JPH01146535U - - Google Patents
Info
- Publication number
- JPH01146535U JPH01146535U JP4360388U JP4360388U JPH01146535U JP H01146535 U JPH01146535 U JP H01146535U JP 4360388 U JP4360388 U JP 4360388U JP 4360388 U JP4360388 U JP 4360388U JP H01146535 U JPH01146535 U JP H01146535U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- compression spring
- wafers
- transferred
- transfer jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4360388U JPH01146535U (ko) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4360388U JPH01146535U (ko) | 1988-03-30 | 1988-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146535U true JPH01146535U (ko) | 1989-10-09 |
Family
ID=31269994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4360388U Pending JPH01146535U (ko) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146535U (ko) |
-
1988
- 1988-03-30 JP JP4360388U patent/JPH01146535U/ja active Pending