JPH031602B2 - - Google Patents

Info

Publication number
JPH031602B2
JPH031602B2 JP16415384A JP16415384A JPH031602B2 JP H031602 B2 JPH031602 B2 JP H031602B2 JP 16415384 A JP16415384 A JP 16415384A JP 16415384 A JP16415384 A JP 16415384A JP H031602 B2 JPH031602 B2 JP H031602B2
Authority
JP
Japan
Prior art keywords
workpiece
period
irregularities
feed
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16415384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141907A (ja
Inventor
Hiroshi Yokogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP16415384A priority Critical patent/JPS6141907A/ja
Publication of JPS6141907A publication Critical patent/JPS6141907A/ja
Publication of JPH031602B2 publication Critical patent/JPH031602B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP16415384A 1984-08-03 1984-08-03 工作物表面形状測定方法 Granted JPS6141907A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16415384A JPS6141907A (ja) 1984-08-03 1984-08-03 工作物表面形状測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16415384A JPS6141907A (ja) 1984-08-03 1984-08-03 工作物表面形状測定方法

Publications (2)

Publication Number Publication Date
JPS6141907A JPS6141907A (ja) 1986-02-28
JPH031602B2 true JPH031602B2 (enrdf_load_html_response) 1991-01-11

Family

ID=15787743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16415384A Granted JPS6141907A (ja) 1984-08-03 1984-08-03 工作物表面形状測定方法

Country Status (1)

Country Link
JP (1) JPS6141907A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI464385B (zh) * 2012-03-22 2014-12-11 Hiti Digital Inc 用來偵測透光光柵結構之偵測裝置與偵測方法
TWI497103B (zh) * 2013-03-15 2015-08-21 Hiti Digital Inc 透明介質偵測技術及應用

Also Published As

Publication number Publication date
JPS6141907A (ja) 1986-02-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term