JPH0316278Y2 - - Google Patents
Info
- Publication number
- JPH0316278Y2 JPH0316278Y2 JP7279985U JP7279985U JPH0316278Y2 JP H0316278 Y2 JPH0316278 Y2 JP H0316278Y2 JP 7279985 U JP7279985 U JP 7279985U JP 7279985 U JP7279985 U JP 7279985U JP H0316278 Y2 JPH0316278 Y2 JP H0316278Y2
- Authority
- JP
- Japan
- Prior art keywords
- cradle
- semiconductor wafer
- turntable
- container
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 56
- 235000012431 wafers Nutrition 0.000 claims description 55
- 238000001035 drying Methods 0.000 claims description 23
- 230000000694 effects Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7279985U JPH0316278Y2 (US20020095090A1-20020718-M00002.png) | 1985-05-16 | 1985-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7279985U JPH0316278Y2 (US20020095090A1-20020718-M00002.png) | 1985-05-16 | 1985-05-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61188354U JPS61188354U (US20020095090A1-20020718-M00002.png) | 1986-11-25 |
| JPH0316278Y2 true JPH0316278Y2 (US20020095090A1-20020718-M00002.png) | 1991-04-08 |
Family
ID=30611551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7279985U Expired JPH0316278Y2 (US20020095090A1-20020718-M00002.png) | 1985-05-16 | 1985-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316278Y2 (US20020095090A1-20020718-M00002.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2955910B2 (ja) * | 1992-09-25 | 1999-10-04 | 大日本スクリーン製造株式会社 | 横軸回転式基板乾燥装置 |
| JP3922852B2 (ja) * | 1999-11-16 | 2007-05-30 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
-
1985
- 1985-05-16 JP JP7279985U patent/JPH0316278Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61188354U (US20020095090A1-20020718-M00002.png) | 1986-11-25 |
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