037U/ja
Application granted granted Critical
Publication of JPH031739Y2 publication Critical patent/JPH031739Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1988164463U 1988-12-21 1988-12-21 Expired JPH031739Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988164463U JPH031739Y2 (enEXAMPLES) 1988-12-21 1988-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988164463U JPH031739Y2 (enEXAMPLES) 1988-12-21 1988-12-21

Publications (2)

Publication Number Publication Date
JPH01120037U JPH01120037U (enEXAMPLES) 1989-08-15
JPH031739Y2 true JPH031739Y2 (enEXAMPLES) 1991-01-18

Family

ID=31450094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988164463U Expired JPH031739Y2 (enEXAMPLES) 1988-12-21 1988-12-21

Country Status (1)

Country Link
JP (1) JPH031739Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4798816B2 (ja) * 1999-06-08 2011-10-19 高砂熱学工業株式会社 循環型クリーンルーム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS602501Y2 (ja) * 1979-08-14 1985-01-24 ダイキンプラント株式会社 空気清浄機

Also Published As

Publication number Publication date
JPH01120037U (enEXAMPLES) 1989-08-15

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