JPH01107126U - - Google Patents
Info
- Publication number
- JPH01107126U JPH01107126U JP297388U JP297388U JPH01107126U JP H01107126 U JPH01107126 U JP H01107126U JP 297388 U JP297388 U JP 297388U JP 297388 U JP297388 U JP 297388U JP H01107126 U JPH01107126 U JP H01107126U
- Authority
- JP
- Japan
- Prior art keywords
- groove
- wafer boat
- chamfered
- outer peripheral
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP297388U JPH01107126U (ko) | 1988-01-12 | 1988-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP297388U JPH01107126U (ko) | 1988-01-12 | 1988-01-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01107126U true JPH01107126U (ko) | 1989-07-19 |
Family
ID=31204202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP297388U Pending JPH01107126U (ko) | 1988-01-12 | 1988-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01107126U (ko) |
-
1988
- 1988-01-12 JP JP297388U patent/JPH01107126U/ja active Pending