JPH0313741U - - Google Patents

Info

Publication number
JPH0313741U
JPH0313741U JP7526989U JP7526989U JPH0313741U JP H0313741 U JPH0313741 U JP H0313741U JP 7526989 U JP7526989 U JP 7526989U JP 7526989 U JP7526989 U JP 7526989U JP H0313741 U JPH0313741 U JP H0313741U
Authority
JP
Japan
Prior art keywords
cassette
wafer
inspection
utility
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7526989U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7526989U priority Critical patent/JPH0313741U/ja
Publication of JPH0313741U publication Critical patent/JPH0313741U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP7526989U 1989-06-27 1989-06-27 Pending JPH0313741U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7526989U JPH0313741U (ko) 1989-06-27 1989-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7526989U JPH0313741U (ko) 1989-06-27 1989-06-27

Publications (1)

Publication Number Publication Date
JPH0313741U true JPH0313741U (ko) 1991-02-12

Family

ID=31615702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7526989U Pending JPH0313741U (ko) 1989-06-27 1989-06-27

Country Status (1)

Country Link
JP (1) JPH0313741U (ko)

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