JPH0281536U - - Google Patents
Info
- Publication number
- JPH0281536U JPH0281536U JP16146388U JP16146388U JPH0281536U JP H0281536 U JPH0281536 U JP H0281536U JP 16146388 U JP16146388 U JP 16146388U JP 16146388 U JP16146388 U JP 16146388U JP H0281536 U JPH0281536 U JP H0281536U
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- support frame
- corners
- outside
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16146388U JPH0281536U (ko) | 1988-12-12 | 1988-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16146388U JPH0281536U (ko) | 1988-12-12 | 1988-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0281536U true JPH0281536U (ko) | 1990-06-22 |
Family
ID=31444422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16146388U Pending JPH0281536U (ko) | 1988-12-12 | 1988-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0281536U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007047254A (ja) * | 2005-08-08 | 2007-02-22 | Shin Etsu Polymer Co Ltd | ペリクル用収納容器 |
-
1988
- 1988-12-12 JP JP16146388U patent/JPH0281536U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007047254A (ja) * | 2005-08-08 | 2007-02-22 | Shin Etsu Polymer Co Ltd | ペリクル用収納容器 |
| JP4668724B2 (ja) * | 2005-08-08 | 2011-04-13 | 信越ポリマー株式会社 | ペリクル用収納容器 |