JPH02140852U - - Google Patents
Info
- Publication number
- JPH02140852U JPH02140852U JP4933189U JP4933189U JPH02140852U JP H02140852 U JPH02140852 U JP H02140852U JP 4933189 U JP4933189 U JP 4933189U JP 4933189 U JP4933189 U JP 4933189U JP H02140852 U JPH02140852 U JP H02140852U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- recessed portion
- transporting
- tray
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4933189U JPH02140852U (ko) | 1989-04-25 | 1989-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4933189U JPH02140852U (ko) | 1989-04-25 | 1989-04-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02140852U true JPH02140852U (ko) | 1990-11-26 |
Family
ID=31566924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4933189U Pending JPH02140852U (ko) | 1989-04-25 | 1989-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02140852U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002231795A (ja) * | 2001-02-05 | 2002-08-16 | Sony Corp | サセプタ |
-
1989
- 1989-04-25 JP JP4933189U patent/JPH02140852U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002231795A (ja) * | 2001-02-05 | 2002-08-16 | Sony Corp | サセプタ |
| JP4507414B2 (ja) * | 2001-02-05 | 2010-07-21 | ソニー株式会社 | サセプタ |