JPH01161334U - - Google Patents
Info
- Publication number
- JPH01161334U JPH01161334U JP5744788U JP5744788U JPH01161334U JP H01161334 U JPH01161334 U JP H01161334U JP 5744788 U JP5744788 U JP 5744788U JP 5744788 U JP5744788 U JP 5744788U JP H01161334 U JPH01161334 U JP H01161334U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- wafer
- cassette positioning
- wafers
- positioning jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5744788U JPH01161334U (ko) | 1988-04-27 | 1988-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5744788U JPH01161334U (ko) | 1988-04-27 | 1988-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01161334U true JPH01161334U (ko) | 1989-11-09 |
Family
ID=31283303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5744788U Pending JPH01161334U (ko) | 1988-04-27 | 1988-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01161334U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020008949A (ko) * | 2000-07-21 | 2002-02-01 | 김광교 | 반도체 제조에 사용되는 웨이퍼 보우트 |
-
1988
- 1988-04-27 JP JP5744788U patent/JPH01161334U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20020008949A (ko) * | 2000-07-21 | 2002-02-01 | 김광교 | 반도체 제조에 사용되는 웨이퍼 보우트 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01161334U (ko) | ||
| JPS6237932U (ko) | ||
| JPH03128943U (ko) | ||
| JPS5839039U (ja) | 半導体素子の蒸着治具 | |
| JPH01107126U (ko) | ||
| JPH01146535U (ko) | ||
| JPS60100748U (ja) | フオトレジスト塗布装置 | |
| JPH0313741U (ko) | ||
| JPS60927U (ja) | 半導体ウエハ貼付装置 | |
| JPH0288233U (ko) | ||
| JPS63153537U (ko) | ||
| JPS6289144U (ko) | ||
| JPS6236531U (ko) | ||
| JPS642442U (ko) | ||
| JPS60156751U (ja) | 半導体ウエハ用収納治具 | |
| JPH01165623U (ko) | ||
| JPS6132077U (ja) | 半導体ウエハ−の運搬用トレイ | |
| JPS5924229U (ja) | フロ−テイングチヤツク | |
| JPS59146941U (ja) | 半導体洗浄治具 | |
| JPS6380848U (ko) | ||
| JPS58124952U (ja) | 半導体ウエハ用収納治具 | |
| JPH0265341U (ko) | ||
| JPH0170340U (ko) | ||
| JPH0180933U (ko) | ||
| JPH0256442U (ko) |